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    TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
    1.
    发明公开
    TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY 审中-公开

    公开(公告)号：US20240347314A1

    公开(公告)日：2024-10-17

    申请号：US18299635

    申请日：2023-04-12

    Applicant: FEI Company

    Inventor： Peter Christiaan Tiemeijer ,  Sorin Lazar ,  Bert Henning Freitag ,  Paolo Longo

    IPC: H01J37/244

    CPC classification number: H01J37/244 ,  H01J2237/1514 ,  H01J2237/1523 ,  H01J2237/24485 ,  H01J2237/2826

    Abstract: Systems, devices, methods, and techniques for energy-loss spectroscopy at relatively large energy losses are described. A charged particle microscope system can include a beam column section. The beam column section can include one or more charged particle optical elements calibrated for a first energy and one or more charged particle optical elements calibrated for a second energy. The charged particle microscope system can include a detector section. The detector section can be disposed at a position downstream of the beam column section. The detector section can include an electrostatic or magnetic prism and one or more charged particle optical elements calibrated for the second energy. The first energy and the second energy can be different.

    SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE
    3.
    发明申请
    SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE 有权
    传输充电粒子微光谱中的光谱

    公开(公告)号：US20160086762A1

    公开(公告)日：2016-03-24

    申请号：US14860586

    申请日：2015-09-21

    Applicant: FEI Company

    Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

    IPC: H01J37/05 ,  H01J37/21 ,  H01J37/285 ,  H01J37/20

    CPC classification number: H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

    Abstract: A Transmission Charged-Particle Microscope includes an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus including: a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis; a detector; an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of: a width of said aperture parallel to said dispersion direction; and a position of a center of said aperture relative to said propagation axis.

    Abstract translation: 透射带电粒子显微镜包括成像系统，用于将透射通过样本的带电粒子的通量引导到分光装置，所述分光装置包括：分散装置，用于将所述通量分散到基本上平行传播的光谱子束的能量分辨阵列 到传播轴; 检测器 用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入检测器的所述阵列的子集，所述孔径在垂直于所述传播轴线的分散方向上由第一和第二相对边缘限定 每个边缘相对于所述传播轴线独立地定位，从而允许独立调整以下两者：平行于所述分散方向的所述孔的宽度; 以及所述孔的中心相对于所述传播轴的位置。

    Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System
    4.
    发明申请
    Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System 审中-公开
    调查和纠正带电粒子透镜系统中的畸变的方法

    公开(公告)号：US20140061464A1

    公开(公告)日：2014-03-06

    申请号：US14016997

    申请日：2013-09-03

    Applicant: FEI Company

    Inventor： Ivan Lazic ,  Gijs van Duinen ,  Peter Christiaan Tiemeijer

    IPC: H01J37/153

    CPC classification number: H01J37/153 ,  H01J2237/1534

    Abstract: A system of investigating aberrations in a charged-particle lens system, which lens system has an object space comprising an object plane and an image space comprising an image plane, includes: Selecting a fixed pivot point on said object plane; Directing a charged-particle beam through said pivot point, entrance pupil and lens system and onto said image plane, said beam having a relatively small cross-sectional area relative to the area of the entrance pupil; Changing the orientation of said beam through said pivot point, so as to trace out an entrance figure on said entrance pupil and a corresponding image figure on said image plane; Registering said image figure; Repeating this procedure at a series of different focus settings of the lens system, thus acquiring a set of registered image figures at different focus settings; Analyzing said set so as to derive lens aberrations therefrom.

    Abstract translation: 一种调查带电粒子透镜系统中的像差的系统，该透镜系统具有包括物平面的对象空间和包括图像平面的图像空间，包括：在所述物平面上选择固定的枢转点; 使带电粒子束通过所述枢转点，入射光瞳和透镜系统并引导到所述图像平面上，所述光束相对于入射光瞳的面积具有相对小的横截面积; 通过所述枢转点改变所述光束的方向，以便在所述图像平面上绘制所述入射光瞳上的入射图和对应的图像图; 注册图像图; 在镜头系统的一系列不同焦点设置下重复此过程，从而以不同的焦点设置获取一组注册的图像数字; 分析所述集合以从中导出透镜像差。

    Transmission charged particle microscope with an electron energy loss spectroscopy detector
    6.
    发明授权
    Transmission charged particle microscope with an electron energy loss spectroscopy detector 有权

    公开(公告)号：US12255045B2

    公开(公告)日：2025-03-18

    申请号：US18629633

    申请日：2024-04-08

    Applicant: FEI Company

    Inventor： Peter Christiaan Tiemeijer

    IPC: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/20 ,  H01J37/26

    Abstract: The invention relates to a transmission charged particle microscope comprising a charged particle beam source for emitting a charged particle beam, a sample holder for holding a sample, an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample, and a control unit for controlling operations of the transmission charged particle microscope. As defined herein, the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield a first magnification whilst keeping said diffraction pattern substantially in focus. Said at least two modes comprise a first mode having first settings of a final projector lens of a projecting system; and a second mode having second settings of said final projector lens.

    Method of determining an energy width of a charged particle beam
    8.
    发明授权
    Method of determining an energy width of a charged particle beam 有权

    公开(公告)号：US11948771B2

    公开(公告)日：2024-04-02

    申请号：US17523228

    申请日：2021-11-10

    Applicant: FEI Company

    Inventor： Peter Christiaan Tiemeijer

    IPC: H01J37/244 ,  H01J37/09

    CPC classification number: H01J37/244 ,  H01J37/09 ,  H01J2237/24507

    Abstract: The disclosure relates to a method of determining an energy width of a charged particle beam, comprising the steps of providing a charged particle beam, directing said beam towards a specimen, and forming an energy-dispersed beam from a flux of charged particles transmitted through the specimen. As defined herein, the method comprises the steps of providing a slit element in a slit plane, and using said slit element for blocking a part of said energy-dispersed beam, as well as the step of modifying said energy-dispersed beam at the location of said slit plane in such a way that said energy dispersed beam is partially blocked at said slit element. The unblocked part of said energy-dispersed beam is imaged and an intensity gradient of said imaged energy-dispersed beam is determined, with which the energy width of the charged particle beam can be determined.

    MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE
    10.
    发明申请
    MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE 有权

    公开(公告)号：US20220199353A1

    公开(公告)日：2022-06-23

    申请号：US17130987

    申请日：2020-12-22

    Applicant: FEI Company

    Inventor： Alexander Henstra ,  Ali Mohammadi-Gheidari ,  Peter Christiaan Tiemeijer

    IPC: H01J37/14 ,  H01J37/28

    Abstract: An adjustable magnetic field free objective lens for a charged particle microscope is disclosed herein. An example charged particle microscope at least includes first and second optical elements arranged on opposing sides of a sample plane, a third optical element arranged around the sample plane, and a controller coupled to control the first, second and third optical elements. The controller coupled to excite the first and second optical elements to generate first and second magnetic lenses, the first and second magnetic lenses formed on opposing sides of the sample plane and oriented in the same direction, and excite the third optical element to generate a third magnetic lens at the sample plane that is oriented in an opposite direction, where a ratio of the excitation of the third optical element to the excitation of the first and second optical elements adjusts a magnetic field at the sample plane.

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