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    SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE
    1.
    发明申请
    SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE 有权
    传输充电粒子微光谱中的光谱

    公开(公告)号：US20160086762A1

    公开(公告)日：2016-03-24

    申请号：US14860586

    申请日：2015-09-21

    Applicant: FEI Company

    Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

    IPC: H01J37/05 ,  H01J37/21 ,  H01J37/285 ,  H01J37/20

    CPC classification number: H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

    Abstract: A Transmission Charged-Particle Microscope includes an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus including: a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis; a detector; an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of: a width of said aperture parallel to said dispersion direction; and a position of a center of said aperture relative to said propagation axis.

    Abstract translation: 透射带电粒子显微镜包括成像系统，用于将透射通过样本的带电粒子的通量引导到分光装置，所述分光装置包括：分散装置，用于将所述通量分散到基本上平行传播的光谱子束的能量分辨阵列 到传播轴; 检测器 用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入检测器的所述阵列的子集，所述孔径在垂直于所述传播轴线的分散方向上由第一和第二相对边缘限定 每个边缘相对于所述传播轴线独立地定位，从而允许独立调整以下两者：平行于所述分散方向的所述孔的宽度; 以及所述孔的中心相对于所述传播轴的位置。

    Method of performing spectroscopy in a Transmission Charged-Particle Microscope
    3.
    发明申请
    Method of performing spectroscopy in a Transmission Charged-Particle Microscope 有权
    在透射带电粒子显微镜中进行光谱的方法

    公开(公告)号：US20160071689A1

    公开(公告)日：2016-03-10

    申请号：US14844778

    申请日：2015-09-03

    Applicant: FEI Company

    Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

    IPC: H01J37/22 ,  H01J37/147 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

    Abstract: A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising: a specimen holder; a source, for producing a beam of charged particles; an illuminator, for directing said beam so as to irradiate the specimen; an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams, the method comprising: using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array; providing; using a radiation sensor in said flux upstream of said aperture device to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector; using a sensing result from said sensor to adjust a detection result from said detector.

    Abstract translation: 一种在透射带电粒子显微镜中进行光谱的方法，包括：样品架; 用于产生带电粒子束的源; 照明器，用于引导所述光束以照射所述样本; 一种成像系统，用于将通过样本传输的带电粒子的通量引导到分光装置上，该分光装置包括用于将所述通量分散到光谱子束的能量分辨阵列中的分散装置，所述方法包括：使用可调节孔径装置来允许 所述阵列的第一部分到达检测器，同时阻挡所述阵列的第二部分; 提供; 在所述孔设备上游的所述通量中使用辐射传感器，以在阵列的所述第二部分的选定区域中进行局部辐射感测，同时由所述检测器检测所述第一部分; 使用来自所述传感器的感测结果来调整来自所述检测器的检测结果。

    Method of imaging a specimen using a transmission charged particle microscope
    5.
    发明授权
    Method of imaging a specimen using a transmission charged particle microscope 有权

    公开(公告)号：US11810751B2

    公开(公告)日：2023-11-07

    申请号：US17354986

    申请日：2021-06-22

    Applicant: FEI Company

    Inventor： Peter Tiemeijer ,  Evgeniia Pechnikova ,  Rudolf Geurink ,  Abhay Kotecha ,  Jamie McCormack

    IPC: H01J37/22 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/222 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/226

    Abstract: The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles. Said first and second recorded energy filtered flux are then used for imaging said specimen with increased contrast.

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