公开(公告)号：US11715618B2

公开(公告)日：2023-08-01

申请号：US17392758

申请日：2021-08-03

Applicant: FEI Company

Inventor： Yuchen Deng ,  Alexander Henstra ,  Peter Tiemeijer

IPC: H01J37/02 ,  H01J37/244 ,  H01J37/04

CPC classification number: H01J37/026 ,  H01J37/045 ,  H01J37/244 ,  H01J2237/0045 ,  H01J2237/2448

Abstract: Systems and methods for reducing the buildup of charge during the investigation of samples using charged particle beams, according to the present disclosure include irradiating a first portion of a sample during a first time period, wherein the irradiating the first portion of the sample causes a gradual accumulation of net charge in the first portion of the sample, generating imaging data based on emissions resultant from irradiating the first portion of the sample, and then irradiating a second portion of a sample holder for a second time period. The methods may further includes iteratively repeating the irradiation of the first portion and the second portion during imaging of the sample region. When more than one region of interest on the sample is to be investigated, the method may also include continuing to image additional portions of the sample by iteratively irradiating a region of interest on the sample and a corresponding portion of the sample holder.

公开(公告)号：US20240112878A1

公开(公告)日：2024-04-04

申请号：US17957171

申请日：2022-09-30

Applicant: FEI COMPANY

Inventor： Pleun Dona ,  Johannes A.H.W.G. Persoon ,  Hugo Cornelis Van Leeuwen ,  Peter Tiemeijer

IPC: H01J37/18 ,  H01J37/141 ,  H01J37/20

CPC classification number: H01J37/18 ,  H01J37/141 ,  H01J37/20

Abstract: A charged particle microscope for imaging a specimen. The charged particle microscope includes a specimen holder movable into an imaging position intersecting an optical axis, a specimen chamber configured to receive the specimen holder in the imaging position, and a sorption pump disposed in the specimen chamber and configured to lower a pressure in the specimen chamber.

公开(公告)号：US11810751B2

公开(公告)日：2023-11-07

申请号：US17354986

申请日：2021-06-22

Applicant: FEI Company

Inventor： Peter Tiemeijer ,  Evgeniia Pechnikova ,  Rudolf Geurink ,  Abhay Kotecha ,  Jamie McCormack

IPC: H01J37/22 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/222 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/226

Abstract: The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles. Said first and second recorded energy filtered flux are then used for imaging said specimen with increased contrast.

公开(公告)号：US20230040558A1

公开(公告)日：2023-02-09

申请号：US17392758

申请日：2021-08-03

Applicant: FEI Company

Inventor： Yuchen Deng ,  Alexander Henstra ,  Peter Tiemeijer

IPC: H01J37/02 ,  H01J37/244 ,  H01J37/04

Abstract: Systems and methods for reducing the buildup of charge during the investigation of samples using charged particle beams, according to the present disclosure include irradiating a first portion of a sample during a first time period, wherein the irradiating the first portion of the sample causes a gradual accumulation of net charge in the first portion of the sample, generating imaging data based on emissions resultant from irradiating the first portion of the sample, and then irradiating a second portion of a sample holder for a second time period. The methods may further includes iteratively repeating the irradiation of the first portion and the second portion during imaging of the sample region. When more than one region of interest on the sample is to be investigated, the method may also include continuing to image additional portions of the sample by iteratively irradiating a region of interest on the sample and a corresponding portion of the sample holder.