公开(公告)号：US20240112878A1

公开(公告)日：2024-04-04

申请号：US17957171

申请日：2022-09-30

Applicant: FEI COMPANY

Inventor： Pleun Dona ,  Johannes A.H.W.G. Persoon ,  Hugo Cornelis Van Leeuwen ,  Peter Tiemeijer

IPC: H01J37/18 ,  H01J37/141 ,  H01J37/20

CPC classification number: H01J37/18 ,  H01J37/141 ,  H01J37/20

Abstract: A charged particle microscope for imaging a specimen. The charged particle microscope includes a specimen holder movable into an imaging position intersecting an optical axis, a specimen chamber configured to receive the specimen holder in the imaging position, and a sorption pump disposed in the specimen chamber and configured to lower a pressure in the specimen chamber.