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1.发明申请Method of Measuring the Temperature of a Sample Carrier in a Charged Particle-Optical Apparatus 有权测量带电粒子光学仪器中样品载体温度的方法公开(公告)号：US20120128028A1
公开(公告)日：2012-05-24
申请号：US13304181
申请日：2011-11-23
Applicant: Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van der Water
Inventor： Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van der Water
CPC classification number: G01K5/68 , G01K11/20 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/24585
Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.
Abstract translation: 一种确定带电粒子光学装置中的样品载体的温度的方法，其特征在于，所述方法包括用带电粒子束观察样品载体，所述观察给出关于样品载体的温度的信息。 本发明基于如下观点：带电粒子光学装置如TEM，STEM，SEM或FIB可用于观察样品载体的温度相关变化。 这些改变可以是机械变化（例如双金属），晶体学变化（例如钙钛矿）和发光变化（强度或衰变时间）。 在优选实施例中，样品载体显示两个双金属，显示具有不同热膨胀系数的金属，在相反方向上弯曲。 两个双金属片之间的距离用作温度计。
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公开(公告)号：US07800063B2
公开(公告)日：2010-09-21
申请号：US11861721
申请日：2007-09-26
Applicant: Jeroen van de Water , Johannes van den Oetelaar , Raymond Wagner , Hendrik Nicolaas Slingerland , Jan Willem Bruggers , Adriaan Huibert Dirk Ottevanger , Andreas Schmid , Eric A. Olson , Ivan G. Petrov , Todor I. Donchev , Thomas Duden
Inventor： Jeroen van de Water , Johannes van den Oetelaar , Raymond Wagner , Hendrik Nicolaas Slingerland , Jan Willem Bruggers , Adriaan Huibert Dirk Ottevanger , Andreas Schmid , Eric A. Olson , Ivan G. Petrov , Todor I. Donchev , Thomas Duden
Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.
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公开(公告)号：US20100072366A1
公开(公告)日：2010-03-25
申请号：US12564617
申请日：2009-09-22
Applicant: Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank De Jong , Hendrik Nicolaas Slingerland
Inventor： Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank De Jong , Hendrik Nicolaas Slingerland
CPC classification number: H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
Abstract: The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
Abstract translation: 本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。 如本领域技术人员所知，失真可能限制TEM的分辨率，特别是当使用层析成像进行特征的3D重建时。 此外，当在TEM中使用应变分析时，失真可能会限制应变的检测。 为此，本发明公开了一种装备有多极（152）的检测器，该多极体使得TEM的图像翘曲，使得由投影系统引入的失真被抵消。 检测器还可以包括用于检测电子的CCD或荧光屏（151）。
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公开(公告)号：US20090220130A1
公开(公告)日：2009-09-03
申请号：US12158226
申请日：2006-12-22
Applicant: Hendrik Nicolaas Slingerland
Inventor： Hendrik Nicolaas Slingerland
IPC: G06K9/00
CPC classification number: G01N33/582 , G01N21/6428 , G01N33/587
Abstract: The invention relates to a method in which labels are introduced in a sample, a flat surface is prepared on the sample and a series of images is made of the sample surface with e.g. a scanning electron microscope. The labels may be gold labels or e.g. fluorescent labels.By removing a surface layer between obtaining each image, labels at the surface in one image will be removed and will not be visible in a subsequent image. Thereby a 3D reconstruction of the position of labels in the sample can be made.
Abstract translation: 本发明涉及一种方法，其中将标签引入到样品中，在样品上制备平坦的表面，并且一系列图像由例如样品表面制成。 扫描电子显微镜。 标签可以是金标签或例如。 荧光标签。 通过在获得每个图像之间去除表面层，一个图像中的表面上的标签将被移除，并且在随后的图像中将不可见。 因此，可以进行样品中标签的位置的3D重建。
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公开(公告)号：US09153414B2
公开(公告)日：2015-10-06
申请号：US11700993
申请日：2007-01-31
Applicant: Hendrik Nicolaas Slingerland , William Ralph Knowles
Inventor： Hendrik Nicolaas Slingerland , William Ralph Knowles
IPC: G01F23/00 , H01J37/18 , H01J37/301 , H01J37/305
CPC classification number: H01J37/18 , H01J37/301 , H01J37/3056 , H01J2237/182 , H01J2237/2608 , H01J2237/28
Abstract: The invention relates to a particle-optical apparatus with a predetermined final vacuum pressure. To that end a vacuum chamber of said apparatus is via a first restriction connected to a volume where vapor or gas is present at a known pressure and via a second restriction to a vacuum pump. By making the ratio of the two conductances, associated with said restrictions, a calibrated ratio, the final pressure of the vacuum chamber is a predetermined final pressure. This eliminates the need for e.g. vacuum gauges and control systems, resulting in a more compact design of such apparatus.
Abstract translation: 本发明涉及具有预定最终真空压力的粒子光学装置。 为此，所述装置的真空室经由与已知压力下存在蒸气或气体并通过第二限制到真空泵的体积连接的第一限制。 通过使与所述限制相关联的两个电导率的比率为校准比率，真空室的最终压力是预定的最终压力。 这消除了对例如 真空计和控制系统，从而使这种设备更加紧凑的设计。
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Patent Agency Ranking
公开(公告)号：US08071954B2
公开(公告)日：2011-12-06
申请号：US12478707
申请日：2009-06-04
Applicant: Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
Inventor： Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
CPC classification number: H01J37/26 , H01J2237/2614
Abstract: The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
Abstract translation: 本发明涉及一种用于TEM的混合相位板。 根据本发明的相位板类似于安装有Zernike相位板的Boersch相位板。 结果，根据本发明的相位板类似于用于电子散射的Boersch相位板，使得它们通过中心结构（15）的外部并且类似于Zernike相位板，用于穿过中心结构的孔的散射电子。 将本发明的相位板与Zernike相位板进行比较的优点在于，对于以大角度散射的电子，不会由箔吸收或散射电子，导致TEM具有更好的高分辨率性能。 将本发明的相位板与Boersch相位板相比较，中央结构的小型化的要求不那么严格。
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公开(公告)号：US07884326B2
公开(公告)日：2011-02-08
申请号：US11861721
申请日：2007-09-26
Applicant: Jeroen van de Water , Johannes van den Oetelaar , Raymond Wagner , Hendrik Nicolaas Slingerland , Jan Willem Bruggers , Adriaan Huibert Dirk Ottevanger , Andreas Schmid , Eric A. Olson , Ivan G. Petrov , Todor I. Donchev , Thomas Duden
Inventor： Jeroen van de Water , Johannes van den Oetelaar , Raymond Wagner , Hendrik Nicolaas Slingerland , Jan Willem Bruggers , Adriaan Huibert Dirk Ottevanger , Andreas Schmid , Eric A. Olson , Ivan G. Petrov , Todor I. Donchev , Thomas Duden
CPC classification number: G01N23/04 , H01J37/20 , Y10T74/20348
Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.
Abstract translation: 用于例如机器人的操纵器。 描述了透射电子显微镜（TEM），所述操纵器能够旋转和平移样品架（4）。 操纵器将圆形样品架夹在两个构件（3A，3B）之间，所述构件安装在致动器（2A，2B）上。 沿相同方向移动致动器导致样品架的平移，同时沿相反方向移动致动器导致样品架的旋转。
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8.发明授权Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus 有权在带电粒子光学装置中测量样品载体的温度的方法公开(公告)号：US08757873B2
公开(公告)日：2014-06-24
申请号：US13304181
申请日：2011-11-23
Applicant: Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van de Water
Inventor： Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van de Water
CPC classification number: G01K5/68 , G01K11/20 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/24585
Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.
Abstract translation: 一种确定带电粒子光学装置中的样品载体的温度的方法，其特征在于，所述方法包括用带电粒子束观察样品载体，所述观察给出关于样品载体的温度的信息。 本发明基于如下观点：带电粒子光学装置如TEM，STEM，SEM或FIB可用于观察样品载体的温度相关变化。 这些改变可以是机械变化（例如双金属），晶体学变化（例如钙钛矿）和发光变化（强度或衰变时间）。 在优选实施例中，样品载体显示两个双金属，显示具有不同热膨胀系数的金属，在相反方向上弯曲。 两个双金属片之间的距离用作温度计。
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9.发明授权公开(公告)号：US08692196B2
公开(公告)日：2014-04-08
申请号：US12564617
申请日：2009-09-22
Applicant: Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
Inventor： Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
IPC: G01N23/00
CPC classification number: H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
Abstract: The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
Abstract translation: 本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。 如本领域技术人员所知，失真可能限制TEM的分辨率，特别是当使用层析成像进行特征的3D重建时。 此外，当在TEM中使用应变分析时，失真可能会限制应变的检测。 为此，本发明公开了一种装备有多极（152）的检测器，该多极体使得TEM的图像翘曲，使得由投影系统引入的失真被抵消。 检测器还可以包括用于检测电子的CCD或荧光屏（151）。
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公开(公告)号：US20090302217A1
公开(公告)日：2009-12-10
申请号：US12478707
申请日：2009-06-04
Applicant: Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
Inventor： Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
CPC classification number: H01J37/26 , H01J2237/2614
Abstract: The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
Abstract translation: 本发明涉及一种用于TEM的混合相位板。 根据本发明的相位板类似于安装有Zernike相位板的Boersch相位板。 结果，根据本发明的相位板类似于用于电子散射的Boersch相位板，使得它们通过中心结构（15）的外部并且类似于Zernike相位板，用于穿过中心结构的孔的散射电子。 将本发明的相位板与Zernike相位板进行比较的优点在于，对于以大角度散射的电子，不会由箔吸收或散射电子，导致TEM具有更好的高分辨率性能。 将本发明的相位板与Boersch相位板相比较，中央结构的小型化的要求不那么严格。
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