Invention Grant
- Patent Title: Scanning transmission electron microscope using gas amplification
- Patent Title (中): 扫描透射电子显微镜使用气体放大
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Application No.: US12264805Application Date: 2008-11-04
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Publication No.: US08299432B2Publication Date: 2012-10-30
- Inventor: Milos Toth , William Ralph Knowles
- Applicant: Milos Toth , William Ralph Knowles , Rae Knowles, legal representative
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: G01N23/00
- IPC: G01N23/00
Abstract:
A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.
Public/Granted literature
- US20100108881A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE USING GAS AMPLIFICATION Public/Granted day:2010-05-06
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