公开(公告)号：US11674976B2

公开(公告)日：2023-06-13

申请号：US17413662

申请日：2019-12-13

Applicant: ALCATERA LLC

Inventor： Marco Farina

IPC: G01Q30/20 ,  G01Q30/02

CPC classification number: G01Q30/20 ,  G01Q30/02

Abstract: A scanning probe microscope including a holder having at least one electric port, wherein the holder is configured to support a sample to be imaged. The scanning probe microscope further includes a probe and an actuator configured to move at least one of the holder and the probe up to three directions. The scanning probe microscope further includes a reflectometer configured to measure reflection and/or transmission coefficients at each of the at least one electric ports of the holder by feeding each of the at least one electric ports of the holder with electromagnetic wave signals.

公开(公告)号：US20220206039A1

公开(公告)日：2022-06-30

申请号：US17561920

申请日：2021-12-24

Applicant: PARK SYSTEMS CORP.

Inventor： JeongHun AN ,  YongSung CHO ,  Sang-il PARK

IPC: G01Q30/02 ,  G01Q60/24 ,  G05B13/02 ,  G01Q30/20

Abstract: An apparatus and a method for identifying a sample position in an atomic force microscope according to an exemplary embodiment of the present disclosure are provided. The method for identifying a sample position in an atomic force microscope includes receiving a vision image including a subject sample through a vision unit; determining a subject sample region in the vision image using a prediction model which is configured to output the subject sample region by receiving the vision image as an input; and determining a position of the subject sample based on the subject sample region.

公开(公告)号：US20210302466A1

公开(公告)日：2021-09-30

申请号：US17251650

申请日：2019-07-23

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q30/20 ,  G01Q60/14 ,  G01Q60/12

Abstract: In order to meet the needs of, in particular, the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction (10) between a probe tip electrode (80) and sample electrode (20) by irradiating the junction with mode-locked pulses of electromagnetic radiation from a laser (90). Utilizing power measurements within one or more harmonics within the microwave frequency comb, the tip-sample distance in the tunneling junction may be regulated by a feedback control (40) utilizing an extremum-seeking algorithm for maximum efficiency and avoid tip crash when used with resistive samples. Ideally, no externally provided DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

公开(公告)号：US20210231704A1

公开(公告)日：2021-07-29

申请号：US15734784

申请日：2019-10-15

Applicant: LG Chem, Ltd.

Inventor： Byung Hee Choi ,  Byung Joon Chae ,  Jung Hoon Han ,  Ji Yeon Byeon

IPC: G01Q30/04 ,  H01M4/13 ,  H01M10/42 ,  G01Q30/20 ,  G06T5/50 ,  G06T7/00

Abstract: The present disclosure relates to a method for analyzing an electrode for a battery, which has the advantage of being capable of more easily distinguishing between the constituent materials of the electrode such as the electrode active material, the conductive material, and the pores, by using scanning spreading resistance microscopy.

公开(公告)号：US10830791B2

公开(公告)日：2020-11-10

申请号：US16297138

申请日：2019-03-08

Applicant: Shimadzu Corporation

Inventor： Hiroshi Arai ,  Akinori Kogure

IPC: G01Q30/20 ,  G01Q30/18 ,  G01Q10/06

Abstract: A holding member, a sample container, and a mounting member are used in a scanning probe microscope. The mounting member is made of an elastically deformable material such as a rubber material. The mounting member includes an annular main body. When the mounting member is mounted on the holding member and the sample container, the holding member is inserted into the sample container while the main body of the mounting member is elastically deformed along an outer circumferential surface of the sample container. One end of the mounting member is detached from the outer circumferential surface of the sample container, and brought into close contact with an outer circumferential surface of the holding member. When the holding member and the sample container are relatively moved, the main body of the mounting member is elastically deformed.

公开(公告)号：US20200225262A1

公开(公告)日：2020-07-16

申请号：US16328247

申请日：2017-08-29

Applicant: The Governing Council of The University of Toronto ,  Her Majesty The Queen in Right of Canada, as Represented by The Minster of National Defense

Inventor： Zhe She ,  Kristin Topping ,  Heinz-Bernhard Kraatz

IPC: G01Q30/20 ,  G01Q60/60

Abstract: A substrate for the detection of a biological target by Scanning Electrochemical Microscopy (SECM) is provided. The substrate includes: a conductive surface; a probe area provided on the conductive surface, the probe area comprising receptors responsive to the biological target; and a background area provided on the conductive surface, the background area being disposed around the probe area and comprising electroactive compounds providing imaging contrast between the background area and the probe area.

公开(公告)号：US20190324055A1

公开(公告)日：2019-10-24

申请号：US16393367

申请日：2019-04-24

Applicant: The Trustees of Columbia University in the City of New York

Inventor： Daniel Vincent Esposito ,  Glen O'Neil ,  John Wright ,  Han-wen Kuo ,  Anna E. Dorfi

IPC: G01Q60/60 ,  G01Q30/20

Abstract: The system is configured for performing scanning electrochemical microscopy via non-local continuous line probes. The continuous line probes include an insulating probe substrate, an insulating layer, and a conductive band electrode. The system includes a sample stage for positioning a sample substrate to be imaged so as to enable contact with the insulting probe substrate at an angle ΘCLP. The continuous line probe is translated across the sample substrate and changes in the signal generated at the continuous line probe are identified to indicate the presence of features on the sample substrate. A plurality of scans are performed at different angles via rotating the sample stage or the continuous line probe, the results of which are combined and analyzed to produce an image of the sample substrate via compressed sensing reconstruction. The resulting image has comparable resolution to those produced via conventional scanning electrochemical microscopy processes, but in less scan time and with less complex scanning hardware.

公开(公告)号：US20190277881A1

公开(公告)日：2019-09-12

申请号：US16296068

申请日：2019-03-07

Applicant: IMEC vzw

Inventor： Kristof Paredis ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/04 ,  G01Q60/24 ,  G01Q30/20

Abstract: The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.

公开(公告)号：US20180364278A1

公开(公告)日：2018-12-20

申请号：US16116479

申请日：2018-08-29

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q60/12 ,  G01Q60/14 ,  G01Q30/20

CPC classification number: G01Q60/16 ,  G01Q30/20 ,  G01Q60/12 ,  G01Q60/14

Abstract: In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

公开(公告)号：US10054613B2

公开(公告)日：2018-08-21

申请号：US15541669

申请日：2015-07-10

Applicant: PRIVATE INSTITUTION “NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEM”

Inventor： Alexander Alekseev ,  Aleksey Dmitriyevich Volkov ,  Dmitry Yuryevich Sokolov ,  Anton Evgeniyevich Efimov

IPC: G01Q30/20 ,  G01Q10/00

CPC classification number: G01Q30/20 ,  G01N1/06 ,  G01N1/42 ,  G01N2001/2873 ,  G01Q10/00

Abstract: The microscope for monitoring objects after nano-cutting and for investigating structures of macro- and micro-carriers under low temperature comprises a punch having a cutting edge, drives driving the punch along two axes, a platform rotatable in a plane, a piezo-scanner for recording a sample image along three axes, a holder with a carrier of the sample, and a probe unit to which a probe is fastened. The piezo-scanner is fastened to the platform, the punch is able to interact with the sample, and the probe unit is mounted on the platform so as to be movable along one of the axes. The assembly includes a module for mechanical action on the cutting edge of the punch to modify the cutting surface, which module is fastened to the same platform to which the piezo-scanner with the object carrier and the probe unit are fastened.