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1.发明公开公开(公告)号：US20240230712A9
公开(公告)日：2024-07-11
申请号：US18223775
申请日：2023-07-19
发明人： Gyubaek Lee
摘要： The inventive concept provides a method of removing and collecting particles from a photomask including fabricating the photomask on a substrate, generating a first map indicating locations of particles on a surface of the photomask by inspecting the surface of the photomask using a probe tip, vertically moving the probe tip to a first vertical height that is lower than a height of the particle, horizontally moving the probe tip parallel to the surface of the photomask at the first vertical height, generating a second map indicating locations of particles on the surface of the photomask using the probe tip, vertically moving the probe tip to a second vertical height that is lower than the first vertical height, and horizontally moving the probe tip parallel to the surface of the photomask at the second vertical height.
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公开(公告)号：US11841330B2
公开(公告)日：2023-12-12
申请号：US15733958
申请日：2019-06-17
发明人： Scott Jordan
CPC分类号： G01N21/9501 , G01B7/14 , G01D5/24 , G01Q60/24
摘要： A sensor probe assembly includes a probe, and a sensor assembly coupled to the probe. The sensor assembly measures a physical or electrical characteristic of a surface that the probe is near to or in contact with. The sensor assembly is symmetrically disposed around a center axis of the probe.
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公开(公告)号：US20230273237A1
公开(公告)日：2023-08-31
申请号：US18012546
申请日：2020-07-31
发明人： Yuki ARAI
IPC分类号： G01Q60/24
CPC分类号： G01Q60/24
摘要： A surface analysis method according to an embodiment includes: acquiring a force curve corresponding to measurement of a sample surface by a scanning probe microscope; calculating a physical quantity of an organic material forming the sample surface based on the force curve, for each of an observation point group; and outputting analysis data indicating the physical quantity of each of the observation point group. The acquiring the force curve includes acquiring the force curve at each of a plurality of observation points on a Y-column extending along a X-direction (a direction along which the probe reciprocates with respect to a stage). The calculating the physical quantity includes: generating a force curve matrix indicating the force curve at each of the plurality of observation points; and calculating the physical quantity at each of the plurality of observation points using the force curve matrix.
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公开(公告)号：US11703523B2
公开(公告)日：2023-07-18
申请号：US17381195
申请日：2021-07-21
发明人： Wei-Shan Hu , Dong Gui , Jang-Jung Lee
摘要： A method of detecting a ferroelectric signal from a ferroelectric film and a piezoelectric force microscopy (PFM) apparatus are provided. The method includes following steps. An input waveform signal is applied to the ferroelectric film. An atomic force microscope probe scans over a surface of the ferroelectric film to measure a surface topography of the ferroelectric film. A deflection of the atomic force microscope probe is detected when the input waveform signal is applied to the ferroelectric film to generate a deflection signal. Spectrum data of the ferroelectric film based on the deflection signal is generated. The spectrum data of the ferroelectric film is analyzed to determine whether the spectrum data of the ferroelectric film is a ferroelectric signal or a non-ferroelectric signal.
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公开(公告)号：US11614464B2
公开(公告)日：2023-03-28
申请号：US17546532
申请日：2021-12-09
发明人： Zongmin Ma , Jun Liu , Jun Tang , Yunbo Shi , Xiaoming Zhang , Hao Guo , Huanfei Wen , Cheng Dong , Jiuyan Wei
摘要： A system for simultaneously and microscopically measuring vapor cell coating film energy transfer and relaxation characteristics at nanometer scales includes a space relaxation characteristic detection unit which includes a laser, an optical isolator, a spatial light filter, a reflector, a Glan-Taylor polarizer, a first quarter-wave plate, a spatial light modulator, a focusing lens, a second quarter-wave plate, a polarizing film, a PD detection unit, an I/V amplification unit, a data acquisition unit, a spectroscope and an optical chopper, an atomic force microscope detection unit for energy transfer micro-areas, a shielding cylinder, a coated alkali metal atomic vapor cell, a data processing unit and a magnetic field controlled coil. The energy transfer micro-area detection unit includes coated samples, a probe, an oscillator, a laser, a four-quadrant photoelectric detection unit, a band-pass filter unit, an automatic gain controller, an adder, a piezoelectric scanning cylinder, a sample table and a PI controller.
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公开(公告)号：US20220206039A1
公开(公告)日：2022-06-30
申请号：US17561920
申请日：2021-12-24
申请人： PARK SYSTEMS CORP.
发明人： JeongHun AN , YongSung CHO , Sang-il PARK
摘要： An apparatus and a method for identifying a sample position in an atomic force microscope according to an exemplary embodiment of the present disclosure are provided. The method for identifying a sample position in an atomic force microscope includes receiving a vision image including a subject sample through a vision unit; determining a subject sample region in the vision image using a prediction model which is configured to output the subject sample region by receiving the vision image as an input; and determining a position of the subject sample based on the subject sample region.
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公开(公告)号：US20220196700A1
公开(公告)日：2022-06-23
申请号：US17546532
申请日：2021-12-09
发明人： Zongmin MA , Jun LIU , Jun TANG , Yunbo SHI , Xiaoming ZHANG , Hao GUO , Huanfei WEN , Cheng DONG , Jiuyan WEI
摘要： A system for simultaneously and microscopically measuring vapor cell coating film energy transfer and relaxation characteristics at nanometer scales includes a space relaxation characteristic detection unit which includes a laser, an optical isolator, a spatial light filter, a reflector, a Glan-Taylor polarizer, a first quarter-wave plate, a spatial light modulator, a focusing lens, a second quarter-wave plate, a polarizing film, a PD detection unit, an I/V amplification unit, a data acquisition unit, a spectroscope and an optical chopper, an atomic force microscope detection unit for energy transfer micro-areas, a shielding cylinder, a coated alkali metal atomic vapor cell, a data processing unit and a magnetic field controlled coil. The energy transfer micro-area detection unit includes coated samples, a probe, an oscillator, a laser, a four-quadrant photoelectric detection unit, a band-pass filter unit, an automatic gain controller, an adder, a piezoelectric scanning cylinder, a sample table and a PI controller.
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公开(公告)号：US20220057199A1
公开(公告)日：2022-02-24
申请号：US17061550
申请日：2020-10-01
发明人： Shansi Tian , Bo Liu , Xiaofei Fu , Fang Zeng , Xu Dong , Yifei Gao , Zhenjie Luo
摘要： The present invention relates to a method and system for quantitatively evaluating surface roughness of an organic pore of kerogen in shale. The method includes: making a shale sample; applying a circle of silver-painted conductive tape on the edge of the shale sample to obtain a processed sample; conducting image scanning on the processed sample to obtain a scanned image; determining a kerogen area according to the scanned image; determining an organic pore area according to the kerogen area; carrying out gridding treatment on the organic pore area to obtain multiple grid cells; adopting double integral calculation on each of the grid cells to obtain the areas of the multiple grid cells; summing each of the areas to obtain the surface area of the organic pore; and evaluating surface roughness of the organic pore according to the surface area of the pore.
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公开(公告)号：US11236996B2
公开(公告)日：2022-02-01
申请号：US16927906
申请日：2020-07-13
发明人： Wei-Shan Hu , Dong Gui , Jang Jung Lee , Che-Liang Li , Duen-Huei Hou , Wen-Chung Liu
摘要： Embodiments disclosed herein relate generally to methods for measuring a characteristic of a substrate. In an embodiment, the method includes scanning over the substrate with a scanning probe microscope, the substrate having fins thereon, the scanning obtaining images showing respective fin top regions of the fins, the scanning probe microscope interacting with respective portions of sidewalls of the fins by a scanning probe oscillated during the scanning, selecting images obtained at a predetermined depth below the fin top regions to obtain a line edge profile of the fins, by a processor-based system, analyzing the line edge profile of the fins using power spectral density (PSD) method to obtain spatial frequency data of the line edge profile of the fins, and by the processor-based system, calculating line edge roughness of the fins based on the spatial frequency data.
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公开(公告)号：US11125773B2
公开(公告)日：2021-09-21
申请号：US16922158
申请日：2020-07-07
发明人： Saikat Guha , Haoyu Qi
摘要： A method includes sending a probe beam into a beam path that induces a lateral displacement to the probe beam. The probe beam includes a plurality of orthogonal spatial modes that are entangled with each other. The method also includes measuring a phase of each spatial mode from the plurality of orthogonal spatial modes in the probe beam at a detector disposed within a near field propagation regime of the probe beam. The method also includes estimating the lateral displacement of the probe beam based on a phase of each spatial mode from the plurality of spatial modes in the probe beam after the beam path.
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