SYSTEM OF AUTOMATIC ADJUSTMENT OF LASER REFLECTION PATH

    公开(公告)号:US20210333531A1

    公开(公告)日:2021-10-28

    申请号:US17236353

    申请日:2021-04-21

    IPC分类号: G02B21/02 G02B21/36

    摘要: A system of automatic adjustment of a laser reflection path, comprising a central processing device, a driving device, a four-quadrant photodetector, a driving arm, a micro cantilever, a sample, a sample placing table, a light reflector, a laser, a CCD equipped with an optical microscope, a vibration sensor, a signal processing circuit, a display device, a storage device, and a control device; a system of automatic adjustment of the laser reflection path is controlled by the control device, wherein a laser beam is emitted by the laser, an image collected by the CCD equipped with the optical microscope is processed by the central processing device to identify the micro cantilever, and then a driving arm is driven by a driving device to drive the micro cantilever to move to the center of a laser spot, during which vibration signals of the driving arm are also under monitoring.