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公开(公告)号：US11977097B2
公开(公告)日：2024-05-07
申请号：US17829922
申请日：2022-06-01
申请人： Carl Zeiss SMT GmbH
IPC分类号： G01Q70/16 , G01Q60/38 , G01Q70/08 , H01J37/305 , H01J37/317
CPC分类号： G01Q60/38 , G01Q70/08 , G01Q70/16 , H01J37/3053 , H01J37/317
摘要： The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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公开(公告)号：US11940461B2
公开(公告)日：2024-03-26
申请号：US18133054
申请日：2023-04-11
申请人： BRUKER NANO, INC.
摘要： An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.
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公开(公告)号：US11892471B2
公开(公告)日：2024-02-06
申请号：US17757328
申请日：2021-05-08
发明人： Lianqing Liu , Jialin Shi , Peng Yu
摘要： A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.
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公开(公告)号：US20230314470A1
公开(公告)日：2023-10-05
申请号：US18124026
申请日：2023-03-21
发明人： Jason Scott Slattery , Olover Heinz Claus , Michael Joseph Baxter , John Lawrence Maziarz , Nathan Saki Odonkor , William Owen Jolley
CPC分类号： G01Q60/38 , B24B3/48 , B24B49/045 , B26B21/4068 , B26B21/4093
摘要： A method of optimizing a manufacturing process or a blade array of a razor cartridge using spatial information for a tip portion of a razor blade comprises the steps of: measuring, using an atomic force microscope including a probe having a high aspect ratio of a length to a half side angle and a probe tip with a radius less than a radius of an ultimate tip of the tip portion of the razor blade, the spatial information by traversing the probe across the tip portion of the razor blade; analyzing, by one or more processors, the spatial information as measured by the atomic force microscope, to determine one or more blade characteristics; and using the blade characteristics to adjust the manufacturing process to improve a design of the razor blade or to adjust a design characteristic of the blade array to improve a design of the razor cartridge.
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公开(公告)号：US11774381B2
公开(公告)日：2023-10-03
申请号：US16325995
申请日：2017-08-30
IPC分类号： G01N23/2251 , G01Q60/38
CPC分类号： G01N23/2251 , G01Q60/38 , G01N2223/07 , G01N2223/507
摘要： A method for measuring damage (D) of a substrate (1) caused by an electron beam (2). The method comprises using an atomic force microscope (AFM) to provide a measurement (S2) of mechanical and/or chemical material properties (P2) of the substrate (1) at an exposure area (1a) of the electron beam (2). The method further comprises calculating a damage parameter (Sd) indicative for the damage (D) based on the measurement (S2) of the material properties (P2) at the exposure area (1a).
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公开(公告)号：US20230243867A1
公开(公告)日：2023-08-03
申请号：US18133054
申请日：2023-04-11
申请人： BRUKER NANO, INC.
摘要： An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.
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公开(公告)号：US20230204625A1
公开(公告)日：2023-06-29
申请号：US17998815
申请日：2021-05-17
申请人： NEXT-TIP, S.L.
摘要： The present invention refers to a method for modifying a scanning probe microscope (SPM) tip, a modified SPM tip obtainable by the method, a modified SPM tip, to the use of the modified SPM tip, to a scanning probe comprising the modified SPM tip and to the use of the scanning probe.
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公开(公告)号：US11668730B2
公开(公告)日：2023-06-06
申请号：US17223849
申请日：2021-04-06
申请人： Bruker Nano, Inc.
摘要： An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
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公开(公告)号：US20190170789A1
公开(公告)日：2019-06-06
申请号：US16205629
申请日：2018-11-30
申请人： Bruker Nano GmbH
发明人： Detlef Knebel , Torsten Jähnke , Jonas Hiller
摘要： The invention relates to a measuring device for a scanning probe microscope including a measuring probe a first probe holding device on which the measuring probe is arranged, a detection device including a measurement light source which is adapted to provide light beams directed toward the measuring probe, a sensor device which is adapted, during the operation to receive measurement light beams reflected from the measuring probe. A first measuring arrangement in which the first probe holding device with the measuring probe is arranged in a first position spaced from the detection device, and a second measuring arrangement is formed in which a lengthening device is changeably arranged between the detection device and the measuring probe which lengthens the respective optical beam path for the light beams and the measurement light beams in such a manner that the first probe holding device or a second probe holding device which is different from the first probe holding device is arranged with the measuring probe at a second position spacing from the detection device which is greater than the first position spacing.
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公开(公告)号：US20180095073A1
公开(公告)日：2018-04-05
申请号：US15594697
申请日：2017-05-15
发明人： James Hickman
IPC分类号： G01N33/50 , G01N33/483 , G01Q60/38
CPC分类号： G01N33/5061 , G01N33/4833 , G01N2203/0051 , G01Q60/38 , H01L41/1136
摘要： The invention discloses a bio-MEMS transducer comprising a cultured myotube and a piezoelectric microcantilever having the myotube attached thereto along a lengthwise extent of said microcantilever. The transducer may include an input/output processor operably connected with said piezoelectric microcantilever to process electrical signals received therefrom and to send electrical signals thereto. The invention may operate as a biosensor wherein the attached myotube contracts on contact with a sensed agent, the myotube contraction deflecting the microcantilever to generate a piezoelectric signal therefrom. The invention may also be used as a biosensor for quantitating physiologic response to an agent by measuring deflection of the cantilever caused by myotube contraction elicited by contact with the agent; and correlating the measurement to effectiveness of the sensed agent in causing a myotube physiologic response. The bio-transducer is a bioactuator when an applied electrical signal causes the piezoelectric microcantilever to deflect, thereby actuating the attached myotube.
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