公开(公告)号：US20240280606A1

公开(公告)日：2024-08-22

申请号：US18567158

申请日：2022-02-03

Applicant: Hitachi, Ltd.

Inventor： Masanari KOGUCHI

IPC: G01Q30/02 ,  G01Q70/14

CPC classification number: G01Q30/02 ,  G01Q70/14

Abstract: Between a nitrogen-vacancy center and a support portion, a cut-off portion is provided that cuts off the nitrogen-vacancy center from the support portion.

公开(公告)号：US20240044938A1

公开(公告)日：2024-02-08

申请号：US18485478

申请日：2023-10-12

Applicant: President and Fellows of Harvard College

Inventor： Michael S. GRINOLDS ,  Sungkun HONG ,  Patrick MALETINSKY ,  Amir YACOBY

IPC: G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/12 ,  G01R33/60 ,  G01R33/022 ,  G01N21/64 ,  G01Q60/38

CPC classification number: G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/1284 ,  G01R33/60 ,  G01R33/022 ,  G01N21/645 ,  G01Q60/38 ,  G01Q30/025

Abstract: A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US11815528B2

公开(公告)日：2023-11-14

申请号：US17675156

申请日：2022-02-18

Applicant: President and Fellows of Harvard College

Inventor： Michael S. Grinolds ,  Sungkun Hong ,  Patrick Maletinsky ,  Amir Yacoby

IPC: G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/12 ,  G01R33/60 ,  G01R33/022 ,  G01N21/64 ,  G01Q60/38 ,  G01Q30/02 ,  G01Q60/08 ,  G01R33/32

CPC classification number: G01Q70/14 ,  G01N21/645 ,  G01N24/10 ,  G01Q60/38 ,  G01Q60/54 ,  G01R33/022 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/60 ,  G01N2201/10 ,  G01Q30/025 ,  G01Q60/08 ,  G01R33/323

Abstract: A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US11762046B2

公开(公告)日：2023-09-19

申请号：US17001486

申请日：2020-08-24

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Baohua Niu ,  Ji-Feng Ying

IPC: G01R33/26 ,  G01R33/12 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01Q30/02 ,  G01R33/32 ,  G01R33/032 ,  G01Q60/38

CPC classification number: G01R33/26 ,  G01Q30/025 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01R33/032 ,  G01R33/12 ,  G01R33/323 ,  G01Q60/38

Abstract: An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.

公开(公告)号：US20180149673A1

公开(公告)日：2018-05-31

申请号：US15575348

申请日：2016-05-12

Applicant: NANYANG TECHNOLOGICAL UNIVERSITY

Inventor： Fengwei HUO ,  Jin WU

IPC: G01Q10/06 ,  G01Q20/02 ,  G01Q60/22 ,  G01Q70/06

CPC classification number: G01Q10/065 ,  G01Q20/02 ,  G01Q60/22 ,  G01Q70/06 ,  G01Q70/14 ,  G02B21/002

Abstract: An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

公开(公告)号：US09966253B2

公开(公告)日：2018-05-08

申请号：US15054005

申请日：2016-02-25

Applicant: International Business Machines Corporation

Inventor： Kangguo Cheng ,  Ramachandra Divakaruni ,  Juntao Li ,  Shogo Mochizuki

IPC: H01L29/06 ,  H01L21/02 ,  H01J9/02 ,  G01Q70/14 ,  G01Q70/16

CPC classification number: H01L21/02236 ,  G01Q70/14 ,  G01Q70/16 ,  H01J1/3044 ,  H01J9/025

Abstract: A nanotip apparatus which includes nanotips arranged in a pattern on a semiconductor base. Each of the nanotips have a pointed tip portion and a base portion in contact with the semiconductor base. Further, each of the nanotips include a gradient of silicon germanium (SiGe) with the highest concentration of germanium being at the pointed tip portion and the lowest concentration of germanium being at the base in contact with the semiconductor base. Also disclosed is a method in which the nanotips may be formed.

公开(公告)号：US09612258B2

公开(公告)日：2017-04-04

申请号：US14527526

申请日：2014-10-29

Applicant: IMEC ,  Katholieke Universiteit Leuven

Inventor： Thomas Hantschel ,  Menelaos Tsigkourakos ,  Wilfried Vandervorst

IPC: G01Q70/16 ,  G01Q70/14 ,  B82Y35/00

CPC classification number: G01Q70/14 ,  B82Y35/00 ,  G01Q70/16

Abstract: The disclosed technology relates generally to probe configurations, and more particularly to probe configurations and methods of making probe configurations that have a diamond body and a diamond layer covering at least an apex region of the diamond body. In one aspect, a method of fabricating a probe configuration includes forming a probe tip. Forming the probe tip includes providing a substrate and forming a recessed mold into the substrate on a first side of the substrate, wherein the recessed mold is shaped to form a probe body having an apex region. Forming the probe tip additionally includes forming a first diamond layer on the substrate on the first side, wherein forming the first diamond layer includes at least partially filling the recessed mold with the first diamond layer such that a probe body having an apex region is formed in the recessed mold. Forming the probe tip additionally includes patterning to remove at least partially the first diamond layer which surrounds the probe body, removing a substrate material surrounding at least the apex region of the probe body, and forming a second diamond layer covering at least the apex region of the probe body. The method additionally includes attaching the probe tip to a first end of a cantilever and attaching the second end of the cantilever to a holder.

公开(公告)号：US09465048B1

公开(公告)日：2016-10-11

申请号：US14667676

申请日：2015-03-24

Applicant: INOTERA MEMORIES, INC.

Inventor： Wei-Chih Wang

IPC: G01Q70/16 ,  G01Q70/14 ,  B22C9/22 ,  B22D19/00 ,  B22D21/02 ,  B22D25/02 ,  B23K31/02 ,  G01Q70/08

CPC classification number: G01Q70/16 ,  B22C9/22 ,  B22D19/00 ,  B22D21/022 ,  B22D25/02 ,  B23K26/21 ,  B23K31/02 ,  G01Q60/48 ,  G01Q70/08 ,  G01Q70/14

Abstract: The present invention provides a novel method of manufacturing the probe unit and a tip assemble and disassemble procedure for test tools, which includes a body with a joint portion and a base portion and a probe tip extending from one side of the base portion opposite to the joint portion, where the probe tip and the base portion are integrally made of same material different from the material of the joint portion.

Abstract translation: 本发明提供了一种制造探针单元的新方法以及用于测试工具的尖端组装和拆卸过程，该测试工具包括具有接合部分和基部的主体以及从基部的相对侧的一侧延伸的探针尖端 接头部分，其中探针尖端和基部部分由与接合部分的材料不同的相同材料整体制成。

公开(公告)号：US20160282385A1

公开(公告)日：2016-09-29

申请号：US14667676

申请日：2015-03-24

Applicant: INOTERA MEMORIES, INC.

Inventor： Wei-Chih Wang

IPC: G01Q70/14 ,  B22D19/00 ,  B23K26/21 ,  B22D25/02 ,  B23K31/02 ,  G01Q70/08 ,  B22C9/22 ,  B22D21/02

CPC classification number: G01Q70/16 ,  B22C9/22 ,  B22D19/00 ,  B22D21/022 ,  B22D25/02 ,  B23K26/21 ,  B23K31/02 ,  G01Q60/48 ,  G01Q70/08 ,  G01Q70/14

Abstract: The present invention provides a novel method of manufacturing the probe unit and a tip assemble and disassemble procedure for test tools, which includes a body with a joint portion and a base portion and a probe tip extending from one side of the base portion opposite to the joint portion, where the probe tip and the base portion are integrally made of same material different from the material of the joint portion.

Abstract translation: 本发明提供了一种制造探针单元的新方法以及用于测试工具的尖端组装和拆卸过程，该测试工具包括具有接合部分和基部的主体以及从基部的相对侧的一侧延伸的探针尖端 接头部分，其中探针尖端和基部部分由与接合部分的材料不同的相同材料整体制成。

公开(公告)号：US20140196179A1

公开(公告)日：2014-07-10

申请号：US14150389

申请日：2014-01-08

Applicant: The Trustees of Columbia University in the City of New York

Inventor： Dirk R. ENGLUND

IPC: G01Q70/14 ,  G01Q10/00

CPC classification number: G01Q70/14 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q70/10

Abstract: Techniques for measuring the topography of a surface using a device including a semiconductor slab having a distal end and a base region, and an air slot therein. A sensor tip can be coupled to the slab below the air-slot. A photonic crystal including a lattice pattern with a cavity region defined by a local perturbation in the lattice pattern can be integrated into the semiconductor slab above and below the air slot, thereby providing a split-cavity photonic crystal resonator integrated into the semiconductor slab.

Abstract translation: 使用包括具有远端和底部区域的半导体板的装置以及其中的空气槽来测量表面的形貌的技术。 传感器尖端可以连接到空气槽下方的板坯。 包括具有由格子图案中的局部扰动限定的空腔区域的格子图案的光子晶体可以集成到空气狭缝上方和下方的半导体板中，从而提供集成到半导体板中的分裂腔光子晶体谐振器。