Invention Application
- Patent Title: APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE
-
Application No.: US15575348Application Date: 2016-05-12
-
Publication No.: US20180149673A1Publication Date: 2018-05-31
- Inventor: Fengwei HUO , Jin WU
- Applicant: NANYANG TECHNOLOGICAL UNIVERSITY
- Priority: SG10201503936T 20150519
- International Application: PCT/SG2016/050220 WO 20160512
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q20/02 ; G01Q60/22 ; G01Q70/06

Abstract:
An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.
Public/Granted literature
- US10168353B2 Apparatus and methods for investigating a sample surface Public/Granted day:2019-01-01
Information query