公开(公告)号：US20240230709A1

公开(公告)日：2024-07-11

申请号：US18616453

申请日：2024-03-26

申请人： Carl Zeiss SMT GmbH

发明人： Christof Baur ,  Florian Demski

IPC分类号： G01Q30/04 ,  G01Q10/06

CPC分类号： G01Q30/04 ,  G01Q10/065

摘要： The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.

公开(公告)号：US11733265B2

公开(公告)日：2023-08-22

申请号：US17767861

申请日：2020-10-23

申请人： INFINITESIMA LIMITED

发明人： Andrew Humphris

IPC分类号： G01Q20/02 ,  G01Q10/00 ,  G01Q30/06 ,  G01Q40/00 ,  G01Q10/04 ,  G01Q10/06

CPC分类号： G01Q20/02 ,  G01Q10/045 ,  G01Q10/065 ,  G01Q30/06 ,  G01Q40/00

摘要： A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.

公开(公告)号：US11650222B2

公开(公告)日：2023-05-16

申请号：US17490925

申请日：2021-09-30

申请人： Board of Regents, The University of Texas System

发明人： Seyed Omid Reza Moheimani ,  Hamed Alemansour

IPC分类号： G01Q10/06 ,  H01J37/31 ,  G01Q60/10 ,  H01J37/28 ,  G01Q80/00 ,  H01J37/00 ,  H01J37/317 ,  H01J37/26

CPC分类号： G01Q10/065 ,  G01Q60/10 ,  G01Q80/00 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/2818

摘要： In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.

公开(公告)号：US11644478B2

公开(公告)日：2023-05-09

申请号：US17591402

申请日：2022-02-02

申请人： Oxford Instruments Asylum Research, Inc.

发明人： Jason Bemis ,  David Aue ,  Aleksander Labuda

IPC分类号： G01Q20/02 ,  G01Q10/06 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q60/42

CPC分类号： G01Q20/02 ,  G01Q10/065 ,  G01Q30/025 ,  G01Q30/04 ,  G01Q60/42

摘要： An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.

公开(公告)号：US20180272523A1

公开(公告)日：2018-09-27

申请号：US15765576

申请日：2015-10-13

申请人： Sensapex Oy

发明人： Mikko VÄHÄSÖYRINKI ,  Markku VIMPARI

IPC分类号： B25J7/00 ,  B81B3/00 ,  G01N33/487 ,  G02B21/32

CPC分类号： B25J7/00 ,  B25J13/02 ,  B81B3/00 ,  G01N33/48707 ,  G01N33/48728 ,  G01Q10/065 ,  G01Q30/02 ,  G01Q60/44 ,  G01Q70/06 ,  G02B21/32

摘要： The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).

公开(公告)号：US20180149673A1

公开(公告)日：2018-05-31

申请号：US15575348

申请日：2016-05-12

申请人： NANYANG TECHNOLOGICAL UNIVERSITY

发明人： Fengwei HUO ,  Jin WU

IPC分类号： G01Q10/06 ,  G01Q20/02 ,  G01Q60/22 ,  G01Q70/06

CPC分类号： G01Q10/065 ,  G01Q20/02 ,  G01Q60/22 ,  G01Q70/06 ,  G01Q70/14 ,  G02B21/002

摘要： An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

公开(公告)号：US20180106830A1

公开(公告)日：2018-04-19

申请号：US15573137

申请日：2016-05-11

申请人： ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)

发明人： Georg Ernest Fantner ,  Jonathan David Adams ,  Adrian Pascal Nievergelt

IPC分类号： G01Q20/02 ,  G01Q10/06 ,  G01Q60/32 ,  G01Q10/04

CPC分类号： G01Q20/02 ,  G01Q10/045 ,  G01Q10/065 ,  G01Q60/32

摘要： a scanning probe microscope for high-speed imaging and/or nanomechanical mapping. The microscope comprises a scanning probe comprising a cantilever with a tip at the distal end; and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation.

公开(公告)号：US09891246B2

公开(公告)日：2018-02-13

申请号：US15229515

申请日：2016-08-05

申请人： Fardad Michael Serry

发明人： Fardad Michael Serry

IPC分类号： G01Q10/00 ,  G01Q60/32 ,  G01Q10/06 ,  G01Q60/24

CPC分类号： G01Q60/32 ,  G01Q10/065 ,  G01Q60/24

摘要： Harmonic feedback atomic force microscopy (HF-AFM) includes regulating feedback in oscillating probe atomic force microscopy (AFM) based upon an extracted frequency component of a probe response signal. Feedback in conventional oscillating probe AFM uses the probe response signal as a whole (or at least a driven frequency component of the probe response signal). The extracted frequency of the extracted frequency component of HF-AFM generally is different from any substantially driven frequency that generates the probe oscillation and may be a harmonic of a driven frequency. The regulating may include responding to the strength or weakness of the extracted frequency component such that weakening (or strengthening) of the extracted frequency component contributes positively to a decrease (or an increase) in the average tip-sample distance and contributes negatively to an increase (or a decrease) in the average tip-sample distance.

公开(公告)号：US09885736B2

公开(公告)日：2018-02-06

申请号：US15174939

申请日：2016-06-06

申请人： Mark J. Hagmann

发明人： Mark J. Hagmann

IPC分类号： G01Q60/10 ,  G01Q10/00 ,  G01Q10/06

CPC分类号： G01Q60/10 ,  G01Q10/00 ,  G01Q10/065

摘要： A control methodology for scanning tunneling microscopy is disclosed. Instead of utilizing Integral-based control systems, the methodology utilizes a dual-control algorithm to direct relative advancement of a STM tip towards a sample. A piezo actuator and stepper motor advances an STM tip towards a sample at a given distance until measuring a current greater than or equal to a desired setpoint current. Readings of the contemporaneous step are analyzed to direct the system to change continue or change direction and also determine the size of each step. In simulations where Proportion and/or Integral control methodology was added to the algorithm the stability of the feedback control is decreased. The present methodology accounts for temperature variances in the environment and also appears to clean and protect the tip electrode, prolonging its useful life.

公开(公告)号：US09874582B2

公开(公告)日：2018-01-23

申请号：US15122047

申请日：2015-02-27

申请人： INFINITESIMA LIMITED

发明人： Andrew Humphris

IPC分类号： G01Q10/04 ,  G01Q70/08 ,  G01Q10/06 ,  G01Q70/10

CPC分类号： G01Q10/045 ,  G01Q10/065 ,  G01Q70/10

摘要： A probe system including a probe with first and second arms and a probe tip carried by the first and second arms, the probe tip having a height and a tilt angle; an illumination system arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power; and an actuation controller arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe tip.