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    Automated atomic force microscope and the operation thereof
    4.
    发明授权
    Automated atomic force microscope and the operation thereof 有权
    自动原子力显微镜及其操作

    公开(公告)号：US09383388B2

    公开(公告)日：2016-07-05

    申请号：US14692270

    申请日：2015-04-21

    申请人： Oxford Instruments Asylum Research, Inc.

    发明人： Roger Proksch ,  Roger C. Callahan ,  Frank Stetter ,  Ted Limpoco ,  Sophia Hohlbach ,  Jason Bemis ,  Jason Cleveland

    IPC分类号： G01Q60/24 ,  G01Q70/08 ,  G01Q40/00 ,  G01Q60/32 ,  G01Q10/06

    CPC分类号： G01Q60/24 ,  G01Q10/065 ,  G01Q40/00 ,  G01Q60/32 ,  G01Q70/08

    摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.

    摘要翻译： 公开了快速校准和自动操作扫描探针显微镜的改进。 SPM的中心部件是力传感器，通常是消耗性悬臂元件。 通过自动校准传感器特性以及其他仪器参数，可以快速，轻松地优化扫描参数，从而实现高通量，可重复和准确的测量。 与动态优化方案相比，这可以在表面接触之前完成，从测量过程开始就避免尖端或样品损坏。

    CALIBRATION OF A CONTACT PROBE
    5.
    发明申请
    CALIBRATION OF A CONTACT PROBE 有权
    联系方式的校准

    公开(公告)号：US20160138911A1

    公开(公告)日：2016-05-19

    申请号：US14900036

    申请日：2014-06-26

    申请人： RENISHAW PLC

    发明人： David S WALLACE ,  Jean-Louis Grzesiak

    IPC分类号： G01B21/04

    CPC分类号： G01B21/042 ,  B25J9/1692 ,  B82Y35/00 ,  G01D18/00 ,  G01Q40/00

    摘要： A method of calibrating a contact probe having a contact element includes measuring with the contact probe a first geometric property of a calibrated artefact and a second geometric property of the or a further calibrated artefact. The first and second geometric properties are such that a deviation between a measured value and the expected value, resulting from a difference between an effective diameter of the contact element and an assumed diameter used for determining the measured value, has the opposite sign for each of the first and second geometric properties. The method further includes identifying a difference in the effective diameter of the contact element from the assumed diameter including comparing deviations of the measured value to the expected value for each of the first and second geometric properties to determine whether there is a difference in the deviations.

    摘要翻译： 校准具有接触元件的接触探针的方法包括用接触探针测量校准的人工制品的第一几何特性和该另一校准人造物的第二几何性质。 第一和第二几何特性使得由接触元件的有效直径与用于确定测量值的假定直径之间的差异产生的测量值与预期值之间的偏差与 第一和第二几何属性。 该方法还包括从假设的直径识别接触元件的有效直径的差异，包括将测量值与第一和第二几何特性中的每一个的预期值的偏差进行比较，以确定偏差是否存在差异。

    CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES
    6.
    发明申请
    CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES 审中-公开
    具有预先确定的特征的校准标准

    公开(公告)号：US20160069929A1

    公开(公告)日：2016-03-10

    申请号：US14783403

    申请日：2013-04-17

    申请人： SEAGATE TECHNOLOGY LLC

    发明人： Gennady Gauzner ,  Zhaoning Yu ,  Nobuo Kurataka ,  David S. Kuo ,  Kim Y. Lee ,  Yautzong Hsu ,  Hong Ying Wang

    IPC分类号： G01Q40/02 ,  G01N21/01 ,  H01J37/26

    CPC分类号： G01Q40/02 ,  G01N21/01 ,  G01N2201/13 ,  G01Q40/00 ,  G03F7/0002 ,  H01J37/261 ,  H01J37/263 ,  H01J2237/2602 ,  H01J2237/2826

    摘要： Provided herein in an apparatus, including a substrate; a functional layer, wherein the functional layer has a composition characteristic of a workpiece of an analytical apparatus; and pre-determined features configured to calibrate the analytical apparatus. Also provided herein is an apparatus, including a functional layer overlying a substrate; and pre-determined features for calibration of an analytical apparatus configured to measure the surface of a workpiece, wherein the functional layer has a composition similar to the workpiece. Also provided herein is a method, including providing a lithographic calibration standard having a functional layer to an analytical apparatus, wherein the functional layer has a composition characteristic of a workpiece of the analytical apparatus; providing calibration standard specifications to a computer interfaced with the analytical apparatus; and calibrating the analytical apparatus in accordance with calibration standard readings and the calibration standard specifications.

    摘要翻译： 本文提供的装置包括基板; 功能层，其中所述功能层具有分析装置的工件的成分特征; 以及配置成校准分析装置的预定特征。 本文还提供了一种装置，包括覆盖衬底的功能层; 以及用于校准配置成测量工件表面的分析装置的预定特征，其中所述功能层具有类似于所述工件的组成。 本文还提供了一种方法，包括向分析装置提供具有功能层的光刻校准标准，其中功能层具有分析装置的工件的成分特征; 向与分析仪器连接的计算机提供校准标准规格; 并根据校准标准读数和校准标准规格校准分析仪器。

    Non-linearity determination of positioning scanner of measurement tool
    8.
    发明授权
    Non-linearity determination of positioning scanner of measurement tool 有权
    测量工具定位扫描仪的非线性确定

    公开(公告)号：US08990961B2

    公开(公告)日：2015-03-24

    申请号：US13217579

    申请日：2011-08-25

    申请人： George W. Banke, Jr. ,  James M. Robert ,  Carlos Strocchia-Rivera

    发明人： George W. Banke, Jr. ,  James M. Robert ,  Carlos Strocchia-Rivera

    IPC分类号： G01Q30/04 ,  G01Q30/06 ,  G01Q40/00 ,  G01B21/20 ,  B82Y35/00 ,  G01B21/04

    CPC分类号： G01B21/042 ,  B82Y35/00 ,  G01B21/045 ,  G01Q30/04 ,  G01Q30/06 ,  G01Q40/00

    摘要： Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.

    摘要翻译： 公开了测量工具的定位扫描器的非线性的确定。 在一个实施例中，一种方法可以包括提供耦合到定位扫描器的测量工具的探针; 以相对于探针的第一角度扫描具有表面的第一样品的表面以获得第一轮廓; 以相对于不同于第一角度的探头的第二角度的表面扫描第一样品的表面以获得第二轮廓; 重复扫描以获得多个第一轮廓和多个第二轮廓; 并且使用不同的扫描角度来确定定位扫描器的非线性，以抵消对应于由于样品表面引起的不完整性的测量。 非线性可用于校准定位扫描仪。

    Scanning probe microscope
    9.
    发明授权
    Scanning probe microscope 有权
    扫描探针显微镜

    公开(公告)号：US08887311B1

    公开(公告)日：2014-11-11

    申请号：US14075734

    申请日：2013-11-08

    申请人： Shimadzu Corporation

    发明人： Kaori Kirishima

    IPC分类号： G01Q10/00 ,  G01Q20/00 ,  G01Q30/00 ,  G01Q30/04 ,  G01Q70/00 ,  G01Q20/02 ,  G01Q90/00

    CPC分类号： G01Q20/02 ,  G01Q30/04 ,  G01Q40/00

    摘要： A scanning probe microscope that facilitates the optical axis adjustment operation at the time of initial cantilever installation and at the time of cantilever replacement. During the optical axis adjustment operation, markers are displayed on the video camera image at the cantilever and laser light center of luminance locations, and the markers, which follow the movement of the laser light location, are visually monitored and superposed. Furthermore, optical axis adjustment for a new cantilever is performed using marker location coordinate data stored after the initial optical axis adjustment. Moreover, by setting the target location coordinates, the direction of movement of laser light and the distance to the target location can be ascertained numerically.

    摘要翻译： 扫描探针显微镜，便于在初始悬臂安装时和悬臂更换时的光轴调整操作。 在光轴调整操作期间，标记在亮度位置的悬臂和激光中心的视频摄像机图像上显示，并且跟随激光位置移动的标记被目视监视和叠加。 此外，使用在初始光轴调整之后存储的标记位置坐标数据来执行新的悬臂的光轴调整。 此外，通过设置目标位置坐标，可以数值地确定激光的移动方向和到目标位置的距离。