发明授权
- 专利标题: Scanning probe microscope
- 专利标题(中): 扫描探针显微镜
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申请号: US14075734申请日: 2013-11-08
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公开(公告)号: US08887311B1公开(公告)日: 2014-11-11
- 发明人: Kaori Kirishima
- 申请人: Shimadzu Corporation
- 申请人地址: JP Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Sughrue Mion, PLLC
- 主分类号: G01Q10/00
- IPC分类号: G01Q10/00 ; G01Q20/00 ; G01Q30/00 ; G01Q30/04 ; G01Q70/00 ; G01Q20/02 ; G01Q90/00
摘要:
A scanning probe microscope that facilitates the optical axis adjustment operation at the time of initial cantilever installation and at the time of cantilever replacement. During the optical axis adjustment operation, markers are displayed on the video camera image at the cantilever and laser light center of luminance locations, and the markers, which follow the movement of the laser light location, are visually monitored and superposed. Furthermore, optical axis adjustment for a new cantilever is performed using marker location coordinate data stored after the initial optical axis adjustment. Moreover, by setting the target location coordinates, the direction of movement of laser light and the distance to the target location can be ascertained numerically.
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