公开(公告)号：US20190154636A1

公开(公告)日：2019-05-23

申请号：US16093522

申请日：2017-04-13

申请人： Nederlandse Organisatie voor toegepast-natuurwetep -pelijk Onderzoe TNO

发明人： Hamed Sadeghian Marnani ,  Rutger Meijer Timmerman Thijssen ,  Maarten Hubetus van Es

IPC分类号： G01N29/06 ,  G01Q30/04 ,  G01Q40/00 ,  G01N29/24 ,  G01Q60/32

CPC分类号： G01N29/0681 ,  G01N29/22 ,  G01N29/2418 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/32

摘要： Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product. This document relates to a method of tuning a scanning probe microscopy system. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to a sample; b) at a first position of the probe tip, sweeping the first frequency across a first frequency range, and obtaining a first signal; c) at a second position of the probe tip, sweeping the first frequency across at least said first frequency range, and obtaining a second signal; d) analyzing the first and second signals to obtain a difference characteristic dependent on the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.