公开(公告)号：US20220303016A1

公开(公告)日：2022-09-22

申请号：US17655522

申请日：2022-03-18

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: H04B10/50 ,  H01S3/16 ,  H01S3/11 ,  H01Q19/02

Abstract: A nanoscale circuit has an optical antenna receiving the radiation from a mode-locked laser and it responds by transmitting selected microwave or terahertz frequencies with a separate orthogonal antenna. Only MIM diodes, low-pass filters, and a load resistor are used to generate, separate, and transmit at the harmonics of the laser pulse-repetition rate.

公开(公告)号：US10401383B2

公开(公告)日：2019-09-03

申请号：US16116479

申请日：2018-08-29

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q30/20 ,  G01Q60/14 ,  G01Q60/12

Abstract: In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

公开(公告)号：US20170307654A1

公开(公告)日：2017-10-26

申请号：US15448151

申请日：2017-03-02

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q10/04 ,  G01Q60/10

CPC classification number: G01Q10/04 ,  G01Q60/10 ,  G01Q60/12

Abstract: A semiconductor carrier profiling method utilizes a scanning tunneling microscope and shielded probe with an attached spectrum analyzer to measure power loss of a microwave frequency comb generated in a tunneling junction. From this power loss and by utilizing an equivalent circuit or other model, spreading resistance may be determined and carrier density from the spreading resistance. The methodology is non-destructive of the sample and allows scanning across the surface of the sample. By not being destructive, additional analysis methods, like deconvolution, are available for use.

公开(公告)号：US09442078B2

公开(公告)日：2016-09-13

申请号：US14635828

申请日：2015-03-02

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01N22/00 ,  G01Q60/14 ,  G01Q60/10

CPC classification number: G01N22/00 ,  G01Q60/14

Abstract: A microwave frequency comb (MFC) is produced when a mode-locked ultrafast laser is focused on the tunneling junction of a scanning tunneling microscope (STM). The MFC consists of hundreds of measureable harmonics at integer multiples of the pulse repetition frequency of the laser, which are superimposed on the DC tunneling current. In Scanning Frequency Comb Microscopy (SFCM) the tip and/or sample electrode of the STM is moved vertically and laterally so that the power in the MFC may be measured at one or more locations on the surface of the sample and, from the power, carrier density, and other characteristics, of the sample may be calculated. SFCM is non-destructive of the sample. While many systems are possible to practice SFCM, a preferred apparatus is disclosed.

Abstract translation: 当模式锁定超快激光聚焦在扫描隧道显微镜（STM）的隧道结上时，产生微波频率梳（MFC）。 MFC由激光脉冲重复频率的整数倍的数百个可测谐波组成，它们叠加在直流隧道电流上。 在扫描频率梳显微镜（SFCM）中，STM的尖端和/或样品电极垂直和横向移动，使得可以在样品表面上的一个或多个位置处测量MFC中的功率，并且从功率， 可以计算样品的载流子密度和其他特性。 SFCM对样品非破坏性。 虽然许多系统可以实施SFCM，但是公开了一种优选的装置。

公开(公告)号：USD695801S1

公开(公告)日：2013-12-17

申请号：US29410757

申请日：2012-01-11

Applicant: Mark J. Hagmann ,  Boyd A. Rhoades

Designer： Mark J. Hagmann ,  Boyd A. Rhoades

公开(公告)号：US07141781B2

公开(公告)日：2006-11-28

申请号：US10459828

申请日：2003-06-11

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: H01J3/14

CPC classification number: H01J1/304 ,  H01J1/34 ,  H01J2201/317

Abstract: An improved device, method, and system efficiently couple high-frequency energy from radiation-assisted field emission. A radiation source radiates an emitting surface with an electromagnetic field. The electromagnetic field reduces the potential barrier at the emitting surface, allowing electrons to tunnel from the surface. The tunneling electrons produce a current. The electron tunneling current oscillates in response to the oscillations of the electromagnetic field radiation. Two or more electromagnetic fields of different frequencies radiate the emitting surface, causing photomixing. The electron tunneling current oscillates in response to the difference of the frequencies of the electromagnetic fields.

公开(公告)号：US06864636B1

公开(公告)日：2005-03-08

申请号：US10625380

申请日：2003-07-23

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: H01J7/24 ,  H01J23/06 ,  H01S3/097

CPC classification number: H01J23/06

Abstract: A source electrode is biased to lower the potential barrier of surface electrons. A laser radiates the source electrode, producing a tunneling electron current. The tunneling electron current oscillates in response to frequency of the laser. The impedance match circuit couples the current from a high-impedance source electrode of a laser-assisted field emission to a lower-impedance connector, creating a high-frequency microwave signal source. Two or more lasers may be photomixed to further tune the frequency of the microwave signal.

Abstract translation: 源极被偏置以降低表面电子的势垒。 激光辐射源电极，产生隧道电子电流。 隧道电子电流响应于激光器的频率而振荡。 阻抗匹配电路将来自激光辅助场致发射的高阻源极的电流耦合到低阻抗连接器，产生高频微波信号源。 两个或多个激光器可以被光混合以进一步调谐微波信号的频率。

公开(公告)号：US10006933B2

公开(公告)日：2018-06-26

申请号：US15369585

申请日：2016-12-05

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/10 ,  G01Q60/12

CPC classification number: G01Q60/12

Abstract: A mode-locked laser injects pulses of minority carriers into a semiconductor sample. A microwave frequency comb is then generated by the currents formed in the movement of majority carriers native to the semiconductor and the injected minority carriers. These carriers move to cause dielectric relaxation in the sample, which can be used to determine carrier density within the sample. Measurements require close proximity of transmitter and receiver contacts with the sample and may profile a semi-conductor with a resolution of approximately 0.2 nm.

公开(公告)号：US20180172727A1

公开(公告)日：2018-06-21

申请号：US15844045

申请日：2017-12-15

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q10/04

CPC classification number: G01Q60/16 ,  G01Q10/04 ,  G01Q30/04

Abstract: Numerous carrier profiling techniques may be combined for simultaneous operation of those techniques on a single material sample. A single apparatus utilizing a Field-Programmable Gate Array (“FPGA”) may be utilized to simultaneously operate those techniques. Various hardware components necessary for the given techniques may be operationally connected to the FPGA while simulations may be performed and stored with the apparatus for real-time analysis of results.

公开(公告)号：US20160356807A1

公开(公告)日：2016-12-08

申请号：US15174939

申请日：2016-06-06

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q10/00 ,  G01Q60/10

CPC classification number: G01Q60/10 ,  G01Q10/00 ,  G01Q10/065

Abstract: A control methodology for scanning tunneling microscopy is disclosed. Instead of utilizing Integral-based control systems, the methodology utilizes a dual-control algorithm to direct relative advancement of a STM tip towards a sample. A piezo actuator and stepper motor advances an STM tip towards a sample at a given distance until measuring a current greater than or equal to a desired setpoint current. Readings of the contemporaneous step are analyzed to direct the system to change continue or change direction and also determine the size of each step. In simulations where Proportion and/or Integral control methodology was added to the algorithm the stability of the feedback control is decreased. The present methodology accounts for temperature variances in the environment and also appears to clean and protect the tip electrode, prolonging its useful life.

Abstract translation: 公开了扫描隧道显微镜的控制方法。 该方法不是利用基于积分的控制系统，而是利用双重控制算法将STM尖端的相对推进指向样品。 压电致动器和步进电机使STM尖端以给定距离向样品前进，直到测量大于或等于所需设定值电流的电流。 对同期步骤的阅读进行分析，以指导系统更改连续或改变方向，并确定每个步骤的大小。 在模拟中，将比例和/或积分控制方法添加到算法中，反馈控制的稳定性降低。 本方法考虑到环境中的温度变化，并且似乎清洁和保护尖端电极，延长其使用寿命。