公开(公告)号：US11693024B2

公开(公告)日：2023-07-04

申请号：US17493998

申请日：2021-10-05

Applicant: Board of Trustees of Michigan State University ,  Wisconsin Alumni Research Foundation

Inventor： Stuart Holden Tessmer ,  Eric William Goodwin ,  Oleksandr Levchenko

IPC: G01Q70/12 ,  G01Q60/22 ,  G01N33/58 ,  G01Q60/16 ,  G01N21/64

CPC classification number: G01Q60/22 ,  G01N33/588 ,  G01Q60/16 ,  G01N21/6458

Abstract: A quantum dot microscope apparatus is provided. A further aspect employs a tilted or tapered end or tip on a microscopic probe. Another aspect of the present apparatus employs a probe including a quantum dot with only one tunneling lead connected to a power source. A manufacturing aspect includes creating a tapered or asymmetrically shaped specimen-facing end of a probe where a quantum dot is located on the end. A further manufacturing aspect includes using focused ion-beam milling to create a tip or end of a quantum dot microscope probe.

公开(公告)号：US20220120784A1

公开(公告)日：2022-04-21

申请号：US17493998

申请日：2021-10-05

Applicant: Board of Trustees of Michigan State University ,  Wisconsin Alumni Research Foundation

Inventor： Stuart Holden TESSMER ,  Eric William GOODWIN ,  Oleksandr LEVCHENKO

IPC: G01Q60/22 ,  G01Q60/16 ,  G01N33/58

Abstract: A quantum dot microscope apparatus is provided. A further aspect employs a tilted or tapered end or tip on a microscopic probe. Another aspect of the present apparatus employs a probe including a quantum dot with only one tunneling lead connected to a power source. A manufacturing aspect includes creating a tapered or asymmetrically shaped specimen-facing end of a probe where a quantum dot is located on the end. A further manufacturing aspect includes using focused ion-beam milling to create a tip or end of a quantum dot microscope probe.

公开(公告)号：US10591509B2

公开(公告)日：2020-03-17

申请号：US16106134

申请日：2018-08-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yoichi Kawada ,  Hironori Takahashi ,  Jun Takeda ,  Ikufumi Katayama ,  Yusuke Arashida ,  Katsumasa Yoshioka

IPC: G01Q30/02 ,  G01Q60/30 ,  G01Q60/16

Abstract: A tunnel current control apparatus includes a terahertz wave generation element configured to generate and output a terahertz wave pulse, a CEP adjustment unit configured to adjust a CEP of the terahertz wave pulse, and an off-axis parabolic mirror serving as a focusing element configured to focus the terahertz wave pulse in a gap between a first conductive object and a second conductive object. The CEP adjustment unit can arbitrarily adjust the CEP of the terahertz wave pulse.

公开(公告)号：US10520527B2

公开(公告)日：2019-12-31

申请号：US16221998

申请日：2018-12-17

Applicant: The Regents of the University of California ,  The Regents of the University of Michigan

Inventor： Xiaoqing Pan ,  Thomas F. Blum ,  Mingjie Xu ,  Jake Jokisaari ,  Wilbur Bigelow

IPC: H01J37/285 ,  H01J37/244 ,  H01J37/20 ,  G01Q60/16

Abstract: The present disclosure relates to in situ transmission electron microscope (TEM) holders with improved stability and electrical sensitivity. The holders feature a front bearing seal and a rear bearing seal which allow the holders to achieve high sensitivity, high stability, large range of motion and high vacuum isolation. The bearings use a PEEK insulating disk as a pivot point for translation and tilting motion, and use O-rings to dampen vibrations, provide electrical and vacuum insulation, and to set a grabbing force between the bearing and the probe.

公开(公告)号：US10401383B2

公开(公告)日：2019-09-03

申请号：US16116479

申请日：2018-08-29

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q30/20 ,  G01Q60/14 ,  G01Q60/12

Abstract: In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

公开(公告)号：US20190120873A1

公开(公告)日：2019-04-25

申请号：US16095011

申请日：2017-04-24

Applicant: STC. UNM

Inventor： Steven R.J. BRUECK ,  Daniel FEEZELL ,  John RANDALL ,  Tito BUSANI ,  Joshua B. BALLARD ,  Mahmoud BEHZADIRAD ,  Ashwin Krishnan RISHINARAMANGALAM

IPC: G01Q60/16 ,  B82B3/00 ,  G01Q70/14 ,  G03F7/00 ,  G01Q70/06 ,  G01Q80/00

Abstract: Provided is a composite metal-wide-bandgap semiconductor tip for scanning tunneling microscopy and/or scanning, tunneling lithography, a method of forming, and a method for using the composite metal-wide-bandgap semiconductor tip.

公开(公告)号：US20190025339A1

公开(公告)日：2019-01-24

申请号：US16070909

申请日：2016-12-16

Applicant: FUDAN UNIVERSITY

Inventor： Shiwei WU ,  Zeyuan SUN ,  Shuai ZHANG ,  Di HUANG ,  Shengyu ZHOU ,  Lifeng YIN ,  Chunlei GAO ,  Jian SHEN

IPC: G01Q30/18 ,  G01Q60/16 ,  G01Q30/16 ,  F17C3/08 ,  H01F6/04

CPC classification number: G01Q30/18 ,  F17C3/085 ,  F17C2203/0687 ,  F17C2221/017 ,  F17C2223/0161 ,  G01Q30/16 ,  G01Q60/16 ,  H01F6/04

Abstract: A scanning probe microscope of the present disclosure includes: a room-temperature bore superconducting magnet including a liquid helium-consumption free closed-cycle cooling system, a superconducting magnet, and a chamber having a room-temperature bore; and a scanning probe microscope including a scanning head, a vacuum chamber, and a vibration isolation platform; and a computer control system. The room-temperature bore superconducting magnet is cooled by the cryogen-free closed-cycle cooling system which eliminates the dependence on liquid helium for high magnetic field operation. There is no physical contact between the scanning probe microscope and the superconducting magnet connected to the closed-cycle cooling system. The scanning probe microscope can achieve atomic-scale spatial resolution. The temperature of the scanning probe microscope is not restricted by the low temperature conditions for operation of the superconducting magnet. The scanning probe microscope and the vacuum chamber can achieve high-temperature baking independent of the superconducting magnet for ultra-high vacuum conditions.

公开(公告)号：US20180328960A1

公开(公告)日：2018-11-15

申请号：US16041731

申请日：2018-07-20

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  H01J37/28 ,  G01Q70/16 ,  G01Q60/00 ,  G01Q60/16

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US09773634B2

公开(公告)日：2017-09-26

申请号：US15416686

申请日：2017-01-26

Applicant: Hitachi High-Tech Science Corporation

Inventor： Tomokazu Kozakai ,  Osamu Matsuda ,  Yasuhiko Sugiyama ,  Kazuo Aita ,  Fumio Aramaki ,  Anto Yasaka ,  Hiroshi Oba

IPC: H01J37/304 ,  G01Q60/10 ,  H01J37/08 ,  H01J1/304 ,  H01J37/073 ,  H01J37/21 ,  H01J37/28 ,  G01Q60/16 ,  G01Q70/08 ,  H01J37/30

CPC classification number: H01J1/3044 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q70/08 ,  G01Q70/16 ,  H01J1/3048 ,  H01J37/073 ,  H01J37/08 ,  H01J37/21 ,  H01J37/28 ,  H01J37/3002 ,  H01J2201/30415 ,  H01J2201/30496 ,  H01J2237/002 ,  H01J2237/006

Abstract: There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.

公开(公告)号：US09366694B2

公开(公告)日：2016-06-14

申请号：US14761726

申请日：2014-01-13

Applicant: Ecole Polytechnique ,  Centre National de la Recherche Scientifique

Inventor： Marc Chaigneau ,  Akli Karar ,  Bernard Drevillon ,  Razvigor Ossikovski

IPC: G01J3/44 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/26 ,  G01N21/65 ,  G01J3/06 ,  G01Q40/00

CPC classification number: G01Q10/00 ,  G01J3/06 ,  G01J3/44 ,  G01N21/658 ,  G01Q10/045 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q40/00 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/26

Abstract: A multimode local probe microscope having a resonator, a first electrode, and a second electrode, an excitation source adapted to generate mechanical resonance in the resonator, a metal tip fastened to the resonator, movement mechanism for imparting relative movement between the local probe and a sample and adapted to bring the end of the tip to within a distance Z lying in the range 0 to 100 nm, and detector for detecting at least one electrical signal representative of friction forces at the terminals of said electrodes. The metal tip is electrically connected to the output second electrode and the microscopy apparatus includes amplifier and filter for amplifying and filtering signals relating to the friction forces and to the tunnelling current in a single electronic circuit, and configured for regulating the distance Z between the end of the tip and the surface of the sample.

Abstract translation: 一种具有谐振器，第一电极和第二电极的多模式局部探针显微镜，适于在谐振器中产生机械共振的激发源，固定到谐振器的金属尖端，用于在局部探针和 采样并适于使尖端的端部处于位于0至100nm范围内的距离Z内;以及检测器，用于检测表示在所述电极的端子处的摩擦力的至少一个电信号。 金属尖端电连接到输出第二电极，显微镜装置包括放大器和滤波器，用于放大和滤除与单个电子电路中的摩擦力和隧道电流相关的信号，并且被配置用于调节端部之间的距离Z 的尖端和样品的表面。