公开(公告)号：US20180328960A1

公开(公告)日：2018-11-15

申请号：US16041731

申请日：2018-07-20

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  H01J37/28 ,  G01Q70/16 ,  G01Q60/00 ,  G01Q60/16

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US20180045755A1

公开(公告)日：2018-02-15

申请号：US15235889

申请日：2016-08-12

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  G01Q60/00

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US11237188B2

公开(公告)日：2022-02-01

申请号：US16041731

申请日：2018-07-20

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US10060948B2

公开(公告)日：2018-08-28

申请号：US15235889

申请日：2016-08-12

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/16 ,  G01Q70/10 ,  G01Q60/00 ,  G01Q60/16

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US20220128595A1

公开(公告)日：2022-04-28

申请号：US17569398

申请日：2022-01-05

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US11169177B2

公开(公告)日：2021-11-09

申请号：US16327827

申请日：2017-08-09

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US20190219611A1

公开(公告)日：2019-07-18

申请号：US16327827

申请日：2017-08-09

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  H01J37/28 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.