公开(公告)号：US20180364278A1

公开(公告)日：2018-12-20

申请号：US16116479

申请日：2018-08-29

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q60/16 ,  G01Q60/12 ,  G01Q60/14 ,  G01Q30/20

CPC classification number: G01Q60/16 ,  G01Q30/20 ,  G01Q60/12 ,  G01Q60/14

Abstract: In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

公开(公告)号：US20160222445A1

公开(公告)日：2016-08-04

申请号：US14917865

申请日：2014-09-12

Applicant: THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE

Inventor： Prashant Nagpal ,  Anushree Chatterjee ,  Josep Casamada Ribot

IPC: C12Q1/68 ,  G01Q60/12

CPC classification number: C12Q1/6869 ,  B82Y10/00 ,  G01Q60/12 ,  C12Q2565/601

Abstract: Techniques, methods, devices, and compositions are disclosed that are useful in identifying and sequencing natural and synthetic, and modified and unmodified DNA, RNA, PNA, DNA/RNA nucleotides. The disclosed techniques, methods, devices, and compositions are useful in identifying various modifications, DNA/RNA damage, and nucleotide structure, using nanoelectronic quantum tunneling spectroscopy, which may be referred to as QM-Seq. The methods and compositions can include the use of a charged, smooth substrate for deposition of single stranded nucleotides and polynucleotide macromolecules, scanning the modified or unmodified DNA/RNA/PNA, comparing the electronic signatures of an unknown nucleobase against a database of electronic fmgerprints of known nucleobases, including natural and synthetic, modified and unmodified nucleobases, and secondary/tertiary structure, obtained under the same or similar conditions, for example where the nucleobase is in an acidic environment.

Abstract translation: 公开了可用于鉴定和测序天然和合成的，修饰的和未修饰的DNA，RNA，PNA，DNA / RNA核苷酸的技术，方法，装置和组合物。 公开的技术，方法，装置和组合物可用于使用可被称为QM-Seq的纳米电子量子隧道光谱法来鉴定各种修饰，DNA / RNA损伤和核苷酸结构。 所述方法和组合物可以包括使用带电的，平滑的底物沉积单链核苷酸和多核苷酸大分子，扫描经修饰的或未修饰的DNA / RNA / PNA，将未知核碱基的电子特征与电子标记的数据库进行比较 已知的核碱基，包括在相同或相似条件下获得的天然和合成，修饰和未修饰的核碱基和二级/三级结构，例如其中核碱基在酸性环境中。

公开(公告)号：US20140003466A1

公开(公告)日：2014-01-02

申请号：US13898659

申请日：2013-05-21

Applicant: UT-Battelle, LLC

Inventor： Petro Maksymovych

IPC: G01K7/02

CPC classification number: G01K7/021 ,  G01K7/028 ,  G01Q60/12 ,  G01Q60/58

Abstract: A single-contact tunneling thermometry circuit includes a tunnel junction formed between two objects. Junction temperature gradient information is determined based on a mathematical relationship between a target alternating voltage applied across the junction and the junction temperature gradient. Total voltage measured across the junction indicates the magnitude of the target alternating voltage. A thermal gradient is induced across the junction. A reference thermovoltage is measured when zero alternating voltage is applied across the junction. An increasing alternating voltage is applied while measuring a thermovoltage component and a DC rectification voltage component created by the applied alternating voltage. The target alternating voltage is reached when the thermovoltage is nullified or doubled by the DC rectification voltage depending on the sign of the reference thermovoltage. Thermoelectric current and current measurements may be utilized in place of the thermovoltage and voltage measurements. The system may be automated with a feedback loop.

Abstract translation: 单接触隧道温度测量电路包括在两个物体之间形成的隧道结。 结温度梯度信息是基于施加在结点上的目标交变电压与结温度梯度之间的数学关系来确定的。 整个结点测量的总电压表示目标交流电压的大小。 在结点处引起热梯度。 当在交叉点上施加零交流电压时，测量参考热电偶。 在测量由施加的交流电压产生的热电压分量和直流整流电压分量的同时施加增加的交流电压。 当电压根据参考热电偶的符号，直流整流电压无效或加倍时，达到目标交流电压。 可以使用热电流和电流测量来代替热电压和电压测量。 系统可以通过反馈回路自动化。

公开(公告)号：US08601607B2

公开(公告)日：2013-12-03

申请号：US13625780

申请日：2012-09-24

Applicant: Los Alamos National Security, LLC

Inventor： Mark J. Hagmann ,  Dmitry A. Yarotski

IPC: G01Q60/10

CPC classification number: G01Q60/10 ,  G01Q60/12

Abstract: Apparatus for generating a microwave frequency comb (MFC) in the DC tunneling current of a scanning tunneling microscope (STM) by fast optical rectification, caused by nonlinearity of the DC current vs. voltage curve for the tunneling junction, of regularly-spaced, short pulses of optical radiation from a focused mode-locked, ultrafast laser, directed onto the tunneling junction, is described. Application of the MFC to high resolution dopant profiling in semiconductors is simulated. Application of the MFC to other measurements is described.

Abstract translation: 用于通过快速光学校正在直流电流与隧道结的电压曲线的非线性引起的具有规则间隔的短路的扫描隧道显微镜（STM）的DC隧穿电流中产生微波频率梳（MFC）的装置 描述了来自聚焦锁模超快激光器的光辐射的脉冲，被引导到隧道结上。 模拟了MFC在半导体中的高分辨率掺杂剂分布的应用。 描述MFC对其他测量的应用。

公开(公告)号：US20080215252A1

公开(公告)日：2008-09-04

申请号：US11996647

申请日：2006-07-21

Applicant: Tomoji Kawai ,  Hiroyuki Tanaka

Inventor： Tomoji Kawai ,  Hiroyuki Tanaka

IPC: C12Q1/68

CPC classification number: C12Q1/6869 ,  G01Q60/12 ,  C12Q2565/601

Abstract: In a preferred embodiment, an exploring needle of a probe 2 is located at the position of each base of a nucleic acid 6, and a tunneling current value is set to a given value measure. When a bias voltage applied to a substrate is changed step by step from −6 V to 4 V, according to the height of an observed image of each base, the electronic state distribution pattern of each base is obtained. The thus obtained electronic state distribution pattern of each base in the nucleic acid as a measurement object is checked against those in a database to find a base species having the highest degree of similarity to each base by pattern matching to identify each base species to determine the base sequence of the nucleic acid.

Abstract translation: 在优选实施例中，探针2的探针位于核酸6的每个碱基的位置，隧道电流值被设定为给定值测量值。 当施加到衬底的偏置电压从-6V逐步改变到4V时，根据每个基底的观察图像的高度，获得每个基底的电子状态分布图案。 对于数据库中的数据库中的每个碱基的每个碱基的电子状态分布图案进行检查，以通过模式匹配找到与每个碱基具有最高相似程度的碱基，以鉴定每种碱基种类，以确定 碱基序列。

公开(公告)号：US20050035288A1

公开(公告)日：2005-02-17

申请号：US10496571

申请日：2002-11-25

Applicant: Hidemi Shigekawa ,  Osamu Takeuchi ,  Mikio Yamashita ,  Ryuji Morita

Inventor： Hidemi Shigekawa ,  Osamu Takeuchi ,  Mikio Yamashita ,  Ryuji Morita

IPC: G01J1/42 ,  G01J3/28 ,  G01J3/433 ,  G01N21/64 ,  G01Q30/00 ,  G01Q30/02 ,  G01Q60/10 ,  G01Q60/24 ,  G01N13/12 ,  G01N13/16

CPC classification number: G01J3/433 ,  G01J3/2889 ,  G01J2001/4242 ,  G01N21/6408 ,  G01N21/6458 ,  G01N2021/6415 ,  G01Q30/02 ,  G01Q60/12 ,  Y10S977/85

Abstract: Disclosed is a measuring apparatus for a physical phenomenon by photoexcitation, in particular a delay time modulated and time-resolved, scanning probe microscope apparatus providing an ultimate resolution both temporal and spatial. The apparatus comprises an ultrashort laser pulse generator (2); a delay time modulating circuit (6) which splits an ultrashort laser pulse (3) produced by the ultrashort laser pulse generator (2) into two and which also modulates a delay time td between the two ultrashort laser pulses (4 and 5) with a frequency (ω); a scanning probe microscope (17); and a lock-in detection unit (8) which performs lock-in detection with the delay time modulation frequency (ω) of a probe signal (11) from the scanning probe microscope (17). It can detect the delay time dependency of the probe signal (11) as its differential coefficient to the delay time, with no substantial influence from fluctuations in the intensity of ultrashort laser pulses (3) while preventing the probe apex (19) from thermal expansion and shrinkage by repeated irradiation with ultrashort laser pulses (3). A photoexcited physical phenomenon dependent on a delay time between ultrashort laser pulses can thus be measured at a temporal resolution in the order of femtoseconds and at a spatial resolution in the order of angstroms.

Abstract translation: 公开了一种通过光激发的物理现象的测量装置，特别是延迟时间调制和时间分辨的扫描探针显微镜装置，其提供了时间和空间上的最终分辨率。 该装置包括超短激光脉冲发生器（2）; 延迟时间调制电路（6），其将由超短激光脉冲发生器（2）产生的超短激光脉冲（3）分成两部分，并且还用一个第二超短激光脉冲（4和5）调制两个超短激光脉冲（4和5）之间的延迟时间td 频率（ω）; 扫描探针显微镜（17）; 以及锁定检测单元（8），其利用来自扫描探针显微镜（17）的探测信号（11）的延迟时间调制频率（ω）执行锁定检测。 探测信号（11）的延迟时间依赖性可以作为其延迟时间的微分系数，而不会因为超短激光脉冲（3）的强度的波动带来实质的影响，同时防止探头顶点（19）的热膨胀 以及通过用超短激光脉冲（3）重复照射来收缩。 因此，依赖于超短激光脉冲之间的延迟时间的光激发物理现象可以以飞秒级的时间分辨率和以埃的空间分辨率测量。

公开(公告)号：US5431055A

公开(公告)日：1995-07-11

申请号：US058231

申请日：1993-05-10

Applicant: Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

Inventor： Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

IPC: G01B7/34 ,  G01N27/00 ,  G01N27/02 ,  G01N29/06 ,  G01N29/24 ,  G01N37/00 ,  G01Q10/00 ,  G01Q60/00 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/14 ,  G01Q70/10 ,  H01J37/28

CPC classification number: G01Q30/02 ,  B82Y35/00 ,  G01Q60/12 ,  G01Q60/16 ,  G01N2291/048 ,  Y10S977/851 ,  Y10S977/861

Abstract: A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

Abstract translation: 扫描隧道显微镜，其中具有锐利尖端的尖端与样品之间的间隙变窄以使它们之间的隧道电流流动，从而允许观察样品的表面，将应变波检测装置设置在 样品或样品附近，以检测样品内产生的应变波。 通过调制上述隧穿电流的值，在样品内产生应变波。 应变波由上述应变波检测装置检测。 根据检测出的应变波的振幅信息和相位信息，获得关于样本内部的物理信息。

公开(公告)号：US5378983A

公开(公告)日：1995-01-03

申请号：US977572

申请日：1992-11-17

Applicant: Akira Yagi ,  Takao Okada ,  Seizo Morita ,  Nobuo Mikoshiba

Inventor： Akira Yagi ,  Takao Okada ,  Seizo Morita ,  Nobuo Mikoshiba

IPC: G01Q60/12 ,  G01B7/34 ,  G01Q30/04 ,  G01Q60/14 ,  G01K1/16

CPC classification number: G01Q60/12 ,  B82Y35/00 ,  G01B7/34 ,  G01Q30/04 ,  G01Q60/14 ,  Y10S977/852

Abstract: A scanning tunneling potentio-spectroscopic microscope, includes a conductive probe and a circuit for selectively applying one of first, second and third bias voltages to a sample. A tunnel current flowing between the probe and sample is detected, and a tunnel current signal is produced upon detection thereof. A servo circuit controls a distance between the probe and sample on the basis of the tunnel current signal by producing a servo signal as a feedback signal. A hold circuit switches the servo circuit between operating and non-operating states. Configuration data on a surface of the sample is obtained, on the basis of the servo signal, with the first bias voltage applied to the sample and with the servo circuit in the operating state. A first dependence of the tunnel current on the bias voltage is obtained, from the tunnel current signal and the second bias voltage, with the second bias voltage applied to the sample and with the servo circuit in the non-operating state. A second dependence of the tunnel current on the bias voltage is obtained from the tunnel current signal and the third bias voltage, with the third bias voltage applied to the sample and with the servo circuit in the non-operating state. Electron state data is obtained on the basis of the first dependence, and potential data is obtained on the basis of the first and second dependencies.

Abstract translation: 扫描隧道电位分光显微镜包括导电探针和用于选择性地将一个第一，第二和第三偏置电压施加到样品的电路。 检测在探针和样品之间流动的隧道电流，并且在检测到隧道电流信号时产生隧道电流信号。 伺服电路通过产生伺服信号作为反馈信号，根据隧道电流信号来控制探头和样品之间的距离。 保持电路在操作状态和非工作状态之间切换伺服电路。 基于伺服信号获得样品表面上的配置数据，其中施加到样品的第一偏置电压和处于操作状态的伺服电路。 从隧道电流信号和第二偏置电压获得隧道电流对偏置电压的第一依赖性，其中第二偏置电压施加到样品并且伺服电路处于非操作状态。 从隧道电流信号和第三偏置电压获得隧道电流对偏置电压的第二依赖性，其中第三偏压施加到样品并且伺服电路处于非操作状态。 基于第一依赖性获得电子状态数据，并且基于第一和第二依赖性获得潜在数据。

公开(公告)号：US5289004A

公开(公告)日：1994-02-22

申请号：US866748

申请日：1992-04-10

Applicant: Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

Inventor： Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

IPC: G01Q10/00 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/12 ,  G01Q60/14 ,  G01Q60/38 ,  H01J37/00

CPC classification number: G01Q60/12 ,  B82Y35/00 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/14 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/868

Abstract: A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.

Abstract translation: 扫描探针显微镜包括具有位于样品附近的导电探针的悬臂，用于将样品移动到远离探针的致动器，用于在探针和样品之间施加偏置电压以在其间产生隧道电流的电路，电路 用于检测产生的隧道电流的电路，用于检测由探针和样品的原子间作用的原子间力产生的探针的位移量，从而产生信号的电路，用于响应于来自 保持探针和样品之间的距离恒定的电路，从而使致动器移动样本，从检测到的隧道电流形成STS图像数据的电路，用于从检测到的隧道电流形成STM图像数据的电路， 以及用于形成AFM图像数据的电路。 因此，STS，STP和AFM图像同时分别获得。

公开(公告)号：US20170307654A1

公开(公告)日：2017-10-26

申请号：US15448151

申请日：2017-03-02

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q10/04 ,  G01Q60/10

CPC classification number: G01Q10/04 ,  G01Q60/10 ,  G01Q60/12

Abstract: A semiconductor carrier profiling method utilizes a scanning tunneling microscope and shielded probe with an attached spectrum analyzer to measure power loss of a microwave frequency comb generated in a tunneling junction. From this power loss and by utilizing an equivalent circuit or other model, spreading resistance may be determined and carrier density from the spreading resistance. The methodology is non-destructive of the sample and allows scanning across the surface of the sample. By not being destructive, additional analysis methods, like deconvolution, are available for use.