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公开(公告)号：US07420106B2
公开(公告)日：2008-09-02
申请号：US11375867
申请日：2006-03-15
CPC分类号： G01Q60/04 , G01Q60/12 , G01Q60/40 , Y10S977/849 , Y10S977/852 , Y10S977/854 , Y10S977/86 , Y10S977/861 , Y10S977/862 , Y10S977/863 , Y10S977/864
摘要： Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator modulates the mechanical actuator and the atomic force probe at the resonant frequency of the atomic force probe. An electrical modulator is connected to the atomic force probe. A feedback sensing circuit is connected to the mechanical modulator to detect movement of the atomic force probe and provide information about the movement of the atomic force probe to the mechanical modulator allowing the mechanical modulator to modulate the atomic force probe at the resonant frequency of the atomic force probe as the resonant frequency of the atomic force probe changes. An FM detector is connected to the feedback circuit detects changes in the resonant frequency of the atomic force probe.
摘要翻译： 通过检测电子隧道来表征电介质表面。 一种装置包括原子力探针。 机械致动器连接到原子力探针。 机械调节器连接到机械致动器。 机械调制器将机械致动器和原子力探针以原子力探针的共振频率进行调制。 电调制器连接到原子力探针。 反馈感测电路连接到机械调制器以检测原子力探针的移动，并提供关于原子力探针到机械调制器的运动的信息，允许机械调制器以原子的共振频率调制原子力探针 力探头作为原子力探头的共振频率发生变化。 FM检测器连接到反馈电路，检测原子力探头的谐振频率的变化。
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公开(公告)号：US06791931B2
公开(公告)日：2004-09-14
申请号：US09811299
申请日：2001-03-16
申请人： Kenneth J. Eldredge
发明人： Kenneth J. Eldredge
IPC分类号： G01P1518
CPC分类号： B82Y10/00 , G11B9/10 , G11B9/14 , G11B9/1418 , G11B33/08 , Y10S977/849 , Y10S977/861 , Y10S977/881
摘要： An accelerometer includes a field emitter to generate an electron beam current and a medium. An effect is generated when the electron beam current bombards the medium. The magnitude of the effect is affected by a physical impact imparting an amount of energy to the accelerometer to cause a relative movement between the field emitter and the medium. The amount of energy imparted to the accelerometer by the physical impact is determined by measuring the magnitude of the effect. The accelerometer can be integrally implemented in a storage device.
摘要翻译： 加速度计包括用于产生电子束电流和介质的场发射器。 当电子束电流轰击介质时产生效果。 效应的大小受到向加速度计赋予能量的物理冲击以引起场发射器和介质之间的相对运动的影响。 通过物理冲击给予加速度计的能量的量通过测量效应的大小来确定。 加速度计可以整体地实现在存储装置中。
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3.发明授权Protective fullerene (C60) packaging system for microelectromechanical systems applications 失效用于微机电系统应用的保护性富勒烯（C60）包装系统公开(公告)号：US06791108B1
公开(公告)日：2004-09-14
申请号：US09888631
申请日：2001-06-20
申请人： John D. Olivas
发明人： John D. Olivas
IPC分类号： H01L2906
CPC分类号： G01Q10/06 , Y10S977/734 , Y10S977/847 , Y10S977/848 , Y10S977/857 , Y10S977/861 , Y10S977/875
摘要： The invention involves tunneling tips to their conducting surface, and specifically the deposition of a monolayer of fullerene C60 onto the conducting plate surface to protect the tunneling tip from contact. The Fullerene C60 molecule is approximately spherical, and a monolayer of fullerene has a thickness of one nanometer, such that a monolayer thereby establishing the theoretical distance desired between the MEMS' tunneling tip and the conducting plate. Exploiting the electrical conductivity of C60, the tip can be accurately positioned by simply monitoring conductivity between the fullerene and the tunneling tip. By monitoring the conductivity between the tip and the fullerene layer as the tip is brought in proximity, the surfaces can be brought together without risk of contacting the underlying conducting surface. Once the tunneling tip is positioned at the one nanometer spacing, with only the monolayer of fullerene between the tunneling tip and the conducting plate, the monolayer of C60 can be broken down thermally and removed chemically leaving only the tunneling tip and the conducting plate at the ideal tunneling spacing. Alternatively, the properties of fullerene allow the tunneling process to occur directly across the fullerene monolayer.
摘要翻译： 本发明涉及将隧道尖端引导到它们的导电表面，并且具体地将富勒烯C60的单层沉积到导电板表面上以保护隧道尖端免受接触。 富勒烯C60分子是近似球形的，并且富勒烯的单层具有一纳米的厚度，使得单层由此建立MEMS隧道尖端和导电板之间所需的理论距离。 利用C60的导电性，可以通过简单地监测富勒烯与隧道尖之间的导电率来精确定位尖端。 通过在尖端接近的情况下监测尖端和富勒烯层之间的导电性，可以将表面组合在一起，而不会接触下面的导电表面。 一旦隧道末端位于一纳米间距处，只有隧道顶端和导电板之间的富勒烯单层，C60的单层可以热分解，并且化学除去，只留下隧道尖端和导电板 理想的隧道间距。 或者，富勒烯的性质允许隧穿过程直接发生在富勒烯单层上。
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公开(公告)号：US20020122373A1
公开(公告)日：2002-09-05
申请号：US09797726
申请日：2001-03-02
发明人： Daniel R. Marshall
IPC分类号： G11B009/10
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1418 , G11B9/1427 , G11B9/1445 , G11B9/1454 , G11B23/00 , Y10S977/849 , Y10S977/861 , Y10S977/863 , Y10S977/873 , Y10S977/881
摘要： A storage device including many field emitters in close proximity to a storage medium, and a micromover, all in a partial vacuum. Each field emitter can generate an electron beam current. The storage medium has many storage areas on it, with each field emitter responsible for a number of storage areas. Also, each storage area can be in a number of different states to represent the information stored in that area. In storing information to the storage device, the power density of an electron beam current is increased to change the state of the storage area bombarded by the electron beam current. In reading information from the device, the power density of the electron beam current is reduced to generate a signal current from the storage area bombarded by the electron beam current. During reading, the power density is selected to be low enough so that no writing occurs. The magnitude of the signal current depends on the state of the storage area. The information stored in the storage area is read by measuring the magnitudes of the signal current. The micromover scans the storage medium with respect to the field emitters so that each field emitter can access many storage areas. The micromover causes a periodic change in the relative positions between the field emitters and the storage medium, thereby generating periodic field emitter trajectories.
摘要翻译： 一种存储装置，包括紧邻存储介质的许多场发射器和全部处于部分真空中的微型扫描器。 每个场发射器可以产生电子束电流。 存储介质上有许多存储区域，每个场发射器负责多个存储区域。 此外，每个存储区域可以是多个不同的状态，以表示存储在该区域中的信息。 在将信息存储到存储装置中时，电子束电流的功率密度增加以改变由电子束电流轰击的存储区域的状态。 在从器件读取信息时，电子束电流的功率密度降低，以产生由电子束电流轰击的存储区域的信号电流。 在读取期间，功率密度被选择为足够低，使得不会发生写入。 信号电流的大小取决于存储区域的状态。 通过测量信号电流的大小来读取存储在存储区域中的信息。 微型扫描器相对于场发射器扫描存储介质，使得每个场发射器可以访问许多存储区域。 微突起导致场发射器和存储介质之间的相对位置的周期性变化，由此产生周期性场发射器轨迹。
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5.发明授权公开(公告)号：US06265711B1
公开(公告)日：2001-07-24
申请号：US08906602
申请日：1996-12-10
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： H01J3700
CPC分类号： G01N23/225 , G01Q10/02 , G01Q10/04 , G01Q20/02 , G01Q60/04 , G01Q60/06 , G01Q70/02 , G01Q80/00 , G02B21/002 , G03F1/84 , G03F7/704 , G03F7/70616 , G11B5/232 , G11B5/3116 , G11B9/1409 , Y10S977/861 , Y10S977/862 , Y10S977/863 , Y10S977/873
摘要： A scanning probe microscope assembly that has an atomic force measurement (AFM) mode, a scanning tunneling measurement (STM) mode, a near-field spectrophotometry mode, a near-field optical mode, and a hardness testing mode for examining an object.
摘要翻译： 扫描探针显微镜组件，其具有原子力测量（AFM）模式，扫描隧道测量（STM）模式，近场分光光度测定模式，近场光学模式和用于检查物体的硬度测试模式。
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公开(公告)号：US6049078A
公开(公告)日：2000-04-11
申请号：US986036
申请日：1997-12-05
IPC分类号： G01Q60/12 , G01Q60/16 , G01Q70/10 , H01J37/073 , H01J37/252
CPC分类号： G01Q60/16 , B82Y35/00 , Y10S977/861 , Y10S977/875 , Y10S977/878 , Y10S977/879
摘要： A ultrathin, hollow, shell-shaped tip for use in a scanning tunneling microscopy system. A bias across a sample and the tip permits electrons tunneling from the surface of the sample to pass through the tip. Several properties of the tunneling electrons may be determined in such a system including the spin orientation, energy, and time dependence, for example. By rastering the sample across the tip, these properties can be imaged across the sample. A high resolution magnetic image of the sample can be generated.
摘要翻译： 用于扫描隧道显微镜系统的超薄，中空的壳形尖端。 样品和尖端之间的偏置允许电子从样品表面穿透通过尖端。 例如，可以在包括自旋取向，能量和时间依赖性的系统中确定隧穿电子的几个性质。 通过在整个尖端上扫描样品，可以对样品进行成像。 可以产生样品的高分辨率磁图像。
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公开(公告)号：US5715059A
公开(公告)日：1998-02-03
申请号：US673254
申请日：1996-06-28
申请人： John M. Guerra
发明人： John M. Guerra
IPC分类号： G01B11/30 , B62D57/00 , B81B7/04 , G01N21/27 , G01N37/00 , G01Q60/18 , G11B5/60 , G11B9/00 , G11B33/10 , G01B11/24
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , B82Y10/00 , G11B33/10 , G11B5/6011 , G11B9/1418 , Y10S977/861 , Y10S977/881 , Y10S977/932
摘要： A dark-field imaging system and method is disclosed that employs photon tunneling to visualize and measure submicron features of reflecting or transmissive materials within the subnanometer-to-several-micron range. The system comprises an illumination section for providing an evanescent field, where the evenescent field is selectively scattered by the surface of the reflecting or transmissive material, and a collection section for transmitting the radiant energy produced by the evanescent field scattering to an imaging section, which may be a vidicon, digital camera, or other photo detector device. Various embodiments are disclosed including the use of a bulk optic prismatic element, the forward aplantic element of a compound microscope objective, diffracting gratings, and optical waveguides. In each embodiment the collection section and illumination section may be completely optically, and thus physically, uncoupled.
摘要翻译： 公开了一种暗场成像系统和方法，其使用光子隧道来在亚纳米级至几微米范围内可视化和测量反射或透射材料的亚微米特征。 该系统包括用于提供ev逝场的照明部分，其中由反射或透射材料的表面选择性地散射所述长光场;以及收集部分，用于将由ev逝场散射产生的辐射能传递到成像部分， 可以是摄影机，数码相机或其它光电检测器装置。 公开了各种实施例，包括使用体光学棱镜元件，复合显微镜物镜的前向元件，衍射光栅和光波导。 在每个实施例中，收集部分和照明部分可以是完全光学的，并且因此物理地，非耦合的。
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公开(公告)号：US5510858A
公开(公告)日：1996-04-23
申请号：US169218
申请日：1993-12-20
CPC分类号： H04N5/44 , H04N5/9261 , B82Y10/00 , G01Q80/00 , G11B9/14 , Y10S977/732 , Y10S977/861 , Y10S977/881 , Y10S977/943
摘要： A digital television receiver having an STM memory is provided with a receiving unit to receive a broadcasting signal, a producing circuit to produce an image signal and a voice signal from the received broadcasting signal, a memory which is used to record the image signal and the voice signal and has a plurality of probe electrodes and a recording medium arranged so as to face the probe electrodes, a display for converting the image signal outputted from the memory into the video image, and a speaker for converting the voice signal outputted from the memory into the voice sound. The memory further has a voltage applying circuit for applying a voltage to the portion between each probe electrode and the recording medium. The image signal and the voice signal are digital signals.
摘要翻译： 具有STM存储器的数字电视接收机设置有接收单元以接收广播信号，产生电路以从接收到的广播信号产生图像信号和语音信号，用于记录图像信号的存储器和 语音信号，并且具有多个探针电极和布置为面对探针电极的记录介质，用于将从存储器输出的图像信号转换为视频图像的显示器和用于转换从存储器输出的语音信号的扬声器 进入声音。 存储器还具有用于向每个探针电极和记录介质之间的部分施加电压的电压施加电路。 图像信号和语音信号是数字信号。
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9.发明授权
公开(公告)号：US5495109A
公开(公告)日：1996-02-27
申请号：US399968
申请日：1995-03-07
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
IPC分类号： G01B21/30 , G01N27/416 , G01Q20/02 , G01Q30/12 , G01Q60/04 , G01Q60/10 , G01Q60/24 , G01Q60/40 , H01J37/252
CPC分类号： G01Q60/04 , B82Y35/00 , G01Q20/02 , G01Q30/14 , G01Q60/38 , G01Q60/60 , Y10S977/852 , Y10S977/859 , Y10S977/86 , Y10S977/861 , Y10S977/873
摘要： A method and apparatus for high resolution mapping of the chemical composition of a thin film utilizes scanning probe microscopy techniques. The sample to be studied is prepared as a thin film disposed on a conductive backing electrode. A sensitive electrometer is connected to the backing electrode to detect current passing through it. According to a first aspect of the invention, a force sensing cantilever is scanned relative to the sample surface a plurality of times. Topographic information about the sample surface is obtained in a conventional manner by studying deflections of the cantilever or feedback current used to minimize deflections of the cantilever. Simultaneously, a voltage is applied to the probe tip. This voltage, through a tunneling current to the backing electrode, causes reduction and/or oxidation reactions in the sample surface. On successive scans, different voltages may be used. In this way, the tunneling current at each of a number of different voltages for each location in the sample surface is obtained. Because specific oxidation and reduction reactions take place only at well defined voltages, it is possible, from the current measured at a certain location and a certain applied voltage at that location, to deduce what the chemical located at that location is. According to a second aspect of the invention, a scanning tunneling microscope mechanism may be used instead of a force sensing mechanism.
摘要翻译： 用于薄膜化学成分的高分辨率测绘的方法和装置利用扫描探针显微镜技术。 要研究的样品被准备为设置在导电背衬电极上的薄膜。 敏感静电计连接到背面电极以检测通过它的电流。 根据本发明的第一方面，多次对相对于样品表面扫描力感测悬臂。 通过研究用于使悬臂的偏转最小化的悬臂或反馈电流的偏转，以常规方式获得关于样品表面的地形信息。 同时，对探针尖端施加电压。 该电压通过到背衬电极的隧道电流引起样品表面的还原和/或氧化反应。 在连续扫描中，可以使用不同的电压。 以这种方式，获得样品表面中每个位置的多个不同电压中的每一个处的隧穿电流。 因为特定的氧化和还原反应仅在明确定义的电压下进行，所以可以从在某一位置测量的电流和该位置的某一施加电压来推断位于该位置的化学物质。 根据本发明的第二方面，可以使用扫描隧道显微镜机构来代替力感测机构。
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公开(公告)号：US5485451A
公开(公告)日：1996-01-16
申请号：US174443
申请日：1993-12-28
IPC分类号： G01Q20/04 , G01B7/34 , G01N37/00 , G01Q60/10 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11B7/00
CPC分类号： G11B9/1445 , B82Y10/00 , G01Q80/00 , Y10S977/849 , Y10S977/851 , Y10S977/861 , Y10S977/881 , Y10S977/947
摘要： There is disclosed an information recording/reproducing apparatus utilizing a probe electrode and a recording medium, based on the principle of scanning tunnel microscope. When a track groove on the recording medium is detected, the distance control between the probe electrode and the recording medium is suspended. Consequently, the tip of the probe electrode does not enter the track groove, and is prevented from collision with the recording medium. The scanning speed of the probe electrode can, therefore, be increased without the danger of such collision.
摘要翻译： 基于扫描隧道显微镜的原理，公开了利用探针电极和记录介质的信息记录/再现装置。 当检测到记录介质上的轨道凹槽时，探针电极和记录介质之间的距离控制被暂停。 因此，探针电极的尖端不进入轨道槽，并且防止与记录介质碰撞。 因此，可以增加探针电极的扫描速度，而不会有这种碰撞的危险。
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