公开(公告)号：US07420106B2

公开(公告)日：2008-09-02

申请号：US11375867

申请日：2006-03-15

申请人： Clayton C. Williams ,  Ezra B. Bussmann

发明人： Clayton C. Williams ,  Ezra B. Bussmann

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01Q60/04 ,  G01Q60/12 ,  G01Q60/40 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/854 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/862 ,  Y10S977/863 ,  Y10S977/864

摘要： Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator modulates the mechanical actuator and the atomic force probe at the resonant frequency of the atomic force probe. An electrical modulator is connected to the atomic force probe. A feedback sensing circuit is connected to the mechanical modulator to detect movement of the atomic force probe and provide information about the movement of the atomic force probe to the mechanical modulator allowing the mechanical modulator to modulate the atomic force probe at the resonant frequency of the atomic force probe as the resonant frequency of the atomic force probe changes. An FM detector is connected to the feedback circuit detects changes in the resonant frequency of the atomic force probe.

摘要翻译： 通过检测电子隧道来表征电介质表面。 一种装置包括原子力探针。 机械致动器连接到原子力探针。 机械调节器连接到机械致动器。 机械调制器将机械致动器和原子力探针以原子力探针的共振频率进行调制。 电调制器连接到原子力探针。 反馈感测电路连接到机械调制器以检测原子力探针的移动，并提供关于原子力探针到机械调制器的运动的信息，允许机械调制器以原子的共振频率调制原子力探针 力探头作为原子力探头的共振频率发生变化。 FM检测器连接到反馈电路，检测原子力探头的谐振频率的变化。

公开(公告)号：US06583412B2

公开(公告)日：2003-06-24

申请号：US09811374

申请日：2001-03-17

申请人： Clayton C. Williams

发明人： Clayton C. Williams

IPC分类号： H01J3700

CPC分类号： G01Q60/14 ,  Y10S977/732 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/873 ,  Y10S977/875 ,  Y10S977/881

摘要： The present invention develops a new type of SPM, a scanning tunneling charge transfer microscope (STCTM). The STCTM is capable of first, detecting the transfer of an ultrasmall amount of charge (single electrons) or current (attoampere) into or out from a surface with atomic resolution and second, simultaneously measuring the electronic response of that surface to the transferred charge. This dual capability can be achieved by appropriately combining the virtues of the STM and a modified EFM. The STM provides the atomic resolution for the charge transfer, while the modified EFM provides the sub-electronic charge sensitivity for the current and charge detection. The STCTM, with sensitivity many orders of magnitude better than with SPM technology currently available, can be used to characterize the properties of molecules, ultrathin oxides, insulator surfaces, and clusters on insulators with atomic resolution.

公开(公告)号：US4947034A

公开(公告)日：1990-08-07

申请号：US344621

申请日：1989-04-28

申请人： Hemantha K. Wickramasinghe ,  Clayton C. Williams

发明人： Hemantha K. Wickramasinghe ,  Clayton C. Williams

IPC分类号： G02B21/36 ,  G01B11/30 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/22 ,  G02B21/00

CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q20/02 ,  Y10S977/862

摘要： A near field optical microscopy method and apparatus eliminates the necessity of an aperture for scanning a sample surface and greatly reduces the detected background signal. A small dimension tip, on the order of atomic dimension, is disposed in close proximity to the sample surface. A dither motion is applied to the tip at a first frequency in a direction substantially normal to the plane of the sample surface. Dither motion is simultaneously applied to the sample at a second frequency in a direction substantially parallel to the plane of the sample surface. The amplitude of the motions are chosen to be comparable to the desired measurement resolution. The end of the tip is illuminated by optical energy. The scattered light from the tip and surface is detected at the difference frequency for imaging the sample surface at sub-wavelength resolution without the use of an aperture. Alternatively, the tip is maintained stationary and the sample undergoes motion in the two directions.

公开(公告)号：US5065103A

公开(公告)日：1991-11-12

申请号：US499857

申请日：1990-03-27

申请人： James A. Slinkman ,  Hemantha K. Wickramasinghe ,  Clayton C. Williams

发明人： James A. Slinkman ,  Hemantha K. Wickramasinghe ,  Clayton C. Williams

IPC分类号： G01N27/22 ,  G01N27/24 ,  G01Q10/00 ,  G01Q30/04 ,  G01Q60/46 ,  H01L21/66

CPC分类号： G01Q60/46 ,  B82Y35/00 ,  G01N27/24

摘要： An apparatus and method for generating microscopic scan data of C-V and/or dC/dV over a scan area. A scanning microscope, for example a scanning force microscope, is provided with a voltage biased tip, for example, of tungsten, which is scanned across an area to derive the data. The data can be used to derive a plot of semiconductor dopant level across the scan area. Other material properties can be derived, for example, carrier generation and recombination rates and subsurface defects.

公开(公告)号：US4747698A

公开(公告)日：1988-05-31

申请号：US858320

申请日：1986-04-30

申请人： Hermantha K. Wickramasinghe ,  Clayton C. Williams

发明人： Hermantha K. Wickramasinghe ,  Clayton C. Williams

IPC分类号： G01B7/34 ,  G01B15/00 ,  G01B15/08 ,  G01B21/20 ,  G01N25/72 ,  G01N37/00 ,  G01Q60/58 ,  G01N25/00

CPC分类号： G01Q60/58 ,  B82Y35/00 ,  G01N25/72 ,  Y10S977/852 ,  Y10S977/867

摘要： Apparatus is provided for investigating surface structures irrespective of the materials involved. A fine scanning tip is heated to a steady state temperature at a location remote from the structure to be investigated. Thereupon, the scanning tip is moved to a position proximate to, but spaced from the structure. At the proximate position, the temperature variation from the steady state temperature is detected. The scanning tip is scanned across the surface sturcture with the aforesaid temperature variation maintained constant. Piezo electric drivers move the scanning tip both transversely of, and parallel to, the surface structure. Feedback control assures the proper transverse positioning of the scanning tip and voltages thereby generated replicate the surface structure to be investigated.

摘要翻译： 提供了用于调查表面结构的装置，而不管涉及的材料如何。 在远离待研究的结构的位置处将精细的扫描尖端加热到稳态温度。 于是，扫描尖端被移动到靠近但与结构隔开的位置。 在接近的位置，检测到来自稳态温度的温度变化。 扫描尖端在表面结构上扫描，上述温度变化保持恒定。 压电电动驱动器将扫描尖端横向并平行于表面结构。 反馈控制确保了扫描尖端的正确的横向定位，从而产生的电压复制了待研究的表面结构。

公开(公告)号：US5523700A

公开(公告)日：1996-06-04

申请号：US408893

申请日：1995-03-22

申请人： Clayton C. Williams ,  Yunji Huang

发明人： Clayton C. Williams ,  Yunji Huang

IPC分类号： G01Q70/14 ,  G01R31/312 ,  G01R29/12

CPC分类号： G01R31/312 ,  Y10S977/854 ,  Y10S977/866

摘要： Quantitative dopant profile measurements are performed on a nanometer scale by using a scanning capacitance microsope. A nanometer scale tip of the microscope is positioned at a semiconductor surface, and local capacitance change is measured as a function of sample bias. The method incorporates a feedback system and procedure in which the magnitude of the AC bias voltage applied to the sample is adjusted to maintain a constant capacitance change as the tip is scanned across the sample surface. A one dimensional model is used to extract dopant density profiles from the measurements made by the scanning capacitance microscope.

摘要翻译： 通过使用扫描电容微孔，以纳米尺度进行定量掺杂物分布测量。 显微镜的纳米级尖端位于半导体表面，并且测量局部电容变化作为样品偏压的函数。 该方法包括反馈系统和程序，其中调整施加到样品的AC偏置电压的大小，以在尖端扫描样品表面时保持恒定的电容变化。 使用一维模型从扫描电容显微镜进行的测量中提取掺杂剂密度分布。

公开(公告)号：US06210982B1

公开(公告)日：2001-04-03

申请号：US09116803

申请日：1998-07-16

申请人： Clayton C. Williams ,  Jeffrey S. McMurray

发明人： Clayton C. Williams ,  Jeffrey S. McMurray

IPC分类号： G01R3126

CPC分类号： B82Y15/00 ,  G01R31/2648 ,  G01R31/2653 ,  Y10S977/854

摘要： A method and apparatus for generating a spatially improved and accurate dopant density profile of a doped material using scanning probe microscopy, wherein the new method utilizes an iterative process to approach a dopant density profile having a user definable accuracy by creating a new two-dimensional gradient model which accounts for gradients in doping concentrations within the doped material.

摘要翻译： 一种用于使用扫描探针显微镜产生掺杂材料的空间改善且精确的掺杂物密度分布的方法和装置，其中所述新方法利用迭代过程来接近具有用户可定义精度的掺杂剂密度分布，通过产生新的二维梯度 考虑掺杂材料内掺杂浓度梯度的模型。

公开(公告)号：US5061070A

公开(公告)日：1991-10-29

申请号：US184639

申请日：1988-04-22

申请人： John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

发明人： John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

IPC分类号： G01N15/14 ,  G01J9/02 ,  G01N15/00 ,  G01N15/02 ,  G01N15/06 ,  G01N21/23 ,  G01N21/45 ,  G01N21/94

CPC分类号： G01N21/45 ,  G01J2009/0261 ,  G01N2015/0011 ,  G01N2015/0053 ,  G01N2015/0238 ,  G01N21/94

摘要： A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.

公开(公告)号：US4666308A

公开(公告)日：1987-05-19

申请号：US666354

申请日：1984-10-30

申请人： Clayton C. Williams

发明人： Clayton C. Williams

IPC分类号： G01N21/17 ,  G01N21/00

CPC分类号： G01N21/1702

摘要： Apparatus for non-destructively inspecting a material includes a housing for holding the material with a window in the housing for the transmission of a laser beam and a pressurized fluid within the housing in contact with the material. A first laser source generates a first beam at a first frequency, and the beam is directed through the window and onto said material. A second laser source generates a second beam at a second frequency, the second frequency being related to the first frequency whereby Bragg scattering of the second beam is realized in the pressurized fluid. The second beam is directed through the window and onto said material, and the Bragg scattered second beam is detected.

摘要翻译： 用于非破坏性地检查材料的装置包括用于将材料保持在壳体中的窗口的壳体，用于传递激光束和壳体内与加压材料接触的加压流体。 第一激光源以第一频率产生第一光束，并且光束被引导通过窗口并且到达所述材料。 第二激光源以第二频率产生第二光束，第二频率与第一频率相关，从而在加压流体中实现第二光束的布拉格散射。 第二个光束通过窗口被引导到所述材料上，并且检测到布拉格散射的第二光束。