公开(公告)号：US07578853B2

公开(公告)日：2009-08-25

申请号：US11631439

申请日：2005-07-01

Applicant: Tatsuya Hattori ,  Pu Qian

Inventor： Tatsuya Hattori ,  Pu Qian

IPC: G01N13/10

CPC classification number: G01Q30/20 ,  G01Q70/10 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/872 ,  Y10S977/873

Abstract: A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.

Abstract translation: 一种扫描探针显微镜系统，包括中空探针3，连接到中空探针3的后端32的管4，设置在中空探针3下方的支撑台1和基底2以及用于清洗中空探针的装置5 3，固定到支撑台1，通过管4和中空探针3的样品S以及基板2和洗涤装置5被支撑台1移动，使得它们各自与中空探针3相对 。

公开(公告)号：US07451638B1

公开(公告)日：2008-11-18

申请号：US11187991

申请日：2005-07-22

Applicant: Ozgur Sahin ,  Abdullah Atalar ,  Calvin F. Quate ,  Olav Solgaard

Inventor： Ozgur Sahin ,  Abdullah Atalar ,  Calvin F. Quate ,  Olav Solgaard

IPC: H01J37/00

CPC classification number: G01Q60/38 ,  G01Q60/34 ,  G01Q70/10 ,  Y10S977/873

Abstract: A harmonic cantilever for use in an atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.

Abstract translation: 用于原子力显微镜的谐波悬臂包括悬臂和探针尖。 悬臂臂具有选择的形状来调谐基本共振频率或所选高阶模式的谐振频率，使得基波和高次谐振频率具有整数比或接近整数比。 在一个实施例中，悬臂可以成形为调谐基本共振频率。 或者，悬臂可以包括用于调谐基本模式或选择的较高阶模式的谐振频率的几何特征。 公开了使用谐波悬臂的成像方法，其中测量高次谐波的信号以确定样品的材料性质。 在另一个实施例中，悬臂包括位于最小位移处的不需要的谐波的探针尖端，用于抑制与不需要的谐波相关联的信号。

公开(公告)号：US20080017809A1

公开(公告)日：2008-01-24

申请号：US11631439

申请日：2005-07-01

Applicant: Tatsuya Hattori ,  Pu Qian

Inventor： Tatsuya Hattori ,  Pu Qian

IPC: G01N13/10

CPC classification number: G01Q30/20 ,  G01Q70/10 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/872 ,  Y10S977/873

Abstract: A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.

Abstract translation: 一种扫描探针显微镜系统，包括中空探针3，连接到中空探针3的后端32的管4，设置在中空探针3下方的支撑台1和基底2以及用于清洗中空探针的装置5 3，固定到支撑台1，通过管4和中空探针3的样品S以及基板2和洗涤装置5被支撑台1移动，使得它们各自与中空探针3相对 。

公开(公告)号：US20070128854A1

公开(公告)日：2007-06-07

申请号：US11633820

申请日：2006-12-05

Applicant: Eunkyoung Kim ,  Sung Lee ,  Kang Park

Inventor： Eunkyoung Kim ,  Sung Lee ,  Kang Park

IPC: H01L21/4763

CPC classification number: G01Q60/22 ,  Y10S977/873 ,  Y10S977/875 ,  Y10S977/878

Abstract: Provided is near-field optical probe including: a cantilever arm support portion that is formed of a lower silicon layer of a silicon-on-insulator (SOI) substrate, the cantilever arm support portion having a through hole formed therein at a side of the lower silicon layer; and a cantilever arm forming of a junction oxidation layer pattern and an upper silicon layer pattern on the SOI substrate that are supported on an upper surface of the lower silicon layer and each have a smaller hole than the through hole, a silicon oxidation layer pattern having a tip including an aperture at a vertical end, corresponding with the hole on the upper silicon layer pattern, and an optical transmission prevention layer that is formed on the silicon oxidation layer pattern and does not cover the aperture.

Abstract translation: 本发明提供的近场光学探针包括：由绝缘体上硅（SOI）衬底的下硅层形成的悬臂支撑部，所述悬臂臂支撑部在其一侧形成有通孔， 下硅层; 以及形成在所述SOI衬底上的结氧化层图案和上硅层图案的悬臂，所述支撑在所述下硅层的上表面上并且具有比所述通孔更小的孔，硅氧化层图案具有 对应于上硅层图案上的孔的垂直端的开孔，以及形成在硅氧化层图案上并且不覆盖该孔的防透光层。

公开(公告)号：US07138627B1

公开(公告)日：2006-11-21

申请号：US11169380

申请日：2005-06-29

Applicant: Yoshikazu Nakayama ,  Akio Harada ,  Seiji Akita

Inventor： Yoshikazu Nakayama ,  Akio Harada ,  Seiji Akita

IPC: G01N13/16 ,  G01B5/28

CPC classification number: G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12 ,  Y10S977/869 ,  Y10S977/873 ,  Y10S977/876

Abstract: A nanotube probe assembled under real-time observation inside an electron microscope, the probe including a nanotube; a holder for holding the nanotube; and a fastening means for fastening the nanotube at a base end portion thereof to the holder; and the tip end portion of the nanotube protrudes from the holder. The method for manufacturing a nanotube probe includes the steps of setting up a nanotube and a holder inside an electron microscope; allowing a base end portion of the nanotube, with a tip end portion thereof protruding, to come into contact with the holder; and irradiating electron beam to the base end portion of the nanotube to form a carbon film at the base end portion of the nanotube, or forming a fused part at the base end portion of the nanotube, thus fastening the base end portion of the nanotube to the holder by the carbon film.

Abstract translation: 在电子显微镜下实时观察组装的纳米管探针，探针包括纳米管; 用于保持纳米管的支架; 以及紧固装置，用于将其基端部的纳米管紧固到保持器; 并且纳米管的前端部从保持器突出。 纳米管探针的制造方法包括在电子显微镜内设置纳米管和保持器的步骤; 允许其顶端突出的纳米管的基端部与保持器接触; 并且将电子束照射到纳米管的基端部，在纳米管的基端部形成碳膜，或者在纳米管的基端部形成熔融部，将纳米管的基端部固定在 持有者由碳膜。

公开(公告)号：US06735163B2

公开(公告)日：2004-05-11

申请号：US09797726

申请日：2001-03-02

Applicant: Daniel R. Marshall

Inventor： Daniel R. Marshall

IPC: G11B700

CPC classification number: B82Y10/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1445 ,  G11B9/1454 ,  G11B23/00 ,  Y10S977/849 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/873 ,  Y10S977/881

Abstract: A storage device including many field emitters in close proximity to a storage medium, and a micromover, all in a partial vacuum. Each field emitter can generate an electron beam current. The storage medium has many storage areas on it, with each field emitter responsible for a number of storage areas. Also, each storage area can be in a number of different states to represent the information stored in that area. In storing information to the storage device, the power density of an electron beam current is increased to change the state of the storage area bombarded by the electron beam current. In reading information from the device, the power density of the electron beam current is reduced to generate a signal current from the storage area bombarded by the electron beam current. During reading, the power density is selected to be low enough so that no writing occurs. The magnitude of the signal current depends on the state of the storage area. The information stored in the storage area is read by measuring the magnitudes of the signal current. The micromover scans the storage medium with respect to the field emitters so that each field emitter can access many storage areas. The micromover causes a periodic change in the relative positions between the field emitters and the storage medium, thereby generating periodic field emitter trajectories.

Abstract translation: 一种存储装置，包括紧邻存储介质的许多场发射器和全部处于部分真空中的微型扫描器。 每个场发射器可以产生电子束电流。 存储介质上有许多存储区域，每个场发射器负责多个存储区域。 此外，每个存储区域可以是多个不同的状态，以表示存储在该区域中的信息。 在将信息存储到存储装置中时，电子束电流的功率密度增加以改变由电子束电流轰击的存储区域的状态。 在从器件读取信息时，电子束电流的功率密度降低，以产生由电子束电流轰击的存储区域的信号电流。 在读取期间，功率密度被选择为足够低，使得不会发生写入。 信号电流的大小取决于存储区域的状态。 通过测量信号电流的大小来读取存储在存储区域中的信息。 微型扫描器相对于场发射器扫描存储介质，使得每个场发射器可以访问许多存储区域。 微突起导致场发射器和存储介质之间的相对位置的周期性变化，由此产生周期性场发射器轨迹。

公开(公告)号：US06664540B2

公开(公告)日：2003-12-16

申请号：US09778459

申请日：2001-02-07

Applicant: Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro

Inventor： Nobuhiro Shimizu ,  Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Chiaki Yasumuro

IPC: G01N2300

CPC classification number: G01Q10/045 ,  G01N23/046 ,  G01N2223/419 ,  G01Q20/04 ,  G01Q60/38 ,  Y10S977/873

Abstract: A microprobe has a cantilever having a first lever portion having a free end portion, a second lever portion having a front end portion from which the first lever portion projects, and a support portion for supporting the second lever portion. A piezoresistive element is disposed on the second lever portion for bending the second lever portion.

Abstract translation: 微探针具有悬臂，其具有具有自由端部的第一杆部分，具有第一杆部分突出的前端部的第二杆部分和用于支撑第二杆部分的支撑部分。 压阻元件设置在第二杆部分上，用于弯曲第二杆部分。

公开(公告)号：US20030095356A1

公开(公告)日：2003-05-22

申请号：US09990259

申请日：2001-11-21

Applicant: YOSHIKAZU NAKAYAMA and DAIKEN CHEMICAL CO., LTD.

Inventor： Yoshikazu Nakayama ,  Akio Harada

IPC: G11B005/127

CPC classification number: B82Y10/00 ,  G11B5/127 ,  G11B5/48 ,  G11B5/54 ,  G11B5/58 ,  G11B5/581 ,  G11B2005/0002 ,  G11B2005/0005 ,  Y10S977/863 ,  Y10S977/865 ,  Y10S977/873 ,  Y10S977/876 ,  Y10S977/932

Abstract: A nano-magnetic head for inputting and outputting magnetic signals with nano-region precision on a magnetic recording medium such as magnetic tapes, magnetic cards, magnetic disks, magnetic drums, etc. The nano-magnetic head uses a nanotube with its base end portion fastened to a holder that is at an end of an AFM cantilever. The tip end portion of the nanotube protrudes from the holder, and a nanocoil is wound around the outer circumference of the tip end portion of the nanotube so that signals are inputted and outputted at both ends of the nanocoil. By way of lining up ferromagnetic metal atoms in the hollow portion of the nanotube, it is possible to strengthen the magnetic signal. The nano-magnetic head is combinable with a signal controller, thus forming a nano-magnetic head device.

Abstract translation: 一种用于在诸如磁带，磁卡，磁盘，磁鼓等的磁记录介质上输入和输出具有纳米区域精度的磁信号的纳米磁头。纳米磁头使用其基端部分的纳米管 紧固在AFM悬臂末端的支架上。 纳米管的前端部从保持器突出，纳米线卷绕在纳米管的前端部的外周，使得在纳米线的两端输入信号。 通过在纳米管的中空部分排列铁磁金属原子，可以加强磁信号。 纳米磁头可与信号控制器组合，从而形成纳米磁头装置。

公开(公告)号：US06528785B1

公开(公告)日：2003-03-04

申请号：US09601668

申请日：2000-08-03

Applicant: Yoshikazu Nakayama ,  Akio Harada ,  Seiji Akita

Inventor： Yoshikazu Nakayama ,  Akio Harada ,  Seiji Akita

IPC: G21K700

CPC classification number: G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12 ,  Y10S977/869 ,  Y10S977/873 ,  Y10S977/876

Abstract: The fusion-welded nanotube surface signal probe of the present invention is constructed from a nanotube, a holder which holds the nanotube, a fusion-welded part fastening a base end portion of the nanotube to a surface of the holder by fusion-welding, a tip end portion of the nanotube being caused to protrude from the holder; and the tip end portion is used as a probe needle so as to scan surface signals. This fusion-welded nanotube surface signal probe can be used as a probe in AFM (Atomic Force Microscope), STM (Scanning Tunneling Microscope), other SPM (Scanning Probe icroscope) and so on.

Abstract translation: 本发明的融合熔融纳米管表面信号探针由纳米管，保持纳米管的保持体，通过熔融将纳米管的基端部固定在保持体的表面的熔接部构成， 导致纳米管的前端部从保持器突出; 并且使用尖端部作为探针，以扫描表面信号。 该熔焊纳米管表面信号探头可用作AFM（原子力显微镜），STM（扫描隧道显微镜），其他SPM（扫描探针显微镜）等中的探针。

公开(公告)号：US06477132B1

公开(公告)日：2002-11-05

申请号：US09373227

申请日：1999-08-12

Applicant: Hiroo Azuma ,  Kiyoshi Takimoto ,  Takehiko Kawasaki ,  Yasuhiro Shimada ,  Takeo Yamazaki

Inventor： Hiroo Azuma ,  Kiyoshi Takimoto ,  Takehiko Kawasaki ,  Yasuhiro Shimada ,  Takeo Yamazaki

IPC: G11B700

CPC classification number: G11B9/14 ,  B82Y10/00 ,  G11B9/02 ,  G11B9/08 ,  G11B9/1409 ,  G11B9/1418 ,  Y10S977/873

Abstract: Probe including a cantilever having a movable end and formed from an elastic body, an electroconductive sensing needle arranged at the movable end of the cantilever, and a field effect transistor arranged at the movable end of the cantilever and having a gate electrode electronically connected to the electroconductive sensing needle. The probe may further comprise another field effect transistor formed on the cantilever and having its drain electrically connected to the sensing needle. The probe may be used in an information recording/reproduction apparatus.

Abstract translation: 探头包括具有可移动端并由弹性体形成的悬臂，布置在悬臂的可动端的导电感测针，以及布置在悬臂的可动端的场效应晶体管，并且具有电连接到该悬臂的栅电极 导电感应针。 探针还可以包括形成在悬臂上并且其漏极电连接到感测针的另一场效应晶体管。 探针可以用在信息记录/再现装置中。