公开(公告)号：US07064542B2

公开(公告)日：2006-06-20

申请号：US11172663

申请日：2005-07-01

申请人： Mark B. Johnson ,  Michael Miller ,  Brian Bennett

发明人： Mark B. Johnson ,  Michael Miller ,  Brian Bennett

IPC分类号： G01R33/07

CPC分类号： G01R33/07 ,  Y10S977/853 ,  Y10S977/865

摘要： A modified hybrid Hall effect device is provided which is the combination of a conventional Hall effect device and a second Hall effect device having a Hall plate coupled to a ferromagnetic layer. The hybrid Hall effect device can be used to determine the independent magnetic field vector components comprising a vector magnetic field, such as for determining the x and the z components of a magnetic field, or for measuring the total magnitude of a vector magnetic field of any orientation. The modified Hall Effect device can be adapted for use as a magnetic field sensor for the detection of macroscopic objects that have associated magnetic fields, or for microscopic objects that have been tagged by microscopic magnetic particles. In one specific form, a plurality of hybrid Hall devices are electrically connected together to form an array in which a plurality of rows of hybrid Hall devices are electrically coupled to each other along a current axis, and the array is used for the detection of microscopic objects.

摘要翻译： 提供了一种改进的混合霍尔效应装置，它是常规霍尔效应装置和具有耦合到铁磁层的霍尔板的第二霍尔效应装置的组合。 可以使用混合霍尔效应装置来确定包括矢量磁场的独立磁场矢量分量，例如用于确定磁场的x和z分量，或用于测量任意的矢量磁场的总大小 方向。 修改的霍尔效应装置可以适用于用于检测具有相关磁场的宏观物体的磁场传感器，或用于由微观磁性颗粒标记的微观物体。 在一个具体形式中，多个混合霍尔器件电连接在一起以形成阵列，其中多行混合霍尔器件沿着电流轴彼此电耦合，并且该阵列用于微观检测 对象

公开(公告)号：US06836112B2

公开(公告)日：2004-12-28

申请号：US10414997

申请日：2003-04-16

申请人： Michael J. Hennessy

发明人： Michael J. Hennessy

IPC分类号： G01V300

CPC分类号： G01Q60/52 ,  G01R33/5604 ,  Y10S977/865

摘要： Magnetic resonance force microscopy (MRFM) is a technology capable of detecting the magnetic resonance of a small number of spins and, potentially, a single spin of an electron or nucleus. Most methods use soft cantilevers with microscopic dimensions (microns) which have been developed for atomic force microscopy. Cantilevers have been both a solution and problem of high sensitivity force detection. They are difficult to fabricate and it is difficult to achieve the right sensitivity and stiffness with them. The proposed invention eliminates the cantilever and replaces it with small, magnetically sensitive objects called birdies, which are manipulated above a sample using electromagnetic field control. The basic principles of the cantilever-free MRFM are the same as those of traditional, cantilever-based systems. Motion of the birdie induced by magnetic resonance is monitored using optical interferometry. The magnetic resonance force microscope should have application in both material and biological research at the nanoscale level.

摘要翻译： 磁共振力显微镜（MRFM）是一种能够检测少量旋转的磁共振和潜在的电子或核的单次旋转的技术。 大多数方法使用具有微观尺寸（微米）的软悬臂，其已经用于原子力显微镜。 悬臂已经是高灵敏度力检测的一个解决方案和问题。 它们难以制造，难以实现正确的灵敏度和刚度。 所提出的发明消除了悬臂，并且用小的磁敏感物体（称为小鸟）代替它们，其使用电磁场控制在样品上方被操纵。 无悬臂式MRFM的基本原理与传统的基于悬臂系统的基本原理相同。 使用光学干涉法监测由磁共振引起的小鸟的运动。 磁共振力显微镜应适用于纳米尺度的材料和生物学研究。

公开(公告)号：US06735046B2

公开(公告)日：2004-05-11

申请号：US09990259

申请日：2001-11-21

申请人： Yoshikazu Nakayama ,  Akio Harada

发明人： Yoshikazu Nakayama ,  Akio Harada

IPC分类号： G11B5127

CPC分类号： B82Y10/00 ,  G11B5/127 ,  G11B5/48 ,  G11B5/54 ,  G11B5/58 ,  G11B5/581 ,  G11B2005/0002 ,  G11B2005/0005 ,  Y10S977/863 ,  Y10S977/865 ,  Y10S977/873 ,  Y10S977/876 ,  Y10S977/932

摘要： A nano-magnetic head for inputting and outputting magnetic signals with nano-region precision on a magnetic recording medium such as magnetic tapes, magnetic cards, magnetic disks, magnetic drums, etc. The nano-magnetic head uses a nanotube with its base end portion fastened to a holder that is at an end of an AFM cantilever. The tip end portion of the nanotube protrudes from the holder, and a nanocoil is wound around the outer circumference of the tip end portion of the nanotube so that signals are inputted and outputted at both ends of the nanocoil. By way of lining up ferromagnetic metal atoms in the hollow portion of the nanotube, it is possible to strengthen the magnetic signal. The nano-magnetic head is combinable with a signal controller, thus forming a nano-magnetic head device.

摘要翻译： 一种用于在诸如磁带，磁卡，磁盘，磁鼓等的磁记录介质上输入和输出具有纳米区域精度的磁信号的纳米磁头。纳米磁头使用其基端部分的纳米管 紧固在AFM悬臂末端的支架上。 纳米管的前端部从保持器突出，纳米线卷绕在纳米管的前端部的外周，使得在纳米线的两端输入信号。 通过在纳米管的中空部分排列铁磁金属原子，可以加强磁信号。 纳米磁头可与信号控制器组合，从而形成纳米磁头装置。

公开(公告)号：US06605941B2

公开(公告)日：2003-08-12

申请号：US09811771

申请日：2001-03-20

申请人： Masayuki Abe

发明人： Masayuki Abe

IPC分类号： G01R3312

CPC分类号： G01Q20/04 ,  G01Q20/02 ,  G01Q60/50 ,  G11B5/455 ,  Y10S977/852 ,  Y10S977/865

摘要： An apparatus for measuring a characteristic of a specimen, includes a probe for scanning a surface of the specimen in a noncontacting state, a vibrating unit for vibrating the probe, an excitation field generating unit for generating an amplitude modulation signal which is amplitude-modulated with a modulation frequency and a carrier frequency and producing an excitation field at the surface of the specimen on the basis of the generated amplitude modulation signal, and a measuring unit for measuring a force interaction between the probe and the specimen caused by the excitation field generated at the surface of the specimen.

摘要翻译： 一种用于测量样本特征的装置，包括用于在非接触状态下扫描样本表面的探针，用于振动探针的振动单元，用于产生振幅调制信号的激励场产生单元，该振幅调制信号用 调制频率和载波频率，并且基于所生成的幅度调制信号在所述样本的表面产生激励场;以及测量单元，用于测量由所述探测器和所述样本之间产生的激励场所产生的力相互作用 样品表面。

公开(公告)号：US06486654B1

公开(公告)日：2002-11-26

申请号：US09562558

申请日：2000-05-02

申请人： Hans Josef Hug ,  Petrus Johannes Antonius Van Schendel

发明人： Hans Josef Hug ,  Petrus Johannes Antonius Van Schendel

IPC分类号： G01R3500

CPC分类号： G01Q60/50 ,  G01Q40/00 ,  G01R33/0385 ,  G11B9/14 ,  Y10S977/865

摘要： A method for calibrating magnetic force microscopes (MFM) or scanning Hall probe microscopes (SHPM) is disclosed, wherein an instrument response function IRF is determined for correcting arbitrary raw MFM- or SHPM-images Si. According to one aspect of the invention a sample with an irregular magnetization pattern M over an extended area is provided, a raw MFM- or SHPM-image S is measured, an approximate sample magnetization pattern M0 and therefrom an approximate magnetic stray field distribution H0 are determined and an instrument response function IRF is calculated using the raw MFM- or SHPM-image S and the approximate magnetic stray field distribution H0. Other aspects of the calibration method consist in that the instrument response function IRF is calculated in Fourier space as IRF(k)=S(k)H0(k) and/or that averages or iterative calculations of instrument response functions IRFj (j=1 . . . m) are performed. Preferably a tip calibration function qtip (k), characterizing the magnetic stray field distribution of the tip of a magnetic force microscope (MFM), is derived from the IRF by eliminating cantilever effects caused by tilt and mechanical properties of the cantilever.

摘要翻译： 公开了用于校准磁力显微镜（MFM）或扫描霍尔探针显微镜（SHPM）的方法，其中确定用于校正任意原始MFM-或SHPM图像Si的仪器响应函数IRF。 根据本发明的一个方面，提供了在扩展区域上具有不规则磁化模式M的样本，测量原始MFM或SHPM图像S，近似采样磁化模式M0及其近似磁性杂散场分布H0为 使用原始MFM或SHPM图像S和近似磁性杂散场分布H0计算仪器响应函数IRF。 校准方法的其他方面包括仪器响应函数IRF在傅立叶空间中计算为IRF（k）= S（k）H0（k）和/或仪器响应函数IRFj（j = 1）的平均或迭代计算 ... m）。 优选地，通过消除由悬臂的倾斜和机械性质引起的悬臂效应，从IRF导出表征磁力显微镜（MFM）的尖端的磁性杂散场分布的尖端校准函数qtip（k）。

公开(公告)号：US20010038282A1

公开(公告)日：2001-11-08

申请号：US09811771

申请日：2001-03-20

发明人： Masayuki Abe

IPC分类号： G01R033/12 ,  G01R033/02

CPC分类号： G01Q20/04 ,  G01Q20/02 ,  G01Q60/50 ,  G11B5/455 ,  Y10S977/852 ,  Y10S977/865

摘要： An apparatus for measuring a characteristic of a specimen, includes a probe for scanning a surface of the specimen in a noncontacting state, a vibrating unit for vibrating the probe, an excitation field generating unit for generating an amplitude modulation signal which is amplitude-modulated with a modulation frequency and a carrier frequency and producing an excitation field at the surface of the specimen on the basis of the generated amplitude modulation signal, and a measuring unit for measuring a force interaction between the probe and the specimen caused by the excitation field generated at the surface of the specimen.

摘要翻译： 一种用于测量样本特征的装置，包括用于在非接触状态下扫描样本表面的探针，用于振动探针的振动单元，用于产生振幅调制信号的激励场产生单元，该振幅调制信号用 调制频率和载波频率，并且基于所生成的幅度调制信号在所述样本的表面产生激励场;以及测量单元，用于测量由所述探测器和所述样本之间产生的激励场所产生的力相互作用 样品表面。

公开(公告)号：US06297502B1

公开(公告)日：2001-10-02

申请号：US09258817

申请日：1999-02-26

申请人： Suzanne Philippa Jarvis ,  Mark Alfred Lantz ,  Urs Duerig

发明人： Suzanne Philippa Jarvis ,  Mark Alfred Lantz ,  Urs Duerig

IPC分类号： G01N1310

CPC分类号： G01Q10/065 ,  G01Q60/38 ,  Y10S977/851 ,  Y10S977/865

摘要： A method for controlling a force acting on a scanning probe of a cantilever by setting bandwidth of a feedback loop constituted by detecting minute displacement of the cantilever and controlling a force of the scanning probe to be greater than a primary resonant frequency of the cantilever.

摘要翻译： 通过设置通过检测悬臂的微小位移构成的反馈回路的带宽并且将扫描探针的力控制为大于悬臂的初级共振频率来控制作用在悬臂的扫描探针上的力的方法。

公开(公告)号：US5670712A

公开(公告)日：1997-09-23

申请号：US290091

申请日：1994-08-15

申请人： Jason Cleveland ,  Paul Hansma ,  William Ducker

发明人： Jason Cleveland ,  Paul Hansma ,  William Ducker

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01Q10/06 ,  G01Q20/00 ,  G01B5/28

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q20/00 ,  Y10S977/865 ,  Y10S977/872 ,  Y10S977/873

摘要： A method and apparatus of magnetic force control for a scanning probe, wherein a first magnetic source having a magnetic moment is provided on the scanning probe and a second magnetic source is disposed external to the scanning probe to apply a magnetic field in a direction other than parallel, and preferably perpendicular, to the orientation of the magnetic moment, from the second magnetic source to the first magnetic source to produce a torque related to the amplitude of the applied magnetic field acting on the probe. By controlling the amplitude of the applied magnetic field, the deflection of the scanning probe is maintained constant during scanning by the scanning probe. An output signal related to the amplitude of the magnetic field applied by the second magnetic source is produced and is indicative of a surface force applied to the probe. The invention can also be used to apply large forces during scanning for applications such as nanolithography or elasticity mapping.

摘要翻译： 一种用于扫描探针的磁力控制的方法和装置，其中在扫描探针上设有具有磁矩的第一磁源，并且第二磁源设置在扫描探针外部，以沿除了 平行且优选地垂直于从第二磁源到第一磁源的磁矩的取向，以产生与作用在探针上的施加的磁场的振幅相关的转矩。 通过控制所施加的磁场的幅度，扫描探针的扫描期间扫描探针的偏转保持恒定。 产生与由第二磁源施加的磁场的振幅相关的输出信号，并且指示施加到探针的表面力。 本发明还可用于在扫描期间施加大的力以用于诸如纳米光刻或弹性映射的应用。

公开(公告)号：US5612491A

公开(公告)日：1997-03-18

申请号：US553111

申请日：1995-11-07

申请人： Stuart M. Lindsay

发明人： Stuart M. Lindsay

IPC分类号： G01B5/28 ,  B81B3/00 ,  G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/38

CPC分类号： G01Q60/32 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/38 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/863 ,  Y10S977/865 ,  Y10S977/872 ,  Y10S977/873 ,  Y10S977/879 ,  Y10S977/881 ,  Y10S977/951

摘要： A thin film of a magnetic material is applied to one or both surfaces of a force sensing cantilever for use in a scanning force microscope. The cantilevers are then placed between the poles of an electromagnet and a magnetizing field applied in the direction of the soft axis of the cantilevers. The field is chosen so as to be bigger than the saturation field for the magnetic film.

摘要翻译： 将磁性材料的薄膜施加到用于扫描力显微镜的力感测悬臂的一个或两个表面上。 然后将悬臂放置在电磁体的磁极和施加在悬臂的软轴方向上的磁化场之间。 该场被选择为大于磁性膜的饱和场。

公开(公告)号：US5513518A

公开(公告)日：1996-05-07

申请号：US403238

申请日：1995-03-10

申请人： Stuart M. Lindsay

发明人： Stuart M. Lindsay

IPC分类号： G01B5/28 ,  B81B3/00 ,  G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/38

CPC分类号： G01Q60/32 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/38 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/863 ,  Y10S977/865 ,  Y10S977/872 ,  Y10S977/873 ,  Y10S977/879 ,  Y10S977/881 ,  Y10S977/951

摘要： In a scanning force microscope a thin film of a magnetic material is applied to one or both surfaces of a force sensing cantilever. The cantilevers are then placed between the poles of an electromagnet and a magnetizing field applied in the direction of the soft axis of the cantilevers. The field is chosen so as to be bigger than the saturation field for the magnetic film. A small electromagnet is placed in the housing of the microscope so as to generate a field normal to the soft axis of the cantilever. The field is generated by an ac voltage and causes a time varying force to be applied to the cantilever. The corresponding modulation of the cantilever position is sensed by reflection of a laser beam into a position sensitive detector. The magnitude and phase of this signal are determined by a synchronous detector. Images of the sample surface are made at constant force gradient by scanning the cantilever over the surface while adjusting the gap between the probe and sample so as to maintain a constant output from the synchronous detector.

摘要翻译： 在扫描力显微镜中，将磁性材料的薄膜施加到力感测悬臂的一个或两个表面。 然后将悬臂放置在电磁体的磁极和施加在悬臂的软轴方向上的磁化场之间。 该场被选择为大于磁性膜的饱和场。 将小电磁体放置在显微镜的壳体中，以产生垂直于悬臂的软轴的场。 该场由交流电压产生，并且引起时变力施加到悬臂。 通过将激光束反射到位置敏感检测器来检测悬臂位置的相应调制。 该信号的幅度和相位由同步检测器确定。 样品表面的图像通过扫描悬臂在表面上同时调整探头和样品之间的间隙，以恒定的力梯度制成，以保持来自同步检测器的恒定输出。