公开(公告)号：US06267005B1

公开(公告)日：2001-07-31

申请号：US09199634

申请日：1998-11-25

申请人： Amin Samsavar ,  William R. Wheeler ,  Steven G. Eaton ,  Jian-Ping Zhuang

发明人： Amin Samsavar ,  William R. Wheeler ,  Steven G. Eaton ,  Jian-Ping Zhuang

IPC分类号： G01B528

CPC分类号： G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

摘要翻译： 双级扫描仪器包括用于感测样品参数的传感器和用于引起传感器和样品之间的相对运动的粗细级和细级级的传感器。 粗糙度分辨率约为1微米，细微分辨率为1纳米或更好。 当传感器组件和样品之间产生相对运动时，传感器用于检测参数。 传感器可用于在检测到高度变化的同时检测样品表面的高度变化以及热变化，静电，磁性，光反射率或光传输参数。 通过以更粗糙的分辨率执行扫描，并且在固定的相对位置使用相同的探针尖端或两个探针尖端短扫描高分辨率，可以精确地相关联从长扫描和短扫描得到的数据。

公开(公告)号：US20070085002A1

公开(公告)日：2007-04-19

申请号：US11448565

申请日：2006-06-07

申请人： Yuan Yao ,  Chang-Hong Liu ,  Shou-Shan Fan

发明人： Yuan Yao ,  Chang-Hong Liu ,  Shou-Shan Fan

IPC分类号： G01N23/00

CPC分类号： G01K7/028 ,  G01K2211/00 ,  G01Q60/58 ,  G01Q70/12 ,  Y10S977/867 ,  Y10S977/876

摘要： A probe for a scanning thermal microscope includes a cantilever beam, an insulating layer, a conductive layer and a carbon nanotube. The cantilever beam includes a microtip at a distal end thereof, and the microtip has a conductive exterior portion with a pointed part. The insulating layer is formed on a part of the conductive exterior portion other than the pointed part thereof. The conductive layer is formed on the insulating layer and has a coupling portion in contact with the pointed part of the conductive exterior portion of the microtip, the coupling portion of the conductive layer and the pointed part of the conductive exterior portion thereby cooperatively form a thermocouple junction. The carbon nanotube has one end arranged on the thermocouple junction. The probe for a scanning thermal microscope increases spatial resolution of scanning thermal microscope and can prevent excessive current leakage.

摘要翻译： 用于扫描热显微镜的探针包括悬臂梁，绝缘层，导电层和碳纳米管。 悬臂梁在其远端包括微尖端，并且微尖端具有带尖部的导电外部部分。 绝缘层形成在除了其尖锐部分之外的导电外部部分的一部分上。 导电层形成在绝缘层上，并且具有与微尖端的导电外部部分的尖部接触的耦合部分，导电层的耦合部分和导电外部部分的尖端部分协同地形成热电偶 交界处 碳纳米管具有设置在热电偶结上的一端。 扫描热显微镜的探头增加了扫描热显微镜的空间分辨率，可以防止过大的电流泄漏。

公开(公告)号：US06518872B1

公开(公告)日：2003-02-11

申请号：US09951620

申请日：2001-09-14

申请人： Klaus Edinger ,  Ivaylo Rangelow

发明人： Klaus Edinger ,  Ivaylo Rangelow

IPC分类号： H01L304

CPC分类号： G01Q60/58 ,  Y10S977/867 ,  Y10S977/873

摘要： A resistant based thermal probe including a nanometer sized four-leg filament integrated with a piezoresistive AFM type cantilever is created by depositing the filament structure onto the cantilever by a chemical vapor deposition technique where the cantilever is exposed to the flux of precursor gas. An incident electron beam causes a fragmentation of the gas molecules leaving a deposit behind which leads to a conductive deposit shaped as a multi-leg filament structure for thermal measurements of a sample. A deposited four leg filament structure has a mechanical rigidity, high spatial resolution, low thermal conductivity and thermal capacitance, fast response time, and in combination with a four point resistant measurement and lock-in technique, eliminates resistivity for increasing both the temperature sensitivity and the signal-to-noise ratio of the thermal probe.

摘要翻译： 通过使用化学气相沉积技术将悬臂梁暴露于前体气体的通量的化学气相沉积技术，将长丝结构沉积到悬臂上，形成包括与压阻AFM型悬臂结合的纳米尺寸的四条腿细丝的基于电阻的热探针。 入射的电子束导致气体分子的断裂，留下沉积物，导致沉积物形成为多腿细丝结构的导电沉积物，用于样品的热测量。 沉积的四腿细丝结构具有机械刚性，高空间分辨率，低热导率和热电容，响应时间快，并结合四点电阻测量和锁定技术，消除了电阻率，提高温度灵敏度和 热探头的信噪比。

公开(公告)号：US06467951B1

公开(公告)日：2002-10-22

申请号：US09641871

申请日：2000-08-18

申请人： Uttam Shyamalindu Ghoshal

发明人： Uttam Shyamalindu Ghoshal

IPC分类号： G01N2500

CPC分类号： G01K7/02 ,  G01Q60/58 ,  G01R31/00 ,  Y10S977/852 ,  Y10S977/867

摘要： A method and apparatus for measuring and characterizing microscopic thermoelectric material samples using scanning microscopes. The method relies on concurrent thermal and electrical measurements using scanning thermal probes, and extends the applicability of scanning thermal microscopes (SThMs) to the characterization of thermoelectric materials. The probe makes use of two thermocouples to measure voltages at the tip and base of a cone tip of the probe. From these voltages, and from a voltage measured across the sample material, the Seebeck coefficient, thermal conductivity and resistance of the sample material can be accurately determined.

摘要翻译： 使用扫描显微镜测量和表征微观热电材料样品的方法和装置。 该方法依赖于使用扫描热探针的并行热和电测量，并且将扫描热显微镜（SThM）的适用性扩展到热电材料的表征。 探头使用两个热电偶来测量探头锥尖的尖端和底部的电压。 从这些电压和从样品材料两端测得的电压，可以准确地确定样品材料的塞贝克系数，热导率和电阻。

公开(公告)号：US20020110177A1

公开(公告)日：2002-08-15

申请号：US10074624

申请日：2002-02-13

申请人： YOSHIKAZU NAKAYAMA and DAIKEN CHEMICAL CO., LTD.

发明人： Yoshikazu Nakayama ,  Akio Harada

IPC分类号： G01N025/18 ,  G01K007/16 ,  G01K003/00

CPC分类号： G11B9/14 ,  G01Q60/40 ,  G01Q80/00 ,  G11B9/1409 ,  G11B11/007 ,  G11B2005/0021 ,  Y10S977/863 ,  Y10S977/867 ,  Y10S977/876

摘要： A heat emitting probe including a conductive nanotube probe needle with its base end fastened to a holder and its tip end protruded, a heat emitting body formed on the probe needle, a conductive nanotube lead wire fastened to the heat emitting body, and an electric current supply that causes an electric current to pass through the conductive nanotube lead wire and both ends of the probe needle. The tip end of the probe needle is thus heated by an electric current flowing through the heat emitting body. A heat emitting probe apparatus includes the above-described heat emitting probe, a scanning mechanism that allows the heat emitting probe to scan over a thermal recording medium, and a control circuit that causes the tip end of the probe needle to emit heat, thus recording extremely small hole patterns in the surface of a thermal recording medium.

摘要翻译： 一种发光探针，其包括导电性纳米管探针，其基端固定在保持器上，其前端突出，形成在探针上的发热体，固定在发热体上的导电性纳米管引线和电流 电流使电流通过导电性纳米管引线和探针的两端。 因此，探针的尖端由流过发热体的电流加热。 发光探针装置包括上述发热探头，允许热发射探头在热记录介质上扫描的扫描机构，以及使探针的顶端发热的控制电路，从而记录 在热记录介质的表面上的极小孔图案。

公开(公告)号：US6095679A

公开(公告)日：2000-08-01

申请号：US837547

申请日：1997-04-21

申请人： Azzedine Hammiche ,  Hubert Murray Montagu Pollock ,  Michael Reading ,  Mo Song

发明人： Azzedine Hammiche ,  Hubert Murray Montagu Pollock ,  Michael Reading ,  Mo Song

IPC分类号： G01N25/20 ,  G01N25/48 ,  G01Q60/58 ,  G01N25/18

CPC分类号： G01Q60/58 ,  B82Y35/00 ,  G01N25/4833 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/867 ,  Y10S977/869 ,  Y10S977/881 ,  Y10S977/957

摘要： A platinum/Rhodium resistance thermal probe is used as an active device which acts both as a highly localized heat source and as a detector to perform localized differential calorimetry, by thermally inducing and detecting events such as glass transitions, meltings, recystallizations and thermal decomposition within volumes of material estimated at a few .mu.m.sup.3. Furthermore, the probe is used to image variations in thermal conductivity and diffusivity, to perform depth profiling and sub-surface imaging. The maximum depth of the sample that is imaged is controlled by generating and detecting evanescent temperature waves in the sample.

摘要翻译： 使用铂/铑电阻热探针作为主动装置，其作为高度局部化的热源和作为检测器来执行局部差示量热法，通过热诱导和检测诸如玻璃化转变，熔融，再结晶和热分解之类的事件 材料量估计在几亩。 此外，探头用于对导热系数和扩散系数的变化进行成像，以进行深度剖面和次表面成像。 通过产生和检测样品中的ev逝温度波来控制成像样品的最大深度。

公开(公告)号：US4747698A

公开(公告)日：1988-05-31

申请号：US858320

申请日：1986-04-30

申请人： Hermantha K. Wickramasinghe ,  Clayton C. Williams

发明人： Hermantha K. Wickramasinghe ,  Clayton C. Williams

IPC分类号： G01B7/34 ,  G01B15/00 ,  G01B15/08 ,  G01B21/20 ,  G01N25/72 ,  G01N37/00 ,  G01Q60/58 ,  G01N25/00

CPC分类号： G01Q60/58 ,  B82Y35/00 ,  G01N25/72 ,  Y10S977/852 ,  Y10S977/867

摘要： Apparatus is provided for investigating surface structures irrespective of the materials involved. A fine scanning tip is heated to a steady state temperature at a location remote from the structure to be investigated. Thereupon, the scanning tip is moved to a position proximate to, but spaced from the structure. At the proximate position, the temperature variation from the steady state temperature is detected. The scanning tip is scanned across the surface sturcture with the aforesaid temperature variation maintained constant. Piezo electric drivers move the scanning tip both transversely of, and parallel to, the surface structure. Feedback control assures the proper transverse positioning of the scanning tip and voltages thereby generated replicate the surface structure to be investigated.

摘要翻译： 提供了用于调查表面结构的装置，而不管涉及的材料如何。 在远离待研究的结构的位置处将精细的扫描尖端加热到稳态温度。 于是，扫描尖端被移动到靠近但与结构隔开的位置。 在接近的位置，检测到来自稳态温度的温度变化。 扫描尖端在表面结构上扫描，上述温度变化保持恒定。 压电电动驱动器将扫描尖端横向并平行于表面结构。 反馈控制确保了扫描尖端的正确的横向定位，从而产生的电压复制了待研究的表面结构。

公开(公告)号：US20010047682A1

公开(公告)日：2001-12-06

申请号：US09900806

申请日：2001-07-06

发明人： Amin Samsavar ,  William R. Wheeler ,  Steven G. Eaton

IPC分类号： G01B005/28

CPC分类号： G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

公开(公告)号：US20010040456A1

公开(公告)日：2001-11-15

申请号：US09852177

申请日：2001-05-10

申请人： NEC CORPORATION

发明人： Hiroaki Kikuchi

IPC分类号： G01R031/08

CPC分类号： G01R31/281 ,  G01R31/308 ,  Y10S977/867

摘要： In a method for detecting a line-short between conductive layers, a potential (or temperature) distribution of the conductive layers is detected while applying a DC voltage thereto.

摘要翻译： 在用于检测导电层之间的线路短路的方法中，在向其施加直流电压的同时检测导电层的电位（或温度）分布。

公开(公告)号：US06200022B1

公开(公告)日：2001-03-13

申请号：US09224600

申请日：1998-12-31

申请人： Azzedine Hammiche ,  Hubert Murray Montague-Pollock ,  Michael Reading

发明人： Azzedine Hammiche ,  Hubert Murray Montague-Pollock ,  Michael Reading

IPC分类号： G01N2520

CPC分类号： G01Q60/58 ,  A61B18/149 ,  A61B2018/00589 ,  A61B2018/00601 ,  A61B2018/00607 ,  G01N3/60 ,  G01N25/4833 ,  G01N25/72 ,  G01N2203/0051 ,  G01N2203/0286 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/867 ,  Y10S977/881

摘要： A system and method for performing localized mechanothermal analysis with scanning probe microscopy (“MASM”) is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample is created. A localized region of the sample is selected from the image. Using a scanning microscope, an active or passive thermal probe is positioned at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.

摘要翻译： 公开了一种使用扫描探针显微镜（“MASM”）进行局部机械温度分析的系统和方法。 在优选实施例中，产生样品的表面或次表面的图像。 从图像中选择样本的局部区域。 使用扫描显微镜，主动或被动热探针位于所选区域。 温度斜坡应用于局部区域。 此外，动态或调制的应力或应变施加到局部区域。 收集并处理由施加的温度和应力或应变产生的力数据，以产生所选择的局部区域的动态机械和/或量热特性的图表或指纹图。