Method and apparatus for high spatial resolution spectroscopic microscopy
    3.
    发明授权
    Method and apparatus for high spatial resolution spectroscopic microscopy 有权
    高分辨率光谱显微镜的方法和装置

    公开(公告)号:US06260997B1

    公开(公告)日:2001-07-17

    申请号:US09178349

    申请日:1998-10-23

    Abstract: A sample and a scanning probe microscope system are used as the detector for an infrared spectrometer to circumvent the diffraction limit of conventional infrared microscopy, and to provide spectroscopic images with a greatly improved spatial resolution, potentially as low as a few tens of nanometers. The beam from an infrared spectrometer is directed at the sample. The sample is heated to the extent that it absorbs infrared radiation. Thus the resulting temperature rise of an individual region depends upon the particular molecular species present, as well as the range of wavelengths of the infrared beam. These individual temperature differences are detected by a miniature thermal probe. The thermal probe is mounted in a scanning thermal microscope. The scanning thermal microscope is then operated used to produce multiple surface and sub-surface images of the sample, such that the image contrast corresponds to variations in either thermal diffusivity, surface topography or chemical composition.

    Abstract translation: 使用样品和扫描探针显微镜系统作为红外光谱仪的检测器以避免常规红外显微镜的衍射极限,并提供可能低至几十纳米的大大改善的空间分辨率的光谱图像。 来自红外光谱仪的光束被引导到样品。 将样品加热到其吸收红外辐射的程度。 因此,单个区域的所得温度升高取决于存在的特定分子种类以及红外光束的波长范围。 这些单独的温度差通过微型热探测器检测。 热探头安装在扫描热显微镜中。 然后扫描热显微镜用于产生样品的多个表面和亚表面图像,使得图像对比度对应于热扩散率,表面形貌或化学组成的变化。

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