公开(公告)号：US11415597B2

公开(公告)日：2022-08-16

申请号：US16963917

申请日：2019-01-22

Applicant: Lehigh University

Inventor： Haomin Wang ,  Xiaoji Xu

IPC: G01Q60/06 ,  G01Q60/22 ,  G01Q60/18

Abstract: Systems, apparatuses, and methods for realizing a peak-force scattering scanning near-field optical microscopy (PF-SNOM). Conventional scattering-type microscopy (s-SNOM) techniques uses tapping mode operation and lock-in detections that do not provide direct tomographic information with explicit tip-sample distance. Using a peak force scattering-type scanning near-field optical microscopy with a combination of peak force tapping mode and time-gated light detection, PF-SNOM enables direct sectioning of vertical near-field signals from a sample surface for both three-dimensional near-field imaging and spectroscopic analysis. PF-SNOM also delivers a spatial resolution of 5 nm and can simultaneously measure mechanical and electrical properties together with optical near-field signals.

公开(公告)号：US10429411B2

公开(公告)日：2019-10-01

申请号：US15928790

申请日：2018-03-22

Applicant: Hitachi, Ltd.

Inventor： Kaifeng Zhang ,  Shinichi Taniguchi

IPC: G01Q60/18 ,  G01Q60/22 ,  G01Q70/12 ,  B82Y15/00 ,  B82Y30/00 ,  B82Y40/00 ,  G01N21/65 ,  C01B32/18

Abstract: A near-field scanning probe includes: a measurement probe that relatively scans a test sample; an excitation light irradiation system; a near-field light generation system that generates near-field light in a region including the measurement probe in response to irradiation with excitation light from the excitation light irradiation system; and a scattered light detection system that detects Rayleigh scattering and Ramen scattered light of the near-field light from the sample, generated between the measurement probe and the sample, and the near-field scanning probe is characterized in that the near-field light generation system includes a cantilever with a chip coated with a noble metal, and a tip of the chip is provided with a thin wire group including a plurality of carbon nanowires with a noble metal provided at ends thereof.

公开(公告)号：US20180372776A1

公开(公告)日：2018-12-27

申请号：US15928790

申请日：2018-03-22

Applicant: Hitachi, Ltd.

Inventor： Kaifeng ZHANG ,  Shinichi TANIGUCHI

IPC: G01Q60/18

CPC classification number: G01Q60/18 ,  C01B32/18 ,  G01N21/65 ,  G01N2021/656 ,  G01Q60/22 ,  G01Q70/12

Abstract: A near-field scanning probe includes: a measurement probe that relatively scans a test sample; an excitation light irradiation system; a near-field light generation system that generates near-field light in a region including the measurement probe in response to irradiation with excitation light from the excitation light irradiation system; and a scattered light detection system that detects Rayleigh scattering and Ramen scattered light of the near-field light from the sample, generated between the measurement probe and the sample, and the near-field scanning probe is characterized in that the near-field light generation system includes a cantilever with a chip coated with a noble metal, and a tip of the chip is provided with a thin wire group including a plurality of carbon nanowires with a noble metal provided at ends thereof.

公开(公告)号：US20180059137A1

公开(公告)日：2018-03-01

申请号：US15249433

申请日：2016-08-28

Applicant: Craig Prater

Inventor： Craig Prater

IPC: G01Q60/18

CPC classification number: G01Q60/18 ,  G01Q30/02 ,  G01Q60/06 ,  G02B21/002

Abstract: Systems and methods that enable both spectroscopy and rapid chemical and/or optical imaging using a broadband light source. Broadband light sources may be advantageous for spectroscopy as they simultaneously illuminate a sample with a plurality of wavelengths and use interferometric techniques to determine a material response as a function of wavelength (or equivalently wavenumber). Some embodiments may enable the same radiation sources to be used to efficiently map the spatial distribution of chemical species or optical property variations. This may be achieved via selection of specific optical phase delays within an interferometer that are selected to maximize the contrast between different absorption bands or resonances within the sample. By optimally selecting specific interferometer phases it may be possible to construct images that substantially represent the material response to a specific wavelength excitation, without the necessity to obtain entire spectra at each sample location. This can provide orders of magnitude improvements in the measurement speed for required with a broadband source to provide compositional/optical property mapping.

公开(公告)号：US09658247B2

公开(公告)日：2017-05-23

申请号：US14634859

申请日：2015-03-01

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01Q20/02 ,  G01N21/47

CPC classification number: G01Q60/18 ,  G01N21/47 ,  G01Q20/02

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

公开(公告)号：US20160018437A1

公开(公告)日：2016-01-21

申请号：US14773135

申请日：2014-03-14

Applicant: Gregory ANDREEV ,  Sergey OSECHINSKIY ,  Stephen MINNE ,  Chanmin SU ,  Bruker Nano, Inc.

Inventor： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

IPC: G01Q60/18

CPC classification number: G01Q30/04 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22

Abstract: Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and optionally, in the mid-infrared portion of the spectrum.

Abstract translation: 用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感 场相互作用。 通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。 测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。 仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。 纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。

公开(公告)号：US20140184776A1

公开(公告)日：2014-07-03

申请号：US14063492

申请日：2013-10-25

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Hyeon-Bong PYO

IPC: G02B21/08 ,  G01Q60/18 ,  G01Q60/10 ,  G02B21/36

CPC classification number: G02B21/362 ,  G01Q60/22 ,  G02B21/10

Abstract: Provided is a micro or nano scope. The micro or nano scope includes a prism, a optical detection system detecting an image from a sample on the prism, and a light guiding system providing incident light to the prism, the light guiding system changing an incident angle of the incident light incident into the prism.

Abstract translation: 提供了一个微或纳米的范围。 微型或纳米镜包括棱镜，检测来自棱镜上的样品的图像的光学检测系统以及向棱镜提供入射光的导光系统，该光导系统改变入射到该棱镜的入射光的入射角 棱镜

公开(公告)号：US08695109B2

公开(公告)日：2014-04-08

申请号：US13270700

申请日：2011-10-11

Applicant: John C. Schotland ,  Alexander A. Govyadinov ,  George Y. Panasyuk

Inventor： John C. Schotland ,  Alexander A. Govyadinov ,  George Y. Panasyuk

IPC: G01Q60/18

CPC classification number: G01Q60/18

Abstract: A system and method for optically imaging a sample. The method and system uses a controlled scatterer of light positioned in the near field of a sample. The extinguished power from an incident field, which illuminates both the sample and the controlled scatterer, is then measured as a function of the controlled scatterer position and is used to mathematically reconstruct an image of the sample.

Abstract translation: 用于对样品进行光学成像的系统和方法。 该方法和系统使用位于样品的近场中的受控的光散射体。 然后根据受控散射体位置的函数测量来自照射样品和受控散射体的入射场的熄灭功率，并用于数学重建样品的图像。

公开(公告)号：US20130145507A1

公开(公告)日：2013-06-06

申请号：US13586754

申请日：2012-08-15

Applicant: Toshihiko NAKATA ,  Masahiro WATANABE ,  Takashi INOUE ,  Kishio HIDAKA ,  Motoyuki HIROOKA

Inventor： Toshihiko NAKATA ,  Masahiro WATANABE ,  Takashi INOUE ,  Kishio HIDAKA ,  Motoyuki HIROOKA

IPC: G01Q60/18

CPC classification number: G01Q60/18 ,  G01Q60/22

Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

Abstract translation: 在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。 在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。 此外，通过探针的损伤或磨损，测量再现性被严重降低。 可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品 通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

公开(公告)号：US08332960B2

公开(公告)日：2012-12-11

申请号：US12441267

申请日：2007-09-14

Applicant: Tilman Schäffer ,  Matthias Böcker ,  Boris Anczykowski

Inventor： Tilman Schäffer ,  Matthias Böcker ,  Boris Anczykowski

IPC: G01Q60/18

CPC classification number: G01Q30/14 ,  G01Q20/02 ,  G01Q60/22 ,  G01Q60/44

Abstract: A device for scanning the surface of a sample which is covered with a liquid, comprising a probe which has a tip at one end, means for moving the probe and the sample relative to one another a light source focussing device which focuses light from the light source onto a location in the area of the tip located in the liquid and a detector for detecting light which was scattered by the tip, wherein a boundary surface at which the light enters the liquid is located on the light path between the light source and the tip, wherein the boundary surface is positionally fixed with respect to the probe.

Abstract translation: 一种用于扫描被液体覆盖的样品的表面的装置，包括在一端具有尖端的探针，用于相对于彼此移动探针和样品的装置，用于聚焦来自光的光源聚焦装置 源到位于液体中的尖端区域中的位置和用于检测由尖端散射的光的检测器，其中光进入液体的边界面位于光源和光源之间的光路上 尖端，其中所述边界表面相对于所述探针位置固定。