Invention Grant
- Patent Title: Near field scanning probe microscope, probe for scanning probe microscope, and sample observation method
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Application No.: US15928790Application Date: 2018-03-22
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Publication No.: US10429411B2Publication Date: 2019-10-01
- Inventor: Kaifeng Zhang , Shinichi Taniguchi
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2017-121232 20170621
- Main IPC: G01Q60/18
- IPC: G01Q60/18 ; G01Q60/22 ; G01Q70/12 ; B82Y15/00 ; B82Y30/00 ; B82Y40/00 ; G01N21/65 ; C01B32/18

Abstract:
A near-field scanning probe includes: a measurement probe that relatively scans a test sample; an excitation light irradiation system; a near-field light generation system that generates near-field light in a region including the measurement probe in response to irradiation with excitation light from the excitation light irradiation system; and a scattered light detection system that detects Rayleigh scattering and Ramen scattered light of the near-field light from the sample, generated between the measurement probe and the sample, and the near-field scanning probe is characterized in that the near-field light generation system includes a cantilever with a chip coated with a noble metal, and a tip of the chip is provided with a thin wire group including a plurality of carbon nanowires with a noble metal provided at ends thereof.
Public/Granted literature
- US20180372776A1 Near Field Scanning Probe Microscope, Probe for Scanning Probe Microscope, and Sample Observation Method Public/Granted day:2018-12-27
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