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公开(公告)号：US11703523B2
公开(公告)日：2023-07-18
申请号：US17381195
申请日：2021-07-21
发明人： Wei-Shan Hu , Dong Gui , Jang-Jung Lee
摘要： A method of detecting a ferroelectric signal from a ferroelectric film and a piezoelectric force microscopy (PFM) apparatus are provided. The method includes following steps. An input waveform signal is applied to the ferroelectric film. An atomic force microscope probe scans over a surface of the ferroelectric film to measure a surface topography of the ferroelectric film. A deflection of the atomic force microscope probe is detected when the input waveform signal is applied to the ferroelectric film to generate a deflection signal. Spectrum data of the ferroelectric film based on the deflection signal is generated. The spectrum data of the ferroelectric film is analyzed to determine whether the spectrum data of the ferroelectric film is a ferroelectric signal or a non-ferroelectric signal.
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2.发明申请公开(公告)号：US20180330918A1
公开(公告)日：2018-11-15
申请号：US15974176
申请日：2018-05-08
申请人： NANOWEAR INC.
发明人： Vijay Varadan , Pratyush Rai , Gyanesh Mathur
CPC分类号： H01J37/28 , B82Y35/00 , G01Q30/02 , G01Q30/04 , G01Q60/30 , G01Q60/42 , H01J37/20 , H01J2237/2803 , H01J2237/2814
摘要： A system and method is provided for of characterizing nanostructured surfaces. A nanostructure sample is placed in an SEM chamber and imaged. The system and method locates one of the nanostructures using images from the SEM imaging, excises a top portion of the nanostructure, places said top portion on a substrate such that the nanostructures are perpendicular to the substrate and a base of the top portion contacts the substrate, performs high energy ion beam assisted deposition of metal at the base to attach the top portion to the substrate, SEM imaging the top portions in the SEM chamber, determining coordinates of the top portions relative to the substrate from the SEM imaging of the top portions, placing the substrate in an AFM chamber, and performing AFM imaging of the top portions using the coordinates previously determined.
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公开(公告)号：US09823208B2
公开(公告)日：2017-11-21
申请号：US15084976
申请日：2016-03-30
摘要： A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.
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公开(公告)号：US20160313367A1
公开(公告)日：2016-10-27
申请号：US15137937
申请日：2016-04-25
申请人： Bruker Nano, Inc.
发明人： Yan Hu , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q20/00
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和力学性能测绘，该模式可以在不同的环境中工作，包括气态，流体和真空。
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5.发明申请公开(公告)号：US20160290945A1
公开(公告)日：2016-10-06
申请号：US15084976
申请日：2016-03-30
摘要： A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.
摘要翻译： 一种方法包括：通过在使样本与样品的表面接触的同时在与所述表面平行的X和Y方向上相对扫描所述样品的表面来除去形成在所述样品表面上的至少一部分氧化物; 通过使所述探针与所述样品的表面接触来检测信号，所述样品的表面在X方向或Y方向上的预定检测位置处除去所述氧化物的至少一部分，同时向所述样品施加偏置电压; 基于该信号计算扩展电阻值; 并且使所述探针缩回以使所述探针在垂直于所述表面的Z方向上相对远离所述表面远离所述探针，同时相对地将所述探针移动到下一个检测位置以开始从所述下一个检测位置扫描所述样品。
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公开(公告)号：US20160252545A1
公开(公告)日：2016-09-01
申请号：US15054382
申请日：2016-02-26
申请人： Xallent, LLC
发明人： Kwame Amponsah
CPC分类号： G01Q20/02 , G01Q10/045 , G01Q20/04 , G01Q30/025 , G01Q60/04 , G01Q60/30 , G01Q70/06
摘要： Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.
摘要翻译： 使用多个集成尖端扫描探针显微镜来表征样品的装置和系统。 多个集成提示（MiT）探针由两个或多个单片集成和可移动的AFM尖端组成，位于彼此的nm内，在真空或环境条件下实现了前所未有的微纳米级探测功能。 尖端结构与提供无激光高分辨率电气输出启动和感测能力的电容梳结构组合，并与用于信号放大和低噪声操作的结型场效应晶体管的新颖集成。 这种“片上平台”方法是相对于基于使用支架的激光器，纳米定位器和电子装置的功能化功能化的单一技巧的当前技术的范式转变。
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公开(公告)号：US20160231353A1
公开(公告)日：2016-08-11
申请号：US15015067
申请日：2016-02-03
申请人： DCG Systems, Inc.
IPC分类号： G01Q60/30
CPC分类号： G01Q60/30
摘要： Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.
摘要翻译： 使用局部电位驱动探头将导体驱动到已知电位，而相邻线路通过样品体接地，从而减少来自相邻线路的静电扫描显微镜信号，从而允许样品中金属线的成像更深。 通过使用多个局部电位驱动探针在不同的导线上本地提供不同的电位，允许不同的导体在相同的图像中突出显示，例如通过改变施加于不同的局部电位驱动探针的信号的相位。
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公开(公告)号：US09410983B2
公开(公告)日：2016-08-09
申请号：US14194465
申请日：2014-02-28
发明人： Hideo Shinomiya , Jun Hirota , Kazunori Harada , Moto Yabuki
摘要： A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.
摘要翻译： 扫描探针显微镜包括其上安装有样品的台，配置成测量样品特性的探针，以及控制器，其被配置为在测量所述样品的特性的测量期间沿着扫描轨迹相对于彼此移动所述探针和所述台 例子。 扫描轨迹包括多个线性段，其中每对相邻的线段形成90度或更小的角度。
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9.发明申请DETERMATION OF LOCAL CONTACT POTENTIAL DIFFERENCE BY NONCONTACT ATOMIC FORCE MICROSCOPY 有权通过非接触原子力显微镜测定局部接触潜在差异公开(公告)号：US20160223583A1
公开(公告)日：2016-08-04
申请号：US15059371
申请日：2016-03-03
发明人： Leo Gross , Gerhard Meyer , Bruno Schuler , Wolfram Steurer
CPC分类号： G01Q60/30 , G01Q30/06 , G01Q60/32 , G01R19/0084
摘要： A method for determining a value of a local contact potential difference by noncontact atomic force microscopy. For one or more cantilever positions above a surface of a sample: i) determining two distinct voltage values of DC voltage applied between an oscillating cantilever and the sample, and ii) determining, by one or more processors, a value of a local contact potential difference based, at least in part, on the two distinct voltage values that were determined.
摘要翻译： 一种通过非接触式原子力显微镜测定局部接触电位差的值的方法。 对于样品表面上方的一个或多个悬臂位置：i）确定施加在振荡悬臂与样品之间的DC电压的两个不同的电压值，以及ii）由一个或多个处理器确定局部接触电位的值 至少部分地基于所确定的两个不同电压值的差异。
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10.发明授权Method and means for coupling high-frequency energy to and/or from the nanoscale junction of an electrically-conductive tip with a semiconductor 有权将高频能量耦合到和/或从导电尖端与半导体的纳米级结结合的方法和装置公开(公告)号：US09075081B2
公开(公告)日：2015-07-07
申请号：US14223727
申请日：2014-03-24
申请人： Mark J. Hagmann
发明人： Mark J. Hagmann
摘要： A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion.
摘要翻译： 用于将高频能量，特别是用于微波电路的高频能量耦合到纳米级结的方法包括将偏置T置于扫描探针显微镜的尖端和样品回路外部，并将分析的半导体的样品的一部分连接到 同轴电缆的外屏蔽层，以便以最少的样品参与来完成电路。 偏置T分支到高频和低频电路，两者均已完成，并且至少高频电路不依赖于器具或其他结构的接地来完成所述完成。
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