公开(公告)号：US20160231353A1

公开(公告)日：2016-08-11

申请号：US15015067

申请日：2016-02-03

申请人： DCG Systems, Inc.

发明人： Andrew Norman Erickson ,  Stephen Bradley Ippolito ,  Sean Zumwalt

IPC分类号： G01Q60/30

CPC分类号： G01Q60/30

摘要： Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.

摘要翻译： 使用局部电位驱动探头将导体驱动到已知电位，而相邻线路通过样品体接地，从而减少来自相邻线路的静电扫描显微镜信号，从而允许样品中金属线的成像更深。 通过使用多个局部电位驱动探针在不同的导线上本地提供不同的电位，允许不同的导体在相同的图像中突出显示，例如通过改变施加于不同的局部电位驱动探针的信号的相位。

公开(公告)号：US09869696B2

公开(公告)日：2018-01-16

申请号：US15015067

申请日：2016-02-03

申请人： DCG Systems, Inc.

发明人： Andrew Norman Erickson ,  Stephen Bradley Ippolito ,  Sean Zumwalt

IPC分类号： G01Q60/30

CPC分类号： G01Q60/30

摘要： Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.