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公开(公告)号：US09933453B2
公开(公告)日：2018-04-03
申请号：US15791764
申请日：2017-10-24
申请人： BRUKER NANO, INC.
发明人： Gregory Andreev , Sergey Osechinskiy , Stephen Minne , Chanmin Su
摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.
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公开(公告)号：US09910064B2
公开(公告)日：2018-03-06
申请号：US15438429
申请日：2017-02-21
申请人： Bruker Nano, Inc.
发明人： Changchun Liu , Bede Pittenger , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q10/06
CPC分类号： G01Q10/065 , G01Q10/06 , G01Q30/06
摘要： An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.
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公开(公告)号：US20180059136A1
公开(公告)日：2018-03-01
申请号：US15791764
申请日：2017-10-24
申请人： BRUKER NANO, INC.
发明人： Gregory Andreev , Sergey Osechinskiy , Stephen Minne , Chanmin Su
摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.
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公开(公告)号：US20180052186A1
公开(公告)日：2018-02-22
申请号：US15683577
申请日：2017-08-22
发明人： Chanmin Su , Martin Wagner , Xiaoji Xu
摘要： An apparatus and method of performing sample characterization with an AFM and a pulsed IR laser directed at the tip of a probe of the AFM. The laser pulses are synchronized with the oscillatory drive of the AFM and may only interact with the tip/sample on selected cycles of the oscillation. Peak force tapping mode is preferred for AFM operation. Nano-mechanical and nano-spectroscopic measurements can be made with sub-50 nm, and even sub-20 nm, resolution.
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公开(公告)号：US09719916B2
公开(公告)日：2017-08-01
申请号：US15256071
申请日：2016-09-02
申请人： Bruker Nano, Inc.
发明人： Gregory O. Andreev , Chanmin Su
CPC分类号： G01N21/171 , B82Y35/00 , G01N21/3563 , G01N2201/06113 , G01N2201/10 , G01N2201/12 , G01Q30/02 , G01Q30/20 , G01Q60/32
摘要： An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. calorimetry may also be performed with the photothermal PFT system.
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公开(公告)号：US20170052111A1
公开(公告)日：2017-02-23
申请号：US15256071
申请日：2016-09-02
申请人： Bruker Nano, Inc.
发明人： Gregory O. Andreev , Chanmin Su
CPC分类号： G01N21/171 , B82Y35/00 , G01N21/3563 , G01N2201/06113 , G01N2201/10 , G01N2201/12 , G01Q30/02 , G01Q30/20 , G01Q60/32
摘要： An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, w, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. calorimetry may also be performed with the photothermal PFT system.
摘要翻译： 进行样品的光热化学纳米识别的装置和方法包括将探针的尖端定位在样品的感兴趣区域，尖端样品分离小于约10nm。 然后，具有选定频率w的IR电磁能量指向尖端。 使用PFT模式AFM操作，识别感兴趣区域的能量吸收。 光热法还可以用光热PFT系统进行。
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公开(公告)号：US20160266166A1
公开(公告)日：2016-09-15
申请号：US15006974
申请日：2016-01-26
申请人： Bruker Nano, Inc.
发明人： Jian Shi , Craig Prater , Ji Ma , Chanmin Su
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/04 , G01Q10/065
摘要： A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.
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公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
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9.发明申请Method and Apparatus to Compensate for Deflection Artifacts in an Atomic Force Microscope 有权用于补偿原子力显微镜中偏转人工制品的方法和装置公开(公告)号：US20150247881A1
公开(公告)日：2015-09-03
申请号：US14193138
申请日：2014-02-28
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Shuiqing Hu
IPC分类号： G01Q10/00
摘要： A method of compensating for an artifact in data collected using a standard atomic force microscope (AFM) operating in an oscillating mode. The artifact is caused by deflection of the probe not related to actual probe-sample interaction and the method includes compensating for thermal induced bending of the probe of the AFM by measuring a DC component of the measured deflection. The DC component of deflection is identified by calibrating the optical deflection detection apparatus and monitoring movement of the mean deflection, thereby allowing the preferred embodiments to minimize the adverse effect due to the artifact. Notably, plotting the DC deflection profile yields a corresponding temperature profile of the sample.
摘要翻译： 使用以振荡模式操作的标准原子力显微镜（AFM）收集的数据中补偿伪影的方法。 该伪影是由与探头 - 样本相互作用无关的探针的偏转引起的，该方法包括通过测量测得的偏转的直流分量来补偿AFM的探针的热诱导弯曲。 通过校准光学偏转检测装置和监测平均偏转的运动来识别偏转的直流分量，从而允许优选实施例将由于伪像引起的不利影响降至最低。 值得注意的是，绘制直流偏转曲线得到相应的样品温度曲线。
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公开(公告)号：US09116167B2
公开(公告)日：2015-08-25
申请号：US14675140
申请日：2015-03-31
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。
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