公开(公告)号：US20200049734A1

公开(公告)日：2020-02-13

申请号：US16538474

申请日：2019-08-12

申请人： Bruker Nano, Inc.

发明人： Jason Osborne ,  Vladimir Fonoberov ,  Sean Michael Hand

IPC分类号： G01Q60/30 ,  G01Q60/38 ,  G01R1/067

摘要： An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.

公开(公告)号：US11668730B2

公开(公告)日：2023-06-06

申请号：US17223849

申请日：2021-04-06

申请人： Bruker Nano, Inc.

发明人： Jason Osborne ,  Vladimir Fonoberov ,  Sean Michael Hand

IPC分类号： G01Q60/30 ,  G01Q60/38 ,  G01R1/067 ,  G01Q10/06 ,  G01Q20/02

CPC分类号： G01Q60/30 ,  G01Q60/38 ,  G01R1/067 ,  G01Q10/06 ,  G01Q20/02

摘要： An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.

公开(公告)号：US10969406B2

公开(公告)日：2021-04-06

申请号：US16538474

申请日：2019-08-12

申请人： Bruker Nano, Inc.

发明人： Jason Osborne ,  Vladimir Fonoberov ,  Sean Michael Hand

IPC分类号： G01Q60/30 ,  G01Q10/06 ,  G01Q60/38 ,  G01R1/067 ,  G01Q20/02

摘要： An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.