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1.发明授权Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure 有权环境扫描电子显微镜（ESEM / SEM）气体注入装置与阳极集成结合公开(公告)号：US09070533B2
公开(公告)日：2015-06-30
申请号：US13954838
申请日：2013-07-30
Applicant: FEI Company
Inventor： Marc Castagna , Clive D. Chandler , Wayne Kurowski , Daniel Woodrow Phifer, Jr.
CPC classification number: H01J37/26 , H01J37/18 , H01J37/28 , H01J2237/0044 , H01J2237/006 , H01J2237/24445
Abstract: A gas injection system provides a local region at the sample surface that has sufficient gas concentration to be ionized by secondary electrons to neutralize charged on the sample surface. In some embodiments, a gas concentration structure concentrates the gas near the surface. An optional hole in the gas concentration structure allows the charged particle beam to impact the interior of a shrouded region. In some embodiments, an anode near the surface increases the number of ions that return to the work piece surface for charge neutralization, the anode in some embodiments being a part of the gas injection system and in some embodiments being a separate structure.
Abstract translation: 气体注入系统在样品表面处提供具有足够气体浓度的局部区域，以通过二次电子电离以中和样品表面上的带电。 在一些实施例中，气体浓度结构将气体靠近表面集中。 气体浓度结构中的可选孔允许带电粒子束冲击被覆盖区域的内部。 在一些实施例中，表面附近的阳极增加返回到工件表面以进行电荷中和的离子的数量，在一些实施例中，阳极是气体注入系统的一部分，并且在一些实施例中为独立的结构。
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公开(公告)号：US20140034830A1
公开(公告)日：2014-02-06
申请号：US13954838
申请日：2013-07-30
Applicant: FEI Company
Inventor： Marc Castagna , Clive D. Chandler , Wayne Kurowski , Daniel Woodrow Phifer, JR.
CPC classification number: H01J37/26 , H01J37/18 , H01J37/28 , H01J2237/0044 , H01J2237/006 , H01J2237/24445
Abstract: A gas injection system provides a local region at the sample surface that has sufficient gas concentration to be ionized by secondary electrons to neutralize charged on the sample surface. In some embodiments, a gas concentration structure concentrates the gas near the surface. An optional hole in the gas concentration structure allows the charged particle beam to impact the interior of a shrouded region. In some embodiments, an anode near the surface increases the number of ions that return to the work piece surface for charge neutralization, the anode in some embodiments being a part of the gas injection system and in some embodiments being a separate structure.
Abstract translation: 气体注入系统在样品表面处提供具有足够气体浓度的局部区域，以通过二次电子电离以中和样品表面上的带电。 在一些实施例中，气体浓度结构将气体靠近表面集中。 气体浓度结构中的可选孔允许带电粒子束冲击被覆盖区域的内部。 在一些实施例中，表面附近的阳极增加返回到工件表面以进行电荷中和的离子的数量，在一些实施例中，阳极是气体注入系统的一部分，并且在一些实施例中为独立的结构。
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