公开(公告)号：US20190228945A1

公开(公告)日：2019-07-25

申请号：US16255026

申请日：2019-01-23

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/261 ,  H01J2237/1405 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/28

Abstract: An aberration corrector for an electron microscope includes a geometric aberration corrector provided with a transfer lens system, wherein the transfer lens system includes an optical system for chromatic aberration correction, the optical system for chromatic aberration correction has a first portion, a second portion, and a third portion disposed along an optical axis, and each of the first portion, the second portion, and the third portion has a thickness in a direction along the optical axis and generates an electromagnetic field having two-fold symmetry in which an electric field having two-fold symmetry and a magnetic field having two-fold symmetry are superimposed.

公开(公告)号：US09997327B1

公开(公告)日：2018-06-12

申请号：US15372536

申请日：2016-12-08

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo ,  Masashi Shimizu

IPC: H01J37/00 ,  H01J37/153 ,  H01J37/26 ,  H01J37/22 ,  H01J37/10 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/1474 ,  H01J37/22 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/182

Abstract: There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

公开(公告)号：US20170025248A1

公开(公告)日：2017-01-26

申请号：US15151792

申请日：2016-05-11

Applicant: The University of Tokyo ,  JEOL Ltd.

Inventor： Naoya Shibata ,  Yuji Kohno ,  Hidetaka Sawada

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/09 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/09 ,  H01J37/226 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/24578 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: An electron microscope is provided which can measure, with high sensitivity and high positional resolution, an amount of deflection of an electron beam occurring when it is transmitted through a sample. The electron microscope (100) is adapted to measure the amount of deflection of the electron beam (EB) when it is transmitted through the sample (S), and has an electron beam source (10) producing the electron beam (EB), an illumination lens system for focusing the electron beam (EB) onto the sample (S), an aperture (30) having an electron beam blocking portion (32) for providing a shield between a central portion (EB1) and an outer peripheral portion (EB2) of the cross section of the beam (EB) impinging on the sample (S), and a segmented detector (20) having a detection surface (22) for detecting the electron beam (EB) transmitted through the sample (S). The detection surface (22) is divided into a plurality of detector segments (D1-D4).

Abstract translation: 提供了一种电子显微镜，其能够以高灵敏度和高位置分辨率测量当透射通过样品时发生的电子束的偏转量。 电子显微镜（100）适于测量电子束（EB）在透过样品（S）时的偏转量，并具有产生电子束（EB）的电子束源（10）， 用于将电子束（EB）聚焦到样品（S）上的照明透镜系统，具有用于在中心部分（EB1）和外周部分（EB2）之间提供屏蔽的电子束阻挡部分（32）的孔（30） （EB））和分段检测器（20），其具有用于检测通过样品（S）传输的电子束（EB）的检测表面（22）。 检测表面（22）被分成多个检测器段（D1-D4）。

公开(公告)号：US10541111B2

公开(公告)日：2020-01-21

申请号：US15989459

申请日：2018-05-25

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Kazuya Omoto ,  Hidetaka Sawada

IPC: H01J37/28 ,  H01J37/26 ,  G01N1/32

Abstract: A distortion measurement method for an electron microscope image includes: loading a distortion measurement specimen having structures arranged in a lattice to a specimen plane of an electron microscope or a plane conjugate to the specimen plane in order to obtain an electron microscope image of the distortion measurement specimen; and measuring a distortion from the obtained electron microscope image of the distortion measurement specimen.

公开(公告)号：US20150332889A1

公开(公告)日：2015-11-19

申请号：US14688045

申请日：2015-04-16

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: H01J37/141 ,  H01J37/26 ,  H01J37/06

CPC classification number: H01J37/141 ,  H01J37/06 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1415

Abstract: A multipole lens (100) which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies (10a, 10b, 10c) stacked on top of each other. The lens subassemblies (10a, 10b, 10c) have yokes (14a, 14b, 14c), respectively, and polar elements (12a, 12b, 12c), respectively. The polar elements (12a, 12b, 12c) have base portions (13a, 13b, 13c), respectively, magnetically coupled to the yokes (14a, 14b, 14c), respectively, and front end portions (11a, 11b, 11c), respectively, magnetically coupled to the base portions (13a, 13b, 13c), respectively. Magnetic field separators (20, 22) made of a nonmagnetic material are mounted between the front end portions (11a, 11b, 11c) which are successively adjacent to each other in the direction of stacking of the lens subassemblies (10a, 10b, 10c).

Abstract translation: 能够产生在电子束行进方向上具有不同强度的静磁场的多极镜（100）具有彼此堆叠的透镜子组件（10a，10b，10c）。 透镜组件（10a，10b，10c）分别具有轭（14a，14b，14c）和极性元件（12a，12b，12c）。 极性元件（12a，12b，12c）分别具有分别与轭（14a，14b，14c）磁接合的基部（13a，13b，13c）和前端部（11a，11b，11c） 分别磁耦合到基部（13a，13b，13c）。 由非磁性材料制成的磁场分离器（20,22）安装在沿着透镜组件（10a，10b，10c）堆叠方向相互相邻的前端部分（11a，11b，11c）之间， 。

公开(公告)号：US10720301B2

公开(公告)日：2020-07-21

申请号：US16255026

申请日：2019-01-23

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: H01J37/153 ,  H01J37/26

Abstract: An aberration corrector for an electron microscope includes a geometric aberration corrector provided with a transfer lens system, wherein the transfer lens system includes an optical system for chromatic aberration correction, the optical system for chromatic aberration correction has a first portion, a second portion, and a third portion disposed along an optical axis, and each of the first portion, the second portion, and the third portion has a thickness in a direction along the optical axis and generates an electromagnetic field having two-fold symmetry in which an electric field having two-fold symmetry and a magnetic field having two-fold symmetry are superimposed.

公开(公告)号：US20180166252A1

公开(公告)日：2018-06-14

申请号：US15372536

申请日：2016-12-08

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo ,  Masashi Shimizu

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/22 ,  H01J37/10 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/1474 ,  H01J37/22 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/182

Abstract: There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

公开(公告)号：US09349565B2

公开(公告)日：2016-05-24

申请号：US14688045

申请日：2015-04-16

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: G21K5/04 ,  H01J37/141 ,  H01J37/06 ,  H01J37/26

CPC classification number: H01J37/141 ,  H01J37/06 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1415

Abstract: A multipole lens (100) which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies (10a, 10b, 10c) stacked on top of each other. The lens subassemblies (10a, 10b, 10c) have yokes (14a, 14b, 14c), respectively, and polar elements (12a, 12b, 12c), respectively. The polar elements (12a, 12b, 12c) have base portions (13a, 13b, 13c), respectively, magnetically coupled to the yokes (14a, 14b, 14c), respectively, and front end portions (11a, 11b, 11c), respectively, magnetically coupled to the base portions (13a, 13b, 13c), respectively. Magnetic field separators (20, 22) made of a nonmagnetic material are mounted between the front end portions (11a, 11b, 11c) which are successively adjacent to each other in the direction of stacking of the lens subassemblies (10a, 10b, 10c).

Abstract translation: 能够产生在电子束行进方向上具有不同强度的静磁场的多极镜（100）具有彼此堆叠的透镜子组件（10a，10b，10c）。 透镜组件（10a，10b，10c）分别具有轭（14a，14b，14c）和极性元件（12a，12b，12c）。 极性元件（12a，12b，12c）分别具有分别与轭（14a，14b，14c）磁接合的基部（13a，13b，13c）和前端部（11a，11b，11c） 分别磁耦合到基部（13a，13b，13c）。 由非磁性材料制成的磁场分离器（20,22）安装在沿着透镜组件（10a，10b，10c）堆叠方向相互相邻的前端部分（11a，11b，11c）之间， 。

公开(公告)号：US20150029593A1

公开(公告)日：2015-01-29

申请号：US14338542

申请日：2014-07-23

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo

IPC: G02B27/00

CPC classification number: G02B27/0037 ,  G01N23/20 ,  G02B27/42 ,  G02B27/4205 ,  G21K1/08 ,  H01J3/04 ,  H01J3/12 ,  H01J3/26 ,  H01J37/05 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534

Abstract: A spherical aberration corrector is offered which permits a correction of deviation of the circularity of at least one of an image and a diffraction pattern and a correction of on-axis aberrations to be carried out independently. The spherical aberration corrector (100) is for use with a charged particle beam instrument (1) for obtaining the image and the diffraction pattern and has a hexapole field generating portion (110) for producing plural stages of hexapole fields, an octopole field superimposing portion (120) for superimposing an octopole on at least one of the plural stages of hexapole fields to correct deviation of the circularity of at least one of the image and diffraction pattern, and a deflection portion (130) for deflecting a charged particle beam.

Abstract translation: 提供了一种球面像差校正器，其允许校正图像和衍射图案中的至少一个的圆度的偏差和单独进行的轴上像差校正。 球面像差校正器（100）用于带电粒子束仪器（1），用于获得图像和衍射图案，并具有用于产生多级六极场的六极场产生部分（110），八极场叠加部分 （120），用于将至少一个六极场中的至少一个叠加八极杆，以校正图像和衍射图案中的至少一个的圆度的偏差，以及用于偏转带电粒子束的偏转部分（130）。

公开(公告)号：US08785880B2

公开(公告)日：2014-07-22

申请号：US14102838

申请日：2013-12-11

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Fumio Hosokawa

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/12 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).

Abstract translation: 色差校正器（100）具有用于产生第一电磁场的第一多极元件（110）和用于产生第二电磁场的第二多极元件（120）。 第一多极元件（110）沿着具有厚度并且产生四极场的光轴（OA）布置的第一，第二和第三部分（110a，110b，110c），其中电四极场和四极磁场被叠加 。 在第一和第三部分（110a，110c）中，电四极场被设置为比四极四极场强。 在第二部分（110b）中，将四极四极场设置得比电四极场强。 第二部分（110b）产生与由第一部分（110a）和第三部分（110c）产生的两折像散分量相反的双折射散光成分。