公开(公告)号：US20230207287A1

公开(公告)日：2023-06-29

申请号：US18085310

申请日：2022-12-20

Applicant: JEOL Ltd.

Inventor： Masashi Shimizu

IPC: H01J37/32 ,  H01J37/20

CPC classification number: H01J37/32724 ,  H01J37/32743 ,  H01J37/20 ,  H01J2237/2001 ,  H01J2237/002 ,  H01J2237/2007

Abstract: A sample cartridge carrier apparatus is coupled with a focused ion beam processing apparatus (FIB processing apparatus). A guide mechanism is configured to guide a series of movements of a sample cartridge holder to allow a sample cartridge to be held by a carrier base on a sub stage. Sub cooling equipment is configured to cool the sample cartridge via the sub stage. A carrier mechanism carries the carrier base between the sub stage and a main stage.

公开(公告)号：US20210110993A1

公开(公告)日：2021-04-15

申请号：US17069915

申请日：2020-10-14

Applicant: JEOL Ltd.

Inventor： Masashi Shimizu

IPC: H01J37/26 ,  F28F3/12

Abstract: A secondary storage container is a member which surrounds a primary storage container. A vaporized coolant generated in a primary storage space flows into and is stored in the secondary storage container. Radiant heat is blocked by the secondary storage container in a cooled state. Heat transferred to the primary storage container is reduced by a heat conducting path including the secondary storage container.

公开(公告)号：US20180374671A1

公开(公告)日：2018-12-27

申请号：US16007276

申请日：2018-06-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Takeo Sasaki ,  Ichiro Onishi ,  Shuichi Yuasa ,  Masashi Shimizu

IPC: H01J37/20 ,  H01J37/10 ,  H01J37/244 ,  H01J37/09 ,  H01J37/28

Abstract: A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

公开(公告)号：US20180166252A1

公开(公告)日：2018-06-14

申请号：US15372536

申请日：2016-12-08

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo ,  Masashi Shimizu

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/22 ,  H01J37/10 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/1474 ,  H01J37/22 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/182

Abstract: There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

公开(公告)号：US11127561B2

公开(公告)日：2021-09-21

申请号：US17069915

申请日：2020-10-14

Applicant: JEOL Ltd.

Inventor： Masashi Shimizu

IPC: H01J37/00 ,  H01J37/26 ,  F28F3/12

Abstract: A secondary storage container is a member which surrounds a primary storage container. A vaporized coolant generated in a primary storage space flows into and is stored in the secondary storage container. Radiant heat is blocked by the secondary storage container in a cooled state. Heat transferred to the primary storage container is reduced by a heat conducting path including the secondary storage container.

公开(公告)号：US09997327B1

公开(公告)日：2018-06-12

申请号：US15372536

申请日：2016-12-08

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo ,  Masashi Shimizu

IPC: H01J37/00 ,  H01J37/153 ,  H01J37/26 ,  H01J37/22 ,  H01J37/10 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/1474 ,  H01J37/22 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/182

Abstract: There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.