公开(公告)号：US20180374671A1

公开(公告)日：2018-12-27

申请号：US16007276

申请日：2018-06-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Takeo Sasaki ,  Ichiro Onishi ,  Shuichi Yuasa ,  Masashi Shimizu

IPC: H01J37/20 ,  H01J37/10 ,  H01J37/244 ,  H01J37/09 ,  H01J37/28

Abstract: A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.