知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

21 records (took 0.016 seconds)

    Dose-based end-pointing for low-kV FIB milling in TEM sample preparation
    1.
    发明授权
    Dose-based end-pointing for low-kV FIB milling in TEM sample preparation 有权

    公开(公告)号：US11313042B2

    公开(公告)日：2022-04-26

    申请号：US16566647

    申请日：2019-09-10

    Applicant: FEI Company

    Inventor： Thomas G. Miller ,  Jason Arjavac ,  Michael Moriarty

    IPC: H01J37/00 ,  C23F1/04 ,  H01J37/302 ,  G01N1/32 ,  H01J37/305 ,  H01J37/304

    Abstract: A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

    MICROSCOPY FEEDBACK FOR IMPROVED MILLING ACCURACY
    6.
    发明公开
    MICROSCOPY FEEDBACK FOR IMPROVED MILLING ACCURACY 审中-公开

    公开(公告)号：US20230197403A1

    公开(公告)日：2023-06-22

    申请号：US17873532

    申请日：2022-07-26

    Applicant: FEI Company

    Inventor： Thomas Gary Miller ,  Jason Arjavac ,  Brian Routh, JR. ,  Mark Biedrzycki

    IPC: H01J37/30 ,  H01J37/305 ,  H01J37/28 ,  H01J37/147

    CPC classification number: H01J37/3005 ,  H01J37/3053 ,  H01J37/28 ,  H01J37/1478 ,  H01J2237/30405

    Abstract: Methods and apparatus are disclosed for integration of image-based metrology into a milling workflow. A first ion beam milling operation is performed to an edge at a distance from a final target position on a sample. An SEM image of the sample is used to determine a distance between the milled edge and a reference structure on the sample. Based on the determined distance, the ion beam is adjusted to perform a second milling operation to shift the milled edge to the final target position. Extensions to iterative procedures are disclosed. Various geometric configurations and corrections are disclosed. Manufacturing and analytic applications are disclosed in a variety of fields, including read-write head manufacture and TEM sample preparation. Other combinations of imaging and milling tools can be used.

    DOSE-BASED END-POINTING FOR LOW-KV FIB MILLING IN TEM SAMPLE PREPARATION
    7.
    发明申请
    DOSE-BASED END-POINTING FOR LOW-KV FIB MILLING IN TEM SAMPLE PREPARATION 审中-公开

    公开(公告)号：US20200095688A1

    公开(公告)日：2020-03-26

    申请号：US16566647

    申请日：2019-09-10

    Applicant: FEI Company

    Inventor： Thomas G. Miller ,  Jason Arjavac ,  Michael Moriarty

    IPC: C23F1/04 ,  H01J37/302 ,  G01N1/32 ,  H01J37/305

    Abstract: A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

Patent Agency Ranking