公开(公告)号：US08993962B2

公开(公告)日：2015-03-31

申请号：US13746124

申请日：2013-01-21

Applicant: FEI Company

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/295 ,  G01N1/28 ,  H01J37/20 ,  G01N1/32 ,  H01J37/26 ,  H01J37/28 ,  H01J37/31 ,  G01R31/28

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。

公开(公告)号：US20130153785A1

公开(公告)日：2013-06-20

申请号：US13746124

申请日：2013-01-21

Applicant: FEI Company

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/20

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。

公开(公告)号：US09349570B2

公开(公告)日：2016-05-24

申请号：US14674840

申请日：2015-03-31

Applicant: FEI Company

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/20 ,  G01N1/28 ,  G01N1/32 ,  H01J37/26 ,  H01J37/28 ,  H01J37/31 ,  H01J37/285 ,  G01R31/28

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

公开(公告)号：US20150311034A1

公开(公告)日：2015-10-29

申请号：US14674840

申请日：2015-03-31

Applicant: FEI Company

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/20 ,  G01N1/28 ,  H01J37/285

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。