公开(公告)号：US20240071040A1

公开(公告)日：2024-02-29

申请号：US18503554

申请日：2023-11-07

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, JR. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06V10/44 ,  G06F18/21 ,  G06F18/2115 ,  G06F18/24 ,  G06T7/00 ,  G06V10/764 ,  H01L21/263 ,  H01L21/268 ,  H01L21/66

CPC分类号： G06V10/454 ,  G06F18/2115 ,  G06F18/2163 ,  G06F18/24 ,  G06T7/0004 ,  G06V10/764 ,  H01L21/2633 ,  H01L21/2686 ,  H01L22/26 ,  G06T2207/10056 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148 ,  G06V2201/06

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US11176656B2

公开(公告)日：2021-11-16

申请号：US16409477

申请日：2019-05-10

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, Jr. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06T7/00 ,  G06K9/62 ,  H01L21/26 ,  C23F1/04 ,  G06N3/04 ,  G06N20/00 ,  H01L21/66 ,  H01L21/268 ,  H01L21/263

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US11847813B2

公开(公告)日：2023-12-19

申请号：US17499603

申请日：2021-10-12

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, Jr. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06N3/00 ,  G06N20/00 ,  G06T7/00 ,  G06V10/764 ,  G06V10/44 ,  H01L21/66 ,  H01L21/268 ,  H01L21/263 ,  G06F18/24 ,  G06F18/2115 ,  G06F18/21

CPC分类号： G06V10/454 ,  G06F18/2115 ,  G06F18/2163 ,  G06F18/24 ,  G06T7/0004 ,  G06V10/764 ,  H01L21/2633 ,  H01L21/2686 ,  H01L22/26 ,  G06T2207/10056 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148 ,  G06V2201/06

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US20200279362A1

公开(公告)日：2020-09-03

申请号：US16409477

申请日：2019-05-10

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, JR. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06T7/00 ,  G06K9/62 ,  H01L21/66 ,  H01L21/263 ,  H01L21/268

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US20230197403A1

公开(公告)日：2023-06-22

申请号：US17873532

申请日：2022-07-26

申请人： FEI Company

发明人： Thomas Gary Miller ,  Jason Arjavac ,  Brian Routh, JR. ,  Mark Biedrzycki

IPC分类号： H01J37/30 ,  H01J37/305 ,  H01J37/28 ,  H01J37/147

CPC分类号： H01J37/3005 ,  H01J37/3053 ,  H01J37/28 ,  H01J37/1478 ,  H01J2237/30405

摘要： Methods and apparatus are disclosed for integration of image-based metrology into a milling workflow. A first ion beam milling operation is performed to an edge at a distance from a final target position on a sample. An SEM image of the sample is used to determine a distance between the milled edge and a reference structure on the sample. Based on the determined distance, the ion beam is adjusted to perform a second milling operation to shift the milled edge to the final target position. Extensions to iterative procedures are disclosed. Various geometric configurations and corrections are disclosed. Manufacturing and analytic applications are disclosed in a variety of fields, including read-write head manufacture and TEM sample preparation. Other combinations of imaging and milling tools can be used.

公开(公告)号：US20220067915A1

公开(公告)日：2022-03-03

申请号：US17499603

申请日：2021-10-12

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, JR. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06T7/00 ,  G06K9/62 ,  H01L21/263 ,  H01L21/66 ,  H01L21/268

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.