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    Line-based endpoint detection
    2.
    发明授权
    Line-based endpoint detection 有权

    公开(公告)号：US11355313B2

    公开(公告)日：2022-06-07

    申请号：US16917727

    申请日：2020-06-30

    申请人： FEI Company

    发明人： Brian Routh, Jr. ,  Brad Larson ,  Aditee Shrotre ,  Oleg Sidorov

    IPC分类号： H01J37/30 ,  H01J37/31 ,  G01N23/2251

    摘要： Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.

    CORRELATED SLICE AND VIEW IMAGE ANNOTATION FOR MACHINE LEARNING
    3.
    发明申请
    CORRELATED SLICE AND VIEW IMAGE ANNOTATION FOR MACHINE LEARNING 有权

    公开(公告)号：US20210374467A1

    公开(公告)日：2021-12-02

    申请号：US16888337

    申请日：2020-05-29

    申请人： FEI Company

    发明人： Derek Higgins ,  Brad Larson

    IPC分类号： G06K9/62 ,  G06F3/0482 ,  G06F3/0484 ,  G06N20/00

    摘要： Methods and systems for allowing users operators to quickly and easily (i) review the products of machine learning algorithm(s) to evaluate their accuracy, (ii) make corrections to such products, and (iii) compile feedback for retraining the algorithm(s) are disclosed. An example method includes acquiring a plurality of correlated images of a sample, determining one or more features in each image of the plurality of correlated images, and then determining a relationship between at least a first feature in a first image of the plurality of correlated images and at least a second feature in a second image of the plurality of images. Then, when characteristic information is determined about the first feature, it is associated with both the first feature in the first image and the second feature in the second image based on the relationship

    POSE ESTIMATION USING SEMATIC SEGMENTATION
    6.
    发明申请
    POSE ESTIMATION USING SEMATIC SEGMENTATION 有权

    公开(公告)号：US20210088770A1

    公开(公告)日：2021-03-25

    申请号：US16580957

    申请日：2019-09-24

    申请人： FEI Company

    发明人： John Flanagan ,  Brad Larson ,  Thomas Miller

    IPC分类号： G02B21/36 ,  G06T3/00 ,  G06T7/33 ,  G06N3/08 ,  G02B21/00

    摘要： Methods and systems for implementing artificial intelligence to determine the pose of a sample within a microscope system and aligning said sample are disclosed. An example method includes receiving an image of the sample in the microscope apparatus, accessing a template associated with the sample. The template describes a plurality of template key points of the template version of the sample. A plurality of key points on the sample are then determined, where each of the key points on the sample corresponds to a corresponding template key point of a sample template, and the key points are subsequently used to determine a transformation between the sample as depicted in the image and the template version of the sample as described in the template. The transformation can then be used to automate the alignment of the sample within the microscope.

    LINE-BASED ENDPOINT DETECTION
    9.
    发明申请
    LINE-BASED ENDPOINT DETECTION 有权

    公开(公告)号：US20210407765A1

    公开(公告)日：2021-12-30

    申请号：US16917727

    申请日：2020-06-30

    申请人： FEI Company

    发明人： Brian Routh, JR. ,  Brad Larson ,  Aditee Shrotre ,  Oleg Sidorov

    IPC分类号： H01J37/30 ,  H01J37/31 ,  G01N23/2251

    摘要： Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.