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公开(公告)号:US20230395351A1
公开(公告)日:2023-12-07
申请号:US17831147
申请日:2022-06-02
申请人: FEI Company
CPC分类号: H01J37/28 , H01J37/244 , H01J37/222 , H01J37/20 , H01J37/265 , G06T7/0004 , H01J2237/226 , G06T2207/10061 , G06T2207/20081
摘要: A method of imaging a sample includes acquiring one or more first images of a region of the sample at a first imaging condition with a charged particle microscope system. The one or more first images are applied to an input of a trained machine learning model to obtain a predicted image indicating atom structure probability in the region of the sample. An enhanced image indicating atom locations in the region of the sample based on the atom structure probability in the predicted image is caused to be displayed in response to obtaining the predicted image.
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公开(公告)号:US11355305B2
公开(公告)日:2022-06-07
申请号:US16596538
申请日:2019-10-08
申请人: FEI Company
IPC分类号: H01J37/20 , H01J37/22 , G06N3/08 , H01J37/26 , H01J37/305
摘要: Methods and systems for creating TEM lamella using image restoration algorithms for low keV FIB images are disclosed. An example method includes irradiating a sample with an ion beam at low keV settings, generating a low keV ion beam image of the sample based on emissions resultant from irradiation by the ion beam, and then applying an image restoration model to the low keV ion beam image of the sample to generate a restored image. The sample is then localized within the restored image, and a low keV milling of the sample is performed with the ion beam based on the localized sample within the restored image.
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公开(公告)号:US11151356B2
公开(公告)日:2021-10-19
申请号:US16287982
申请日:2019-02-27
申请人: FEI Company
发明人: John Flanagan , Erik Franken , Maurice Peemen
摘要: Convolutional neural networks (CNNs) of a set of CNNs are evaluated using a test set of images (electron micrographs) associated with a selected particle type. A preferred CNN is selected based on the evaluation and used for processing electron micrographs of test samples. The test set of images can be obtained by manual selection or generated using a model of the selected particle type. Upon selection of images using the preferred CNN in processing additional electron micrographs, the selected images can be added to a training set or used as an additional training set to retrain the preferred CNN. In some examples, only selected layers of the preferred CNN are retrained. In other examples, two dimensional projections of based on particles of similar structure are used for CNN training or retraining.
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公开(公告)号:US20220373481A1
公开(公告)日:2022-11-24
申请号:US17329081
申请日:2021-05-24
申请人: FEI Company
发明人: Maurice Peemen , Holger Kohr , Pavel Potocek
IPC分类号: G01N23/046 , G06T7/00 , G06T11/00 , G06T7/33
摘要: Tomographic images are obtained by processing a tilt series of 2D images by aligning and combining images withing a group of neighbor images. The tilt series generally includes sparsely sampled images. Images of the tilt series at tilt angles associated with the sparsely sample images are selected as reference frames, grouped with neighbor images, and the group of images aligned. The aligned images are combined to produce replacement frames and a replacement frame tilt series that can be used for tomographic reconstruction.
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公开(公告)号:US11380529B2
公开(公告)日:2022-07-05
申请号:US17039513
申请日:2020-09-30
申请人: FEI Company
摘要: Methods and systems for generating high resolution reconstructions of 3D samples imaged using slice and view processes where the electron interaction depth of the imaging beam is greater than slice thicknesses. Data obtained via such slice and view processes is enhanced with a depth blur reducing algorithm, that is configured to reduce depth blur caused by portions of the first data and second data that are resultant from electron interactions outside the first layer and second layer, respectively, to create enhanced first data and second enhanced data. A high-resolution 3D reconstruction of the sample is then generated using the enhanced first data and the enhanced second data. In some embodiments, the depth blur reducing algorithm may be selected from a set of such algorithms that have been individually configured for certain microscope conditions, sample conditions, or a combination thereof.
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公开(公告)号:US20210104375A1
公开(公告)日:2021-04-08
申请号:US16596538
申请日:2019-10-08
申请人: FEI Company
IPC分类号: H01J37/22 , H01J37/305 , H01J37/20 , H01J37/26 , G06N3/08
摘要: Methods and systems for creating TEM lamella using image restoration algorithms for low keV FIB images are disclosed. An example method includes irradiating a sample with an ion beam at low keV settings, generating a low keV ion beam image of the sample based on emissions resultant from irradiation by the ion beam, and then applying an image restoration model to the low keV ion beam image of the sample to generate a restored image. The sample is then localized within the restored image, and a low keV milling of the sample is performed with the ion beam based on the localized sample within the restored image.
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公开(公告)号:US20240280522A1
公开(公告)日:2024-08-22
申请号:US18171541
申请日:2023-02-20
申请人: FEI COMPANY
发明人: Hans Vanrompay , Maurice Peemen
IPC分类号: G01N23/2252 , G06N3/0455
CPC分类号: G01N23/2252 , G06N3/0455
摘要: Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. Some embodiments provide a scientific instrument including detectors supporting one or more spectroscopic modalities and an imaging modality and further including an electronic controller configured to process streams of measurements received from the detectors. The electronic controller operates to generate a base image of the sample based on the measurements corresponding to the imaging modality and further operates to generate an anomaly map of the sample based on the base image and further based on differences between measured and autoencoder-reconstructed spectra corresponding to different pixels of the base image. In at least some instances, the anomaly map can beneficially be used in a quality-control procedure to identify, within seconds, specific problem spots in the sample for more-detailed inspection and/or analyses.
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公开(公告)号:US11569056B2
公开(公告)日:2023-01-31
申请号:US16667506
申请日:2019-10-29
申请人: FEI Company
发明人: Brad Larson , John Flanagan , Maurice Peemen
IPC分类号: H01J37/22 , G06T7/00 , H01J37/28 , G01N21/956 , H04N19/149
摘要: Methods and apparatuses are disclosed herein for parameter estimation for metrology. An example method at least includes optimizing, using a parameter estimation network, a parameter set to fit a feature in an image based on one or more models of the feature, the parameter set defining the one or more models, and providing metrology data of the feature in the image based on the optimized parameter set.
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公开(公告)号:US11100612B2
公开(公告)日:2021-08-24
申请号:US16405536
申请日:2019-05-07
申请人: FEI Company
摘要: Methods and systems for neural network based image restoration are disclosed herein. An example method at least includes acquiring a plurality of training image pairs of a sample, where each training image of each of the plurality of training image pairs are images of a same location of a sample, and where each image of the plurality of training image pairs are acquired using same acquisition parameters, updating an artificial neural network based on the plurality of training image pairs, and denoising a plurality of sample images using the updated artificial neural network, where the plurality of sample images are acquired using the same acquisition parameters as used to acquire the plurality of training image pairs.
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10.
公开(公告)号:US10903043B2
公开(公告)日:2021-01-26
申请号:US16219986
申请日:2018-12-14
申请人: FEI Company
摘要: The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.
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