发明公开
- 专利标题: LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PARTICLE MICROSCOPY
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申请号: US17831147申请日: 2022-06-02
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公开(公告)号: US20230395351A1公开(公告)日: 2023-12-07
- 发明人: Pavel Potocek , Bert Henning Freitag , Maurice Peemen
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01J37/28
- IPC分类号: H01J37/28 ; H01J37/244 ; H01J37/22 ; H01J37/20 ; H01J37/26 ; G06T7/00
摘要:
A method of imaging a sample includes acquiring one or more first images of a region of the sample at a first imaging condition with a charged particle microscope system. The one or more first images are applied to an input of a trained machine learning model to obtain a predicted image indicating atom structure probability in the region of the sample. An enhanced image indicating atom locations in the region of the sample based on the atom structure probability in the predicted image is caused to be displayed in response to obtaining the predicted image.
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