公开(公告)号：US20150369710A1

公开(公告)日：2015-12-24

申请号：US14524315

申请日：2014-10-27

申请人： FEI Company

发明人： Scott Edward Fuller ,  Oleg Sidorov

IPC分类号： G01N1/32 ,  H01J37/305 ,  G03F7/20 ,  C23C16/48 ,  C23C16/50 ,  C23C16/52 ,  H01J37/302 ,  H01J37/317

CPC分类号： G01N1/32 ,  C23C16/486 ,  C23C16/50 ,  C23C16/52 ,  G03F7/70616 ,  H01J37/3056 ,  H01J37/317 ,  H01J37/3178 ,  H01J2237/3109 ,  H01J2237/31732 ,  H01J2237/31749

摘要： A system is provided to produce symmetric depositions using a charged-particle beam deposition with an angled beam. In the past, the use of an FIB with non-orthogonal incidence angles produced depositions that grew toward the FIB beam path making it difficult to produce uniformity of the deposit. With the current invention, a symmetrical deposition is made even with the use of a non-orthogonal FIB.

摘要翻译： 提供了一种使用带有角度束的带电粒子束沉积来产生对称沉积的系统。 在过去，使用具有非正交入射角的FIB产生朝向FIB光束路径增长的沉积物，使得难以产生沉积物的均匀性。 利用本发明，即使使用非正交FIB也可进行对称沉积。

公开(公告)号：US20210407765A1

公开(公告)日：2021-12-30

申请号：US16917727

申请日：2020-06-30

申请人： FEI Company

发明人： Brian Routh, JR. ,  Brad Larson ,  Aditee Shrotre ,  Oleg Sidorov

IPC分类号： H01J37/30 ,  H01J37/31 ,  G01N23/2251

摘要： Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.

公开(公告)号：US11355313B2

公开(公告)日：2022-06-07

申请号：US16917727

申请日：2020-06-30

申请人： FEI Company

发明人： Brian Routh, Jr. ,  Brad Larson ,  Aditee Shrotre ,  Oleg Sidorov

IPC分类号： H01J37/30 ,  H01J37/31 ,  G01N23/2251

摘要： Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.