ELECTRON BEAM GENERATOR, IMAGE APPARATUS INCLUDING THE SAME AND OPTICAL APPARATUS
    3.
    发明申请
    ELECTRON BEAM GENERATOR, IMAGE APPARATUS INCLUDING THE SAME AND OPTICAL APPARATUS 有权
    电子束发生器,包括其的图像装置和光学装置

    公开(公告)号:US20160260575A1

    公开(公告)日:2016-09-08

    申请号:US15059199

    申请日:2016-03-02

    Abstract: Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.

    Abstract translation: 可以提供电子束发生器,包括该电子束发生器的图像装置和光学装置。 光学装置包括在基板上提供第一和第二激光束的第一和第二激光装置,以及设置在第一和第二激光装置与基板之间以使第一和第二激光束聚焦的第一光学系统。 第一和第二激光束彼此重叠,产生干涉光束,从而将干涉光束的光点尺寸减小为小于焦点处的第一和第二激光束的波长的波长。

    HIGH POWER ULTRA-SHORT LASER DEVICE
    4.
    发明申请
    HIGH POWER ULTRA-SHORT LASER DEVICE 有权
    大功率超短激光器件

    公开(公告)号:US20150288126A1

    公开(公告)日:2015-10-08

    申请号:US14264307

    申请日:2014-04-29

    Abstract: Disclosed is a high power ultra-short pulsed laser device increasing pulse energy by using resonators. A pulsed laser device may comprise a first resonator making a pump beam resonate primarily and passing the pump beam which resonated through a first output mirror; and a second resonator comprising a first multiple reflection mirror and a second multiple reflection mirror. Also, the first multiple reflection mirror includes at least one first small area mirror, and the second multiple reflection mirror includes at least one second small area mirror, and the second resonator makes the laser beam delivered from the first resonator resonate by reflecting the laser beam repetitively. Therefore, the pulsed laser device may increase pulse energy without using a multi-stage amplifier so that a high power ultra-short pulsed laser beam can be generated.

    Abstract translation: 公开了一种通过使用谐振器增加脉冲能量的大功率超短脉冲激光器件。 脉冲激光装置可以包括使泵浦光束主要谐振并使通过第一输出镜谐振的泵浦光束通过的第一谐振器; 以及包括第一多反射镜和第二多反射镜的第二谐振器。 此外,第一多反射镜包括至少一个第一小面积反射镜,并且第二多反射镜包括至少一个第二小面积反射镜,并且第二谐振器使得从第一谐振器传递的激光束通过反射激光束而谐振 重复。 因此,脉冲激光装置可以在不使用多级放大器的情况下增加脉冲能量,从而可以产生高功率超短脉冲激光束。

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