公开(公告)号：US20240361666A1

公开(公告)日：2024-10-31

申请号：US18681646

申请日：2022-05-16

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Takashi SEKINE ,  Yoshinori TAMAOKI

IPC分类号： G02F1/35 ,  G02F1/39 ,  H01S3/00 ,  H01S3/23

CPC分类号： G02F1/354 ,  G02F1/392 ,  H01S3/0092 ,  H01S3/2391

摘要： A laser amplification device includes an amplification unit and a phase adjustment unit; the amplification unit includes a signal light source, an excitation light source, and a nonlinear optical crystal; the nonlinear optical crystal has a plurality of spatially different crystal portions; the signal light source, the excitation light source, and the nonlinear optical crystal are arranged such that signal light and excitation light are simultaneously incident on the plurality of crystal portions and that the elements of at least one of a set of the angles of incidence between the crystal axes of the plurality of crystal portions and the signal light and a set of the angles of incidence between the crystal axes of the plurality of crystal portions and the excitation light are different.

公开(公告)号：US20240356297A1

公开(公告)日：2024-10-24

申请号：US18760695

申请日：2024-07-01

申请人： NORTHROP GRUMMAN SYSTEMS CORPORATION

发明人： Gregory Goodno

IPC分类号： H01S3/067 ,  H01S3/094 ,  H01S3/23

CPC分类号： H01S3/06754 ,  H01S3/0675 ,  H01S3/094003 ,  H01S3/2308

摘要： A method for amplifying an optical seed beam in a fiber laser amplifier system. The method includes frequency modulating the seed beam to a carrier spectral band, amplitude modulating the seed beam that is synchronized with the frequency modulated seed beam, amplifying the seed beam using a pump power beam to provide an output beam where most of the beam power resides in the carrier spectral band, sampling off a sample beam from the output beam, filtering out the carrier spectral band from the sample beam, detecting beam power of the filtered sample beam and providing a beam power signal, and controlling one or more of the frequency modulation of the seed beam, the amplitude modulation of the seed beam and the pump power beam to change an FM modulation depth, an AM modulation depth and/or pump beam power in a manner that reduces the beam power signal.

公开(公告)号：US12124053B2

公开(公告)日：2024-10-22

申请号：US18081971

申请日：2022-12-15

申请人： Cymer, LLC

发明人： Eric Anders Mason

IPC分类号： G02B26/00 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G02B5/04 ,  G02B27/12 ,  G02B27/14 ,  G02B27/42 ,  G03F7/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/08 ,  H01S3/23 ,  G01J3/12 ,  H01S3/225

CPC分类号： G02B27/4244 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1804 ,  G02B26/007 ,  G03F7/70575 ,  H01L21/0275 ,  H01S3/0085 ,  H01S3/08004 ,  H01S3/2308 ,  G01J2003/061 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/069 ,  G01J2003/1208 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/2366

摘要： A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US20240297476A1

公开(公告)日：2024-09-05

申请号：US18647199

申请日：2024-04-26

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Lin Louis Chang ,  Henry Tong Yee Shian ,  Alan Tu ,  Han-Lung Chang ,  Tzung-Chi Fu ,  Bo-Tsun Liu ,  Li-Jui Chen ,  Po-Chung Cheng

IPC分类号： H01S3/104 ,  H01S3/00 ,  H01S3/04 ,  H01S3/041 ,  H01S3/10 ,  H01S3/1123 ,  H01S3/223 ,  H01S3/23 ,  H05G2/00

CPC分类号： H01S3/104 ,  H01S3/1001 ,  H01S3/2316 ,  H05G2/008 ,  H01S3/005 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/10038 ,  H01S3/10069 ,  H01S3/1123 ,  H01S3/2232

摘要： The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

公开(公告)号：US20240291226A1

公开(公告)日：2024-08-29

申请号：US18571826

申请日：2022-06-02

申请人： Cymer, LLC

发明人： Siyu Chen ,  Spencer Ryan Williams

IPC分类号： H01S3/134 ,  G03F7/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/13 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366 ,  G03F7/2004 ,  G03F7/70025

摘要： A gas control apparatus includes a control system in communication with a gas discharge chamber. The control system includes a performance monitoring module configured to, during standard mode of operation of the gas discharge chamber and in between performance of gas recovery schemes on the gas discharge chamber that use a gas recovery setting: compare one or more performance parameters of the gas discharge chamber to respective thresholds; determine whether the gas recovery setting needs to be adjusted based on the comparison; and adjust the value for the gas recovery setting based on the determination. The control system includes a gas recovery module configured to perform the gas recovery scheme, the gas recovery module being configured to access the most recently adjusted value for the gas recovery setting from the performance monitoring module when performing the current gas recovery scheme.

公开(公告)号：US12075550B2

公开(公告)日：2024-08-27

申请号：US18229582

申请日：2023-08-02

申请人： Logos Technologies HoldCo, Inc.

发明人： E. Michael Campbell ,  David Eimerl ,  William F. Krupke

IPC分类号： H01S3/10 ,  G21B1/03 ,  G21B1/23 ,  H05H1/22 ,  H01S3/00 ,  H01S3/23

CPC分类号： H05H1/22 ,  G21B1/03 ,  G21B1/23 ,  H01S3/0057 ,  H01S3/10038 ,  H01S3/2391

摘要： Embodiments of a laser system having an extremely large number of small pulsed lasers for irradiating small targets in inertial confinement fusion experiments, high energy density physics experiments, and inertial fusion power plants is more flexible than existing laser systems. Embodiments facilitate finer control of critical features of laser pulses for inertial fusion, as well as significant reduction in development costs and expansion of the community involved in the research relative to existing laser systems. Embodiments produce smooth intensity profiles at the target, large bandwidth that is over two orders of magnitude greater than existing laser systems, and fine control over laser wavelengths, focal properties, temporal pulse shape, and illumination geometry. Properties of each of the small pulsed lasers are individually selectable.

公开(公告)号：US20240244738A1

公开(公告)日：2024-07-18

申请号：US18564153

申请日：2022-06-01

申请人： Oxford University Innovation Limited

发明人： Roman WALCZAK ,  Oscar JAKOBSSON ,  Simon HOOKER

IPC分类号： H05H15/00 ,  H01S3/00 ,  H01S3/23

CPC分类号： H05H15/00 ,  H01S3/0057 ,  H01S3/2383

摘要： A driver (1) for a plasma particle accelerator includes a plasma (10) and laser system(s) (2) that generate first and second pulses. The first pulse (4) has a duration less than the electron plasma period. The second pulse (6) is temporally smooth and has a duration greater than the electron plasma period and less than the ion plasma period. The first pulse generates a plasma wake and the second pulse interacts with the wake to form red and blue-shifted sidebands. The driver also includes a dispersive optical device (20) that introduces a chromatic dispersion to shift the spectral phases of the red and blue-shifted sidebands, to temporally shift them relative to each other, so as to form coincident pulses (22) for generating a plasma wake in a plasma particle accelerator (26).

公开(公告)号：US20240204473A1

公开(公告)日：2024-06-20

申请号：US18591069

申请日：2024-02-29

申请人： RAFAEL ADVANCED DEFENSE SYSTEMS LTD.

发明人： Daniel GOLUBCHIK ,  Yehonathan SEGEV ,  David SHWA

IPC分类号： H01S3/13 ,  G01S7/481 ,  H01S3/00 ,  H01S3/067 ,  H01S3/10 ,  H01S3/23 ,  H01S5/40

CPC分类号： H01S3/1307 ,  H01S3/0085 ,  H01S3/067 ,  H01S3/10053 ,  H01S3/2308 ,  H01S3/2383 ,  G01S7/4815 ,  H01S3/06737 ,  H01S3/10092 ,  H01S3/1305 ,  H01S5/4012

摘要： A coherent beam combination (CBC) system (10) includes an array of beam sources (12a, 12b and 12c) generating coherent beams directed towards a target (T). The phase modulators (14a, 14b and 14c) allow adjustment of relative phase offsets of the beams. A detector (16) monitors an intensity of the radiation impinging on an area of the target (T). A controller (18) receives the intensity parameter and controls a phase adjustment of the beams according to a deterministic (i.e., quantitative) measurement of a phase offset of each beam relative to a representative phase of the sum of all the other beams. This is achieved by using interferometric techniques, referred to herein as Target In-the-Loop Interferometry (TILI).

公开(公告)号：US11988966B2

公开(公告)日：2024-05-21

申请号：US15734359

申请日：2019-05-16

申请人： Cymer, LLC

发明人： Andrei Dorobantu ,  Shreyas Bhaban

IPC分类号： G03F7/20 ,  G03F7/00 ,  H01S3/036 ,  H01S3/097 ,  H01S3/10 ,  H01S3/134 ,  H01S3/225 ,  H01S3/23

CPC分类号： G03F7/70025 ,  G03F7/70483 ,  H01S3/036 ,  H01S3/097 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2308

摘要： A system includes an optical source configured to emit a pulsed light beam, the optical source comprising one or more chambers, each of the one or more chambers configured to hold a gaseous gain medium, the gaseous gain medium being associated with an assumed gas life; at least one detection module configured to: receive and analyze data related to the pulsed light beam, and produce a beam quality metric based on the data related to the pulsed light beam; and a monitoring module configured to: analyze the beam quality metric, determine a health status of the gaseous gain medium based on the analysis of the beam quality metric, and produce a status signal based on the determined health status, the status signal indicating whether to extend use of the gaseous gain medium beyond the assumed gas life or to end use of the gaseous gain medium.

公开(公告)号：US20240162677A1

公开(公告)日：2024-05-16

申请号：US18055452

申请日：2022-11-15

申请人： Vector Atomic, Inc.

发明人： Arman CINGOZ ,  Akash Vrijlal Rakholia

IPC分类号： H01S3/23 ,  H01S3/10 ,  H01S5/06

CPC分类号： H01S3/2391 ,  H01S3/10092 ,  H01S5/0617

摘要： Embodiments herein describe using a reference laser locked to an atomic reference to adjust the wavelength of a seed laser. A frequency adjuster (e.g., a frequency doubler) can adjust the seed laser to a different wavelength/frequency for a particular application. A controller can adjust the wavelength of the seed laser by comparing the reference laser to the adjusted seed laser generated by the frequency adjuster.