公开(公告)号：US20150348940A1

公开(公告)日：2015-12-03

申请号：US14289483

申请日：2014-05-28

Applicant: Invensas Corporation

Inventor： Charles G. WOYCHIK ,  Arkalgud R. Sitaram ,  Andrew Cao ,  Bong-Sub Lee

IPC: H01L25/065 ,  H01L21/768 ,  H01L21/56 ,  H01L23/48 ,  H01L23/373 ,  H01L23/367 ,  H01L23/29 ,  H01L23/31 ,  H01L25/00 ,  H01L23/00

CPC classification number: H01L25/0657 ,  H01L21/56 ,  H01L21/561 ,  H01L21/563 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/29 ,  H01L23/295 ,  H01L23/3107 ,  H01L23/3128 ,  H01L23/367 ,  H01L23/3731 ,  H01L23/481 ,  H01L24/02 ,  H01L24/13 ,  H01L24/14 ,  H01L24/17 ,  H01L24/81 ,  H01L24/92 ,  H01L24/94 ,  H01L24/97 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68331 ,  H01L2224/0231 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/05611 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05664 ,  H01L2224/13022 ,  H01L2224/131 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13164 ,  H01L2224/13193 ,  H01L2224/14155 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16235 ,  H01L2224/1703 ,  H01L2224/17051 ,  H01L2224/17181 ,  H01L2224/2919 ,  H01L2224/2929 ,  H01L2224/29388 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73104 ,  H01L2224/73204 ,  H01L2224/92125 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06568 ,  H01L2225/06589 ,  H01L2924/15311 ,  H01L2924/18161 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2224/16225 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0665 ,  H01L2924/014

Abstract: A method of forming a semiconductor package comprises forming one or more first vias in a first side of a substrate and attaching a first side of a first microelectronic element to the first side of the substrate. The first microelectronic element is electrically coupled to at least one of the one or more first vias. The method further comprise obtaining a second microelectronic element including one or more second vias in a first side of the second microelectronic element, and attaching a second side of the substrate to the first side of the second microelectronic element. The second microelectronic element is electrically coupled to at least one of the one or more first vias. Each of one or more connecting elements has a first end attached to a first side of the second microelectronic element and a second end extends beyond a second side of the first microelectronic element.

Abstract translation: 形成半导体封装的方法包括在衬底的第一侧中形成一个或多个第一通孔并将第一微电子元件的第一侧附接到衬底的第一侧。 第一微电子元件电耦合到一个或多个第一通孔中的至少一个。 该方法还包括获得第二微电子元件，该第二微电子元件包括在第二微电子元件的第一侧中的一个或多个第二通孔，以及将该基板的第二侧附接到第二微电子元件的第一侧。 第二微电子元件电耦合到一个或多个第一通孔中的至少一个。 一个或多个连接元件中的每一个具有连接到第二微电子元件的第一侧的第一端，并且第二端延伸超过第一微电子元件的第二侧。

公开(公告)号：US20180233447A1

公开(公告)日：2018-08-16

申请号：US15952935

申请日：2018-04-13

Applicant: Invensas Corporation

Inventor： Cyprian Emeka UZOH ,  Charles G. WOYCHIK ,  Arkalgud R. SITARAM ,  Hong SHEN ,  Zhuowen SUN ,  Liang WANG ,  Guilian GAO

IPC: H01L23/522 ,  H01L21/768 ,  H01L49/02 ,  H01L21/8234

CPC classification number: H01L23/5223 ,  H01L21/76802 ,  H01L21/76877 ,  H01L21/823431 ,  H01L21/823475 ,  H01L23/5226 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In a microelectronic component having conductive vias (114) passing through a substrate (104) and protruding above the substrate, conductive features (120E.A, 120E.B) are provided above the substrate that wrap around the conductive vias' protrusions (114′) to form capacitors, electromagnetic shields, and possibly other elements. Other features and embodiments are also provided.

公开(公告)号：US20170278787A1

公开(公告)日：2017-09-28

申请号：US15619160

申请日：2017-06-09

Applicant: Invensas Corporation

Inventor： Cyprian Emeka UZOH ,  Charles G. WOYCHIK ,  Arkalgud R. SITARAM ,  Hong SHEN ,  Zhuowen SUN ,  Liang WANG ,  Guilian GAO

IPC: H01L23/522 ,  H01L49/02 ,  H01L21/8234 ,  H01L21/768

CPC classification number: H01L23/5223 ,  H01L21/76802 ,  H01L21/76877 ,  H01L21/823431 ,  H01L21/823475 ,  H01L23/5226 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In a microelectronic component having conductive vias (114) passing through a substrate (104) and protruding above the substrate, conductive features (120E.A, 120E.B) are provided above the substrate that wrap around the conductive vias' protrusions (114′) to form capacitors, electromagnetic shields, and possibly other elements. Other features and embodiments are also provided.

公开(公告)号：US20180130717A1

公开(公告)日：2018-05-10

申请号：US15865842

申请日：2018-01-09

Applicant: INVENSAS CORPORATION

Inventor： Hong SHEN ,  Charles G. WOYCHIK ,  Arkalgud R. SITARAM

IPC: H01L23/055 ,  H01L23/498 ,  H01L21/48 ,  H01L21/56 ,  H01L21/768 ,  H01L23/04 ,  H01L23/14 ,  H01L23/31 ,  H01L23/367 ,  H01L23/48 ,  H01L21/288 ,  H01L25/00 ,  H01L25/065 ,  H01L23/00 ,  H01L23/538 ,  H01L23/10

CPC classification number: H01L23/055 ,  H01L21/2885 ,  H01L21/4803 ,  H01L21/486 ,  H01L21/56 ,  H01L21/561 ,  H01L21/76879 ,  H01L21/76897 ,  H01L23/04 ,  H01L23/10 ,  H01L23/147 ,  H01L23/3107 ,  H01L23/315 ,  H01L23/3675 ,  H01L23/481 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/49838 ,  H01L23/5389 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/50 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2225/06548 ,  H01L2225/06555 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2924/00012

Abstract: Dies (110) with integrated circuits are attached to a wiring substrate (120), possibly an interposer, and are protected by a protective substrate (410) attached to a wiring substrate. The dies are located in cavities in the protective substrate (the dies may protrude out of the cavities). In some embodiments, each cavity surface puts pressure on the die to strengthen the mechanical attachment of the die the wiring substrate, to provide good thermal conductivity between the dies and the ambient (or a heat sink), to counteract the die warpage, and possibly reduce the vertical size. The protective substrate may or may not have its own circuitry connected to the dies or to the wiring substrate. Other features are also provided.

公开(公告)号：US20160276294A1

公开(公告)日：2016-09-22

申请号：US15165837

申请日：2016-05-26

Applicant: Invensas Corporation

Inventor： Rajesh KATKAR ,  Laura Wills MIRKARIMI ,  Arkalgud SITARAM ,  Charles G. WOYCHIK

IPC: H01L23/00 ,  H01L21/66 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00

CPC classification number: H01L23/562 ,  H01L21/561 ,  H01L21/78 ,  H01L21/784 ,  H01L22/32 ,  H01L23/04 ,  H01L23/10 ,  H01L23/147 ,  H01L23/3121 ,  H01L23/3135 ,  H01L23/367 ,  H01L23/3675 ,  H01L23/49827 ,  H01L23/49838 ,  H01L24/05 ,  H01L24/06 ,  H01L24/09 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/73 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05568 ,  H01L2224/05569 ,  H01L2224/0603 ,  H01L2224/06181 ,  H01L2224/131 ,  H01L2224/1403 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16238 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/83192 ,  H01L2224/92125 ,  H01L2224/92225 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06548 ,  H01L2225/06586 ,  H01L2225/06589 ,  H01L2225/06596 ,  H01L2924/12042 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1615 ,  H01L2924/16152 ,  H01L2924/16153 ,  H01L2924/16176 ,  H01L2924/16235 ,  H01L2924/16251 ,  H01L2924/1632 ,  H01L2924/164 ,  H01L2924/167 ,  H01L2924/16788 ,  H01L2924/1679 ,  H01L2924/181 ,  H01L2924/351 ,  H01L2924/3511 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2924/00012

Abstract: An assembly with modules (110, 1310) containing integrated circuits and attached to a wiring substrate (120) is reinforced by one or more reinforcement frames (410) attached to the wiring substrate. The modules are located in openings (e.g. cavities and/or through-holes 414) in the reinforcement frame. Other features are also provided.

公开(公告)号：US20160254205A1

公开(公告)日：2016-09-01

申请号：US15151176

申请日：2016-05-10

Applicant: Invensas Corporation

Inventor： Liang WANG ,  Rajesh KATKAR ,  Charles G. WOYCHIK ,  Cyprian Emeka UZOH

IPC: H01L23/31 ,  H01L25/00 ,  H01L21/48 ,  H01L21/52 ,  H01L21/54 ,  H01L25/065 ,  H01L23/498

CPC classification number: H01L23/3178 ,  H01L21/4853 ,  H01L21/52 ,  H01L21/54 ,  H01L21/563 ,  H01L23/13 ,  H01L23/3157 ,  H01L23/49811 ,  H01L23/49827 ,  H01L23/49838 ,  H01L25/0655 ,  H01L25/50 ,  H01L2224/131 ,  H01L2224/16227 ,  H01L2224/26175 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/92125 ,  H01L2225/06517 ,  H01L2225/06555 ,  H01L2225/06593 ,  H01L2924/15153 ,  H01L2924/15156 ,  H01L2924/014

Abstract: A device and method for localizing underfill includes a substrate, a plurality of dies, and underfill material. The substrate includes a plurality of contacts and a plurality of cavities separated by a plurality of mesas. The plurality of dies is mounted to the substrate using the plurality of contacts. The underfill material is located between the substrate and the dies. The underfill material is localized into a plurality of regions using the mesas. Each of the contacts is located in a respective one of the cavities. In some embodiments, the substrate further includes a plurality of channels interconnecting the cavities. In some embodiments, the substrate further includes a plurality of intra-cavity mesas for further localizing the underfill material. In some embodiments, outer edges of a first one of the dies rest on first mesas located on edges of a first one of the cavities.

Abstract translation: 用于定位底部填充物的装置和方法包括基底，多个模具和底部填充材料。 衬底包括多个触点和由多个台面隔开的多个空腔。 使用多个触点将多个模具安装到基板。 底部填充材料位于基底和模具之间。 使用台面将底部填充材料定位到多个区域中。 每个触点位于相应的一个空腔中。 在一些实施例中，衬底还包括互连空腔的多个通道。 在一些实施例中，衬底还包括用于进一步定位底部填充材料的多个腔内台面。 在一些实施例中，第一模具的外边缘位于位于第一空腔的边缘上的第一台面上。

公开(公告)号：US20160163650A1

公开(公告)日：2016-06-09

申请号：US14704714

申请日：2015-05-05

Applicant: Invensas Corporation

Inventor： Guilian GAO ,  Cyprian Emeka UZOH ,  Charles G. WOYCHIK ,  Hong SHEN ,  Arkalgud R. SITARAM ,  Liang WANG ,  Akash AGRAWAL ,  Rajesh KATKAR

IPC: H01L23/538 ,  H01L25/00 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L23/5385 ,  H01L21/486 ,  H01L21/6835 ,  H01L23/147 ,  H01L23/15 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/49827 ,  H01L24/05 ,  H01L24/08 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L24/49 ,  H01L24/83 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/50 ,  H01L2221/68331 ,  H01L2224/0401 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/08225 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/32105 ,  H01L2224/32106 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48101 ,  H01L2224/48105 ,  H01L2224/48137 ,  H01L2224/48227 ,  H01L2224/49097 ,  H01L2224/73204 ,  H01L2924/00014 ,  H01L2924/15153 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18161 ,  H01L2924/351 ,  H01L2924/3511 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099

Abstract: Die (110) and/or undiced wafers and/or multichip modules (MCMs) are attached on top of an interposer (120) or some other structure (e.g. another integrated circuit) and are covered by an encapsulant (160). Then the interposer is thinned from below. Before encapsulation, a layer (410) more rigid than the encapsulant is formed on the interposer around the die to reduce or eliminate interposer dishing between the die when the interposer is thinned by a mechanical process (e.g. CMP). Other features are also provided.

Abstract translation: 模具（110）和/或未开封的晶片和/或多芯片模块（MCM）被附接在插入器（120）或一些其它结构（例如另一集成电路）的顶部上并被密封剂（160）覆盖。 然后插入器从下面变薄。 在封装之前，在封装周围的插入件周围形成比密封剂更刚性的层（410），以通过机械工艺（例如CMP）来减小或消除插入件在裸片间的凹陷。 还提供其他功能。

公开(公告)号：US20160013151A1

公开(公告)日：2016-01-14

申请号：US14328380

申请日：2014-07-10

Applicant: Invensas Corporation

Inventor： Hong SHEN ,  Charles G. WOYCHIK ,  Arkalgud R. SITARAM

IPC: H01L25/065 ,  H01L21/52 ,  H01L23/00

CPC classification number: H01L25/0652 ,  H01L21/52 ,  H01L21/561 ,  H01L23/3121 ,  H01L23/49811 ,  H01L23/49827 ,  H01L23/49844 ,  H01L23/5384 ,  H01L24/09 ,  H01L24/33 ,  H01L24/73 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L24/97 ,  H01L25/50 ,  H01L2224/08165 ,  H01L2224/08235 ,  H01L2224/12105 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73209 ,  H01L2224/73253 ,  H01L2224/73259 ,  H01L2224/8182 ,  H01L2224/85205 ,  H01L2224/9202 ,  H01L2224/92125 ,  H01L2224/92224 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06524 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06544 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2225/06589 ,  H01L2924/15153 ,  H01L2924/15311 ,  H01L2924/16235 ,  H01L2924/16251 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014

Abstract: Semiconductor integrated circuits (110) or assemblies are disposed at least partially in cavities between two interposers (120). Conductive vias (204M) pass through at least one of the interposers or at least through the interposer's substrate, and reach a semiconductor integrated circuit or an assembly. Other conductive vias (204M.1) pass at least partially through multiple interposers and are connected to conductive vias that reach, or are capacitively coupled to, a semiconductor IC or an assembly. Other features are also provided.

Abstract translation: 半导体集成电路（110）或组件至少部分地设置在两个插入件（120）之间的空腔中。 导电通孔（204M）通过至少一个插入件或至少穿过插入器的衬底，并到达半导体集成电路或组件。 其他导电通孔（204M.1）至少部分地通过多个插入件并且连接到到达或者电容耦合到半导体IC或组件的导电通孔。 还提供其他功能。

公开(公告)号：US20150262972A1

公开(公告)日：2015-09-17

申请号：US14288064

申请日：2014-05-27

Applicant: Invensas Corporation

Inventor： Rajesh KATKAR ,  Laura Wills MIRKARIMI ,  Arkalgud SITARAM ,  Charles G. WOYCHIK

IPC: H01L25/065 ,  H01L21/66 ,  H01L23/31 ,  H01L23/04 ,  H01L21/78 ,  H01L23/367 ,  H01L23/00

CPC classification number: H01L23/562 ,  H01L21/561 ,  H01L21/78 ,  H01L21/784 ,  H01L22/32 ,  H01L23/04 ,  H01L23/10 ,  H01L23/147 ,  H01L23/3121 ,  H01L23/3135 ,  H01L23/367 ,  H01L23/3675 ,  H01L23/49827 ,  H01L23/49838 ,  H01L24/05 ,  H01L24/06 ,  H01L24/09 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/73 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05568 ,  H01L2224/05569 ,  H01L2224/0603 ,  H01L2224/06181 ,  H01L2224/131 ,  H01L2224/1403 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16238 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/83192 ,  H01L2224/92125 ,  H01L2224/92225 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06548 ,  H01L2225/06586 ,  H01L2225/06589 ,  H01L2225/06596 ,  H01L2924/12042 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1615 ,  H01L2924/16152 ,  H01L2924/16153 ,  H01L2924/16176 ,  H01L2924/16235 ,  H01L2924/16251 ,  H01L2924/1632 ,  H01L2924/164 ,  H01L2924/167 ,  H01L2924/16788 ,  H01L2924/1679 ,  H01L2924/181 ,  H01L2924/351 ,  H01L2924/3511 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2924/00012

Abstract: An assembly with modules (110, 1310) containing integrated circuits and attached to a wiring substrate (120) is reinforced by one or more reinforcement frames (410) attached to the wiring substrate. The modules are located in openings (e.g. cavities and/or through-holes 414) in the reinforcement frame. Other features are also provided.

Abstract translation: 包含集成电路并附接到布线基板（120）的模块（110,1310）的组件由附接到布线基板的一个或多个加强框架（410）加强。 模块位于加强框架中的开口（例如空腔和/或通孔414）中。 还提供其他功能。

公开(公告)号：US20190157199A1

公开(公告)日：2019-05-23

申请号：US16238786

申请日：2019-01-03

Applicant: Invensas Corporation

Inventor： Cyprian Emeka UZOH ,  Charles G. WOYCHIK ,  Arkalgud R. SITARAM ,  Hong Shen ,  Zhuowen SUN ,  Liang WANG ,  Guilian GAO

IPC: H01L23/522 ,  H01L21/768 ,  H01L21/8234 ,  H01L49/02

CPC classification number: H01L23/5223 ,  H01L21/76802 ,  H01L21/76877 ,  H01L21/823431 ,  H01L21/823475 ,  H01L23/5226 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In a microelectronic component having conductive vias (114) passing through a substrate (104) and protruding above the substrate, one or more conductive features (120E.A, 120E.B, or both) are provided above the substrate that wrap around the conductive vias' protrusions (114′) to form capacitors, electromagnetic shields, and possibly other elements. Other features and embodiments are also provided.