公开(公告)号：US20100061132A1

公开(公告)日：2010-03-11

申请号：US12516690

申请日：2006-12-07

Applicant: Yoshihisa Fujisaki ,  Satoru Hanzawa ,  Kenzo Kurotsuchi ,  Nozomu Matsuzaki ,  Norikatsu Takaura

Inventor： Yoshihisa Fujisaki ,  Satoru Hanzawa ,  Kenzo Kurotsuchi ,  Nozomu Matsuzaki ,  Norikatsu Takaura

IPC: G11C11/00 ,  H01L45/00 ,  G11C5/02 ,  G11C7/00

CPC classification number: H01L45/144 ,  G11C13/0004 ,  G11C13/0069 ,  G11C2213/75 ,  H01L27/2436 ,  H01L27/2463 ,  H01L27/2472 ,  H01L45/06 ,  H01L45/1233

Abstract: In a semiconductor storage device such as a phase change memory, a technique which can realize high integration is provided. The semiconductor storage device includes a phase change thin film 101 having two stable phases of a crystal state with low electric resistance and an amorphous state with high electric resistance, upper plug electrodes 102 and 103 provided on one side of the phase change thin film 101, a lower electrode 104 provided on the other side of the phase change thin film 101, a selecting transistor 114 whose drain/source terminals are connected to the upper plug electrode 102 and the lower electrode 104, and a selecting transistor 115 whose drain/source terminals are connected to the upper plug electrode 103 and the lower electrode 104, and a first memory cell is configured with the selecting transistor 114 and a phase change region 111 in the phase change thin film 101 sandwiched between the upper plug electrode 102 and the lower electrode 104, and a second memory cell is configured with the selecting transistor 115 and a phase change region 112 in the phase change thin film 101 sandwiched between the upper plug electrode 103 and the lower electrode 104.

Abstract translation: 在诸如相变存储器的半导体存储装置中，提供了可以实现高集成度的技术。 半导体存储装置包括：具有低电阻的晶体状态的两个稳定相和具有高电阻的非晶态的相变薄膜101，设置在相变薄膜101一侧的上部插塞电极102和103， 设置在相变薄膜101的另一侧的下部电极104，漏极/源极端子连接到上部插塞电极102和下部电极104的选择晶体管114，以及选择晶体管115，其漏极/源极端子 连接到上插头电极103和下电极104，并且第一存储单元配置有夹在上插头电极102和下电极之间的相变薄膜101中的选择晶体管114和相变区域111 104，并且第二存储单元配置有夹在b中的相变薄膜101中的选择晶体管115和相变区域112 在上塞电极103和下电极104之间。

公开(公告)号：US07385838B2

公开(公告)日：2008-06-10

申请号：US11715918

申请日：2007-03-09

Applicant: Kenichi Osada ,  Riichiro Takemura ,  Norikatsu Takaura ,  Nozomu Matsuzaki ,  Takayuki Kawahara

Inventor： Kenichi Osada ,  Riichiro Takemura ,  Norikatsu Takaura ,  Nozomu Matsuzaki ,  Takayuki Kawahara

IPC: G11C11/00

CPC classification number: G11C13/0004 ,  G11C13/0033 ,  G11C13/004 ,  G11C13/0064 ,  G11C13/0069 ,  G11C16/3454 ,  G11C2013/0092 ,  G11C2213/82

Abstract: A semiconductor device comprises a plurality of memory cells, a central processing unit, a timer circuit which times a RESET time, and a timer circuit which times a SET time. A threshold voltage of an NMOS transistor of each memory cell is lower than that of the peripheral circuit, thereby easily executing a RESET operation. The direction of a flowing current is changed across the RESET operation and the SET operation, and the bit lines are activated at high speed, thus preventing system malfunctions. Further, the semiconductor device can overcome such problems as a wrong write operation and data destruction, resulting from the variation in the CMOS transistors when operating phase change elements with minimum size CMOS transistors at a core voltage (e.g. 1.2 V). According to the present invention, stable operations can be realized at a low voltage, using minimum-size cell transistors.

Abstract translation: 一种半导体器件包括多个存储单元，一个中央处理单元，一个复位时间的定时器电路，以及一个定时器电路，该定时器电路需要一个SET时间。 每个存储单元的NMOS晶体管的阈值电压低于外围电路的阈值电压，从而容易地执行复位操作。 流过电流的方向在复位操作和SET操作中改变，位线被高速激活，从而防止系统故障。 此外，半导体器件可以克服由于核心电压（例如1.2V）下操作具有最小尺寸CMOS晶体管的相位变化元件时CMOS晶体管的变化而导致的错误写入操作和数据破坏的问题。 根据本发明，可以使用最小尺寸的单元晶体管在低电压下实现稳定的操作。

公开(公告)号：US20070235710A1

公开(公告)日：2007-10-11

申请号：US11630241

申请日：2005-07-04

Applicant: Nozomu Matsuzaki ,  Motoyasu Terao

Inventor： Nozomu Matsuzaki ,  Motoyasu Terao

IPC: H01L47/00

CPC classification number: H01L27/101 ,  H01L27/2436 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/128 ,  H01L45/1675

Abstract: In non-volatile storage device using a variable resistance material, when a crystal state and a noncrystalline state co-exists in the variable resistance material, a crystallization time is shorted, resulting in decrease of the time to maintain information stored. Heat radiation is not rapidly performed during rewriting and thus it takes a long time to complete the rewriting due to a low thermal conductivity of a material contacting the variable resistance material. According to the present invention, a contact area between a variable resistance material and a lower electrode, and a contact area between the variable resistance material and an upper electrode are made equal to each other, thereby unifying a current path. The invention provides a structure in which a material having a high thermal conductivity is disposed so as to contact a sidewall of the variable resistance material, and its end portion is made to contact the lower electrode as well.

Abstract translation: 在使用可变电阻材料的非挥发性存储装置中，当晶体状态和非结晶状态共存于可变电阻材料中时，结晶时间短路，导致维持信息存储的时间减少。 在重写期间热辐射不能快速进行，因此由于接触可变电阻材料的材料的低导热性而需要很长时间来完成重写。 根据本发明，使可变电阻材料与下部电极之间的接触面积与可变电阻材料与上部电极之间的接触面积相等，从而使电流路径均匀化。 本发明提供了一种结构，其中具有高导热性的材料被设置成接触可变电阻材料的侧壁，并且其端部也与下电极接触。

公开(公告)号：US07180793B2

公开(公告)日：2007-02-20

申请号：US11156538

申请日：2005-06-21

Applicant: Nozomu Matsuzaki ,  Hideaki Kurata ,  Takayuki Kawahara

Inventor： Nozomu Matsuzaki ,  Hideaki Kurata ,  Takayuki Kawahara

IPC: G11C7/10

CPC classification number: G11C16/24 ,  G11C7/065 ,  G11C7/067 ,  G11C7/18 ,  G11C16/26 ,  G11C16/28 ,  G11C2207/002 ,  H01L27/0207 ,  H01L27/105 ,  H01L27/11526

Abstract: A semiconductor non-volatile storage device of the present invention which lets a memory cell directly drive up to a local bit line, wherein the output of the local bit line is received by a gate electrode of a separately-provided signal amplifying transistor, and the signal amplifying transistor is used to drive a global bit line having a large load capacity. Since an amplifying transistor having a drive power higher than a memory cell drives the parasitic capacity of a global bit line, information stored in a memory cell can be read out at high speed. Therefore, the storage device is used for storing program codes for controlling microcomputers or the like to thereby enhance a system performance.

Abstract translation: 本发明的半导体非易失性存储装置，其使存储器单元直接驱动到本地位线，其中本地位线的输出由单独提供的信号放大晶体管的栅电极接收，并且 信号放大晶体管用于驱动具有大负载能力的全局位线。 由于具有高于存储单元的驱动功率的放大晶体管驱动全局位线的寄生电容，因此可以高速读出存储在存储单元中的信息。 因此，存储装置用于存储用于控制微型计算机等的程序代码，从而提高系统性能。

公开(公告)号：US20060220100A1

公开(公告)日：2006-10-05

申请号：US11415129

申请日：2006-05-02

Applicant: Toshihiro Tanaka ,  Yukiko Umemoto ,  Mitsuru Hiraki ,  Yutaka Shinagawa ,  Masamichi Fujito ,  Kazufumi Suzukawa ,  Hiroyuki Tanikawa ,  Takashi Yamaki ,  Yoshiaki Kamigaki ,  Shinichi Minami ,  Kozo Katayama ,  Nozomu Matsuzaki

Inventor： Toshihiro Tanaka ,  Yukiko Umemoto ,  Mitsuru Hiraki ,  Yutaka Shinagawa ,  Masamichi Fujito ,  Kazufumi Suzukawa ,  Hiroyuki Tanikawa ,  Takashi Yamaki ,  Yoshiaki Kamigaki ,  Shinichi Minami ,  Kozo Katayama ,  Nozomu Matsuzaki

IPC: H01L29/788

CPC classification number: G11C16/26 ,  G11C5/025 ,  G11C8/08 ,  G11C16/04 ,  G11C16/0425 ,  G11C16/0433 ,  G11C16/08 ,  G11C16/24 ,  G11C16/30 ,  H01L21/28 ,  H01L21/28273 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11526 ,  H01L27/11546 ,  H01L29/42328 ,  H01L29/42332 ,  H01L29/4234 ,  H01L29/66825 ,  H01L29/7885 ,  H01L29/792

Abstract: A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section. Assuming that the thickness of a gate insulating film of the second transistor section is defined as tc and the thickness of a gate insulating film of the first transistor section is defined as tm, they have a relationship of tc

Abstract translation: 半导体器件包括多个非易失性存储单元（1）。 每个非易失性存储单元包括用于信息存储的MOS型第一晶体管部分（3）和选择第一晶体管部分的MOS型第二晶体管部分（4）。 第二晶体管部分具有连接到位线的位线电极（16）和连接到控制栅极控制线的控制栅电极（18）。 第一晶体管部分具有连接到源极线的源极线电极（10），连接到存储器栅极控制线的存储栅电极（14）和直接位于存储栅电极下方的电荷存储区域（11）。 第二晶体管部分的栅极耐受电压低于第一晶体管部分的栅极耐受电压。 假设第二晶体管部分的栅极绝缘膜的厚度被定义为tc，并且第一晶体管部分的栅极绝缘膜的厚度被定义为tm，它们具有tc

公开(公告)号：US20060051977A1

公开(公告)日：2006-03-09

申请号：US11266430

申请日：2005-11-04

Applicant: Tetsuo Adachi ,  Masataka Kato ,  Toshiaki Nishimoto ,  Nozomu Matsuzaki ,  Takashi Kobayashi ,  Yoshimi Sudou ,  Toshiyuki Mine

Inventor： Tetsuo Adachi ,  Masataka Kato ,  Toshiaki Nishimoto ,  Nozomu Matsuzaki ,  Takashi Kobayashi ,  Yoshimi Sudou ,  Toshiyuki Mine

IPC: H01L21/31

CPC classification number: H01L21/28273 ,  G11C11/5628 ,  G11C16/0466 ,  G11C16/10 ,  G11C16/3454 ,  H01L21/28061 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11536 ,  H01L27/11546 ,  H01L29/6659 ,  H01L29/66825 ,  H01L29/7833

Abstract: A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating film, a control gate electrode, and source and drain regions of the second conduction type arranged in a matrix, with a shallow isolation structure for isolating the memory cells. When using a shallow structure buried with an insulating film for element isolation, the isolation withstand voltage in fine regions can be prevented from lowering and the variation in threshold level of selective transistors can be reduced. When the memory cells in a memory mat are divided by means of selective transistors, the disturb resistance of the memory cells can be improved.

公开(公告)号：US20050258474A1

公开(公告)日：2005-11-24

申请号：US10484578

申请日：2002-07-22

Applicant: Toshihiro Tanaka ,  Yukiko Umemoto ,  Mitsuru Hiraki ,  Yutaka Shinagawa ,  Masamichi Fujito ,  Kazufumi Suzukawa ,  Hiroyuki Tanikawa ,  Takashi Yamaki ,  Yoshiaki Kamigaki ,  Shinichi Minami ,  Kozo Katayama ,  Nozomu Matsuzaki

Inventor： Toshihiro Tanaka ,  Yukiko Umemoto ,  Mitsuru Hiraki ,  Yutaka Shinagawa ,  Masamichi Fujito ,  Kazufumi Suzukawa ,  Hiroyuki Tanikawa ,  Takashi Yamaki ,  Yoshiaki Kamigaki ,  Shinichi Minami ,  Kozo Katayama ,  Nozomu Matsuzaki

IPC: G11C16/04 ,  H01L21/28 ,  H01L21/336 ,  H01L21/8247 ,  H01L27/105 ,  H01L29/423 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792

CPC classification number: G11C16/26 ,  G11C5/025 ,  G11C8/08 ,  G11C16/04 ,  G11C16/0425 ,  G11C16/0433 ,  G11C16/08 ,  G11C16/24 ,  G11C16/30 ,  H01L21/28 ,  H01L21/28273 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11526 ,  H01L27/11546 ,  H01L29/42328 ,  H01L29/42332 ,  H01L29/4234 ,  H01L29/66825 ,  H01L29/7885 ,  H01L29/792

Abstract: A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section. Assuming that the thickness of a gate insulating film of the second transistor section is defined as tc and the thickness of a gate insulating film of the first transistor section is defined as tm, they have a relationship of tc

Abstract translation: 半导体器件包括多个非易失性存储单元（1）。 每个非易失性存储单元包括用于信息存储的MOS型第一晶体管部分（3）和选择第一晶体管部分的MOS型第二晶体管部分（4）。 第二晶体管部分具有连接到位线的位线电极（16）和连接到控制栅极控制线的控制栅电极（18）。 第一晶体管部分具有连接到源极线的源极线电极（10），连接到存储器栅极控制线的存储栅电极（14）和直接位于存储栅电极下方的电荷存储区域（11）。 第二晶体管部分的栅极耐受电压低于第一晶体管部分的栅极耐受电压。 假设第二晶体管部分的栅极绝缘膜的厚度被定义为tc，并且第一晶体管部分的栅极绝缘膜的厚度被定义为tm，它们具有tc

公开(公告)号：US20050189579A1

公开(公告)日：2005-09-01

申请号：US11107826

申请日：2005-04-18

Applicant: Tetsuo Adachi ,  Masataka Kato ,  Toshiaki Nishimoto ,  Nozomu Matsuzaki ,  Takashi Kobayashi ,  Yoshimi Sudou ,  Toshiyuki Mine

Inventor： Tetsuo Adachi ,  Masataka Kato ,  Toshiaki Nishimoto ,  Nozomu Matsuzaki ,  Takashi Kobayashi ,  Yoshimi Sudou ,  Toshiyuki Mine

IPC: H01M10/0525 ,  G11C11/56 ,  G11C16/04 ,  G11C16/10 ,  G11C16/34 ,  G11C27/00 ,  H01L21/00 ,  H01L21/28 ,  H01L21/283 ,  H01L21/336 ,  H01L21/8247 ,  H01L27/105 ,  H01L27/115 ,  H01L29/76 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H01L29/94 ,  H01L31/062 ,  H01L31/119 ,  H01M2/16

CPC classification number: H01L21/28273 ,  G11C11/5628 ,  G11C16/0466 ,  G11C16/10 ,  G11C16/3454 ,  H01L21/28061 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11536 ,  H01L27/11546 ,  H01L29/6659 ,  H01L29/66825 ,  H01L29/7833

Abstract: A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating film, a control gate electrode, and source and drain regions of the second conduction type arranged in a matrix, with a shallow isolation structure for isolating the memory cells. When using a shallow structure buried with an insulating film for element isolation, the isolation withstand voltage in fine regions can be prevented from lowering and the variation in threshold level of selective transistors can be reduced. When the memory cells in a memory mat are divided by means of selective transistors, the disturb resistance of the memory cells can be improved.

公开(公告)号：US06617632B2

公开(公告)日：2003-09-09

申请号：US10005300

申请日：2001-12-07

Applicant: Yasuhiro Taniguchi ,  Kazuyoshi Shiba ,  Nozomu Matsuzaki ,  Hidenori Takada ,  Hitoshi Kume ,  Shoji Shukuri

Inventor： Yasuhiro Taniguchi ,  Kazuyoshi Shiba ,  Nozomu Matsuzaki ,  Hidenori Takada ,  Hitoshi Kume ,  Shoji Shukuri

IPC: H01L27108

CPC classification number: H01L27/11526 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11546

Abstract: A parallel connection-type nonvolatile memory semiconductor device comprises a plurality of memory cells disposed on a semiconductor substrate in matrix form, each including a gate insulating film, a floating gate electrode, an interlayer film and a control gate electrode successively formed so as to cover a channel region on a main surface of the semiconductor substrate, of a first conductivity type; a second conductivity type source and drain regions formed on the semiconductor substrate on both sides opposite to each other, of the floating gate electrode so as to interpose a channel region located under the floating gate electrode therebetween; a first semiconductor region which is adjacent to the drain region and formed by introducing a second conductivity type impurity in the direction of the channel region placed under the floating gate electrode from an end on the drain side, of the floating gate electrode, and which is substantially lower than the drain region in impurity concentration; and a punch-through stopper layer which is adjacent to the first semiconductor region and formed by introducing a first conductivity type impurity in the direction of the channel region placed under the floating gate electrode from an end on the drain side, of the floating gate electrode, and which is substantially higher than the channel region in impurity concentration, and wherein the source regions and drain regions of the plurality of nonvolatile memory cells are parallel-connected to one another in respective columns, word lines some of which constitute the control gate electrodes of the plurality of nonvolatile memory cells, extend in respective rows, a voltage is applied to at least one word line, which is set so as to serve as a selected word line, and when carriers are stored in a floating gate electrode of each selected memory cell, a negative voltage is applied to other non-selected word lines other than the selected word line.

公开(公告)号：US06459619B1

公开(公告)日：2002-10-01

申请号：US09986081

申请日：2001-11-07

Applicant: Nozomu Matsuzaki ,  Kazuyoshi Shiba ,  Yasuhiro Taniguchi ,  Toshihiro Tanaka ,  Yutaka Shinagawa

Inventor： Nozomu Matsuzaki ,  Kazuyoshi Shiba ,  Yasuhiro Taniguchi ,  Toshihiro Tanaka ,  Yutaka Shinagawa

IPC: G11C1604

CPC classification number: G11C16/3409 ,  G11C8/08 ,  G11C16/12 ,  G11C16/3404

Abstract: A method for settling threshold voltages of word lines on a predetermined level in an erasing processing of a non-volatile semiconductor memory device so as to speed up the erasing processing. A word latch circuit is provided for each word line and the threshold voltage of each memory cell is managed for-each word line in a selected memory block. Each word latch circuit is shared by a plurality of word lines so as to reduce the required chip area. A rewriting voltage is set for each finished non-volatile memory and the voltage information is stored in the boot area of the non-volatile memory, so that the voltage is recognized by the system each time the system is powered.

Abstract translation: 一种用于在非易失性半导体存储器件的擦除处理中在预定电平上建立字线的阈值电压的方法，以加速擦除处理。 为每个字线提供字锁存电路，并且每个存储器单元的阈值电压被管理在所选存储器块中的每个字线。 每个字锁存电路由多个字线共享，以便减少所需的芯片面积。 为每个完成的非易失性存储器设置重写电压，并且电压信息被存储在非易失性存储器的引导区域中，使得每当系统供电时，系统识别电压。