公开(公告)号：US08884608B2

公开(公告)日：2014-11-11

申请号：US14351055

申请日：2012-10-10

Applicant: Purdue Research Foundation

Inventor： Corey P. Neu ,  Babak Ziaie ,  Teimour Maleki-Jafarabadi ,  Charilaos Mousoulis

IPC: G01R33/12 ,  G01R33/20 ,  G01N24/08 ,  G01Q70/16 ,  G01Q30/02 ,  G01R33/48

CPC classification number: G01R33/4808 ,  G01N24/08 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/16 ,  G01R33/341 ,  G01R33/46

Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.

Abstract translation: 本公开公开了一种结合磁共振和原子力显微技术的优点的新器件，系统和方法的开发，以及用于广泛的生物医学和临床研究者的新器件，系统和方法的实用性。 根据本公开的一个方面，公开了一种用于微尺度光谱的装置。 微型光谱装置包括具有远端，近端，顶表面和底表面的光束，其中光束附接到近端处的锚固件，并且还包括从底表面基本垂直延伸的尖端 在远端处或附近，以及具有至少一个匝的线圈，其安装到梁的顶表面处，或者与尖端相对的远端附近，其中线圈能够传输和感测电磁辐射。

公开(公告)号：US08695111B2

公开(公告)日：2014-04-08

申请号：US13275451

申请日：2011-10-18

Applicant: Chung Hoon Lee

Inventor： Chung Hoon Lee

IPC: G01Q70/10 ,  G01Q70/16 ,  G01Q70/14

CPC classification number: G01Q70/10 ,  G01N23/00 ,  G01Q60/38 ,  G01Q70/14 ,  G01Q70/16

Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.

Abstract translation: 用于制备具有氮化硅悬臂的原子力显微镜探针的方法和用于高速AFM成像的具有高谐振频率和低弹簧常数的集成单晶硅四面体尖端的方法。

公开(公告)号：US08584261B2

公开(公告)日：2013-11-12

申请号：US13545197

申请日：2012-07-10

Applicant: Masafumi Watanabe ,  Hiroumi Momota

Inventor： Masafumi Watanabe ,  Hiroumi Momota

IPC: G01Q70/16 ,  G01Q70/08 ,  G01Q60/22 ,  G01Q70/10 ,  G01Q60/38

CPC classification number: G01Q60/22 ,  G01Q60/38 ,  G01Q70/10

Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.

Abstract translation: 在扫描探针显微镜等中使用的具有通过硅工艺中的各向异性蚀刻形成的梯形截面形状的悬臂中，在不直接测量厚度的情况下确定悬臂弹簧常数。 基于梯形截面形状的上基底和下基底长度以及通过各向异性蚀刻产生的表面的几何规则度来确定悬臂厚度。 然后，基于悬臂厚度，悬臂长度和杨氏模量确定悬臂弹簧常数。

公开(公告)号：US20110107472A1

公开(公告)日：2011-05-05

申请号：US12756131

申请日：2010-04-07

Applicant: XIAODONG HAN ,  PAN LIU ,  YONGHAI YUE ,  ZE ZHANG

Inventor： XIAODONG HAN ,  PAN LIU ,  YONGHAI YUE ,  ZE ZHANG

IPC: G01Q70/02 ,  G01Q70/16

CPC classification number: H01J37/20 ,  G01N3/00 ,  G01N23/00 ,  G01N2203/0286 ,  H01J37/26 ,  H01J2237/20271 ,  H01J2237/2062

Abstract: A sensor for quantitative test electromechanical properties and microstructure of nano-materials and a manufacturing method for the sensor are provided. The sensor comprises a suspended structure, pressure-sensitive resistor cantilevers, support beams, bimetallic strip and other components. When the bimetallic strip produces bending deformation, one of the pressure-sensitive resistor cantilevers is actuated and then stretches the low-dimensional nano-materials which drive the other pressure-sensitive resistor cantilever to bend. Through signal changes are outputted by the Wheatstone bridge, the variable stresses of low-dimensional nano-materials are obtained. Meanwhile, the variable strains of low-dimensional nano-materials are obtained by the horizontal displacements between two cantilevers, so the stress-strain curves of low-dimensional nano-materials are worked out. When the low-dimensional nano-materials are measured in the power state, the voltage-current curves are also obtained. In addition, by the help of high resolution imaging system in the transmission electron microscopy, the mechanical-electrical-microstructure relationship of the nano-materials can be recorded in situ and in atomic lattice resolution.

Abstract translation: 提供了用于定量测试的用于纳米材料的机电性能和微结构的传感器以及用于传感器的制造方法。 传感器包括悬挂结构，压敏电阻悬臂，支撑梁，双金属条等部件。 当双金属条产生弯曲变形时，压敏电阻悬臂之一被致动，然后拉伸驱动另一个压敏电阻悬臂弯曲的低维纳米材料。 通过惠斯通电桥输出的信号变化，得到了低维纳米材料的可变应力。 同时，通过两个悬臂之间的水平位移获得了低维纳米材料的可变应变，得出了低维纳米材料的应力 - 应变曲线。 当在功率状态下测量低维纳米材料时，也获得电压 - 电流曲线。 此外，通过透射电子显微镜中的高分辨率成像系统的帮助，可以原位和原子晶格分辨率记录纳米材料的机械 - 电 - 微结构关系。

公开(公告)号：US07913544B1

公开(公告)日：2011-03-29

申请号：US11985622

申请日：2007-11-15

Applicant: Ami Chand

Inventor： Ami Chand

IPC: G01Q70/16

CPC classification number: G01Q70/16 ,  G01Q70/10

Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.

Abstract translation: 本发明涉及扫描探针，其中悬臂通过集成触笔基座接触触针，以及用于制造这种探针的方法。 与其他类型的扫描探针相比，该探针提供了许多优点，以避免在某些应用中需要柔软的反射涂层，并且提供尖锐的触针尖端的简单制造，关于功能化尖端的灵活性以及最小的热漂移 减少双压缩效应。 这些特征的优点有助于通常采集样品的高分辨率图像，特别是在液体中。

公开(公告)号：US07814566B2

公开(公告)日：2010-10-12

申请号：US11737768

申请日：2007-04-20

Applicant: Wei-Su Chen

Inventor： Wei-Su Chen

IPC: G01Q70/16

CPC classification number: G03F7/405 ,  B82Y15/00 ,  Y10S977/875 ,  Y10T428/249979

Abstract: A fabricating method of a structure having nano-hole is provided. The fabricating method includes: providing a substrate, forming a photoresist layer on the substrate, forming an opening, and performing a heat treatment process on the photoresist layer to shrink the opening to form a nano-hole. The structure having nano-hole fabricated by the method of the present invention can be used to fabricate a nano-tip having a diameter of tip-body of no more than 10 nm, high aspect ratio, and a uniform diameter of tip-body.

Abstract translation: 提供了具有纳米孔结构的制造方法。 制造方法包括：提供基板，在基板上形成光致抗蚀剂层，形成开口，并在光致抗蚀剂层上进行热处理工艺以收缩开口以形成纳米孔。 通过本发明的方法制造的具有纳米孔的结构可以用于制造尖端体直径不大于10nm，高纵横比和尖端体直径均匀的纳米尖端。

公开(公告)号：US20100154085A1

公开(公告)日：2010-06-17

申请号：US11887348

申请日：2006-03-30

Applicant: Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

Inventor： Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

IPC: G01Q70/14 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q60/60

CPC classification number: G01Q60/06 ,  G01Q60/60

Abstract: A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed. A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope. Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.

Abstract translation: 公开了包括原子力显微镜和近场光学显微镜并且能够进行电化学测量并且用于显微镜的悬臂的显微镜。 用作原子力显微镜的探针的尖锐透光材料涂覆有金属层; 金属层进一步涂覆有绝缘层; 绝缘层仅在远端被去除以暴露金属层; 使用轻微暴露的金属层作为工作电极; 该探针不仅可以用作原子力显微镜和近场光学显微镜的探针，而且可以用作电化学显微镜的电极。 因此，显微镜可以具有原子力显微镜，近场光学显微镜和电化学显微镜的功能。

公开(公告)号：US20050214966A1

公开(公告)日：2005-09-29

申请号：US10513170

申请日：2003-04-26

Applicant: Hong-Sik Park ,  Hyun-Jung Shin ,  Ju-Hwan Jung

Inventor： Hong-Sik Park ,  Hyun-Jung Shin ,  Ju-Hwan Jung

IPC: G01Q60/60 ,  G01Q70/16 ,  G01Q80/00 ,  G01Q90/00 ,  H01L29/78 ,  H01L21/00

CPC classification number: G01Q60/30

Abstract: Provided is a method of fabricating a probe for a scanning probe microscope (SPM) having a field effect transistor (FET) channel structure utilizing a self-aligned fabrication. The provided method includes a first step of forming a first-shaped mask layer on a substrate and forming a source region and a drain region in regions of the substrate except for the mask layer; a second step of patterning a first-shaped photoresist in a perpendicular direction to the mask layer and performing an etching process to form a second-shaped mask layer; and a third step of etching the regions of the substrate except for the mask layer to form a probe. The provided method aligns the center of a tip with the center of a channel existing between the source region and the drain region to realize a tip having a size of tens of nanometers. Thus, a nano-device can be easily manufactured using the probe having the tip.

Abstract translation: 提供一种制造具有利用自对准制造的场效应晶体管（FET）沟道结构的扫描探针显微镜（SPM）的探针的方法。 所提供的方法包括在衬底上形成第一形状掩模层并在除了掩模层之外的衬底的区域中形成源区和漏区的第一步骤; 在与掩模层垂直的方向上图案化第一形状的光致抗蚀剂并执行蚀刻工艺以形成第二形掩模层的第二步骤; 以及蚀刻除了掩模层之外的衬底的区域以形成探针的第三步骤。 所提供的方法将尖端的中心与存在于源极区域和漏极区域之间的通道的中心对准，以实现具有数十纳米尺寸的尖端。 因此，可以使用具有尖端的探针容易地制造纳米器件。

公开(公告)号：US20050172703A1

公开(公告)日：2005-08-11

申请号：US10616453

申请日：2003-07-08

Applicant: Victor Kley

Inventor： Victor Kley

IPC: G01B7/31 ,  G01B7/34 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/00 ,  G01Q30/02 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q60/58 ,  G01Q70/02 ,  G01Q70/16 ,  G01Q80/00 ,  G02B21/00 ,  G03F1/72 ,  G03F1/84 ,  G03F7/20 ,  G11B5/00 ,  G11B5/23 ,  G11B5/31 ,  G11B9/00 ,  G11B11/12 ,  G11B11/16 ,  H02N1/00 ,  G01B5/28 ,  H01J5/16

CPC classification number: G01Q60/58 ,  G01B7/31 ,  G01N23/225 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q80/00 ,  G02B21/002 ,  G03F1/72 ,  G03F1/84 ,  G03F7/2049 ,  G03F7/704 ,  G03F7/70616 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3166 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1436 ,  G11B9/1445 ,  G11B9/1454 ,  G11B9/149 ,  G11B11/12 ,  G11B11/16 ,  G11B2005/0002 ,  G11B2005/0021 ,  H02N1/006 ,  Y10S977/855 ,  Y10S977/871

Abstract: A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

Abstract translation: 使用SPM技术和技术的扫描探针显微镜（SPM）检查和/或修改系统。 该系统包括用于检查和/或修改物体的各种类型的微结构化SPM探针。 SPM系统的组件包括微结构校准结构。 由于磨损或由于制造错误，探头可能有缺陷。 校准结构的各种参考测量用探针进行，反之亦然，以校准它。 SPM系统的部件还包括一个或多个尖端加工结构。 在这些结构中，SPM探针的尖端的材料可以通过用尖端加工结构进行研磨研磨和化学研磨尖端的材料来加工。

公开(公告)号：US20050146046A1

公开(公告)日：2005-07-07

申请号：US11015715

申请日：2004-12-16

Applicant: Marc Fouchier

Inventor： Marc Fouchier

IPC: G01Q30/20 ,  G01Q60/24 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/16 ,  G01R1/073 ,  H01L21/66 ,  H01L21/301

CPC classification number: G01Q60/38 ,  Y10T29/42 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49151 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A method for producing probes for atomic force microscopy comprises producing, on a surface of one side of a semiconductor substrate, one or more moulds for the production of one or more probe tips. One or more probe configurations and at least one set of a probe tip and a cantilever are also produced on the side of the substrate, wherein each configuration comprises a contact region for attachment of a holder. The surface area of each contact region is smaller in size than the surface area of the holder. The method further includes attaching one or more holders to the contact region(s), and releasing the probe configuration and the holder from the substrate by under-etching the probe configuration from the side of the substrate on which the probe configuration is produced.

Abstract translation: 用于制造原子力显微镜的探针的方法包括在半导体衬底的一侧的表面上制造用于生产一个或多个探针尖端的一个或多个模具。 一个或多个探针构型和至少一组探针尖端和悬臂也在衬底的侧面上产生，其中每个构型包括用于固定器的附接的接触区域。 每个接触区域的表面积的尺寸小于保持器的表面积。 该方法还包括将一个或多个保持器附接到接触区域，以及通过从其上生成探针配置的衬底的侧面下蚀刻探针构型而将探针构型和保持器从衬底释放。