INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM
    15.
    发明申请
    INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM 有权
    阻尼支撑系统的起动器和方法

    公开(公告)号:US20160093518A1

    公开(公告)日:2016-03-31

    申请号:US14788783

    申请日:2015-06-30

    IPC分类号: H01L21/67 B32B43/00

    摘要: Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.

    摘要翻译: 提供了一种用于剥离晶片支撑系统的引发剂和方法。 用于剥离晶片支撑系统的启动器包括具有上表面的旋转卡盘,其上包括载体晶片的晶片支撑系统(WSS),器件晶片和用于将载体晶片和器件晶片接合的胶层 彼此坐下来旋转晶片支撑系统,检测模块检测胶层的高度和厚度;以及激光模块,其通过用激光照射胶层的侧表面而在胶层上产生断裂部分 胶层的高度和厚度的基础。

    ENHANCED HEAT SYSTEM FOR BGA/CGA REWORK
    17.
    发明申请
    ENHANCED HEAT SYSTEM FOR BGA/CGA REWORK 审中-公开
    BGA / CGA REWORK加强系统

    公开(公告)号:US20060202001A1

    公开(公告)日:2006-09-14

    申请号:US10906824

    申请日:2005-03-08

    IPC分类号: H02H7/00 B23K1/018 H05K7/06

    摘要: A method and system for heating a circuit board component to an approximately uniform temperature sufficient to reflow the connections between the circuit board component and the circuit board. The method and system include a supplemental gas heater having a diffuser plate. The circuit board is placed against the diffuser plate and heated gas is channeled through openings in the diffuser plate into vias in the circuit board to heat a circuit board component connected on the opposite side of the circuit board. Heated gas can be channeled through selected vias towards predetermined areas and/or specified connections such as towards those areas or connections where there is a temperature differential greater than approximately 10 degrees Celsius compared to other areas or connections across the circuit board component. Hot gas can be channeled through selected vias by baffling or patterning the diffuser plate, accordingly.

    摘要翻译: 一种用于将电路板部件加热到大致均匀的温度以足以回流电路板部件和电路板之间的连接的方法和系统。 该方法和系统包括具有扩散板的补充气体加热器。 将电路板放置在扩散板上,将加热的气体通过扩散板中的开口引导到电路板中的通孔中,以加热连接在电路板相对侧的电路板部件。 与电路板部件上的其他区域或连接相比,加热气体可以通过选定的通孔被引导到预定区域和/或指定的连接,例如朝向与大于约10摄氏度的温度差的那些区域或连接。 因此,热气体可以通过选择的通孔引导通过挡板或图案化扩散板。

    SUBSTRATE DEBONDING FROM BONDED PART
    20.
    发明公开

    公开(公告)号:US20240213214A1

    公开(公告)日:2024-06-27

    申请号:US18145462

    申请日:2022-12-22

    IPC分类号: H01L23/00

    摘要: A method for debonding a bonded part includes attaching a handle to a third side of a first substrate of the bonded part with an adhesive layer. The bonded part has a plurality of inter-substrate bond structures that couple a first side of the first substrate to a second side of a second substrate. The third side of the first substrate is opposite the first side. The first substrate and the second substrate have different thicknesses. The method includes absorbing a solvent into the adhesive layer, swelling the adhesive layer in response to the absorbing of the solvent, bending the first substrate in response to the swelling, and breaking a plurality of thermocompression bonds between the plurality of inter-substrate bond structures and the second side of the second substrate in response to the bending to debond the first substrate.