FORMING METAL CAP LAYER OVER THROUGH-GLASS-VIAS (TGVs)

    公开(公告)号:US20180254239A1

    公开(公告)日:2018-09-06

    申请号:US15446109

    申请日:2017-03-01

    CPC classification number: H01L23/49827 H01L21/486 H01L23/15

    Abstract: Methods for reliable interconnect structures between thin metal capture pads and TGV metallization and resulting devices are provided. Embodiments include forming a TGV in a glass substrate; filling with metal conductive paste; forming a metal layer on top and bottom surfaces of the substrate; patterning the metal layer, leaving at least a portion over the TGV top surface and an area surrounding the TGV; forming a dielectric layer on the metal layer and on the substrate top and bottom surfaces; patterning the dielectric layer, including exposing the metal layer over the TGV top surface and the area surrounding the TGV; forming a second metal layer on the dielectric layer and on the exposed portion of the first metal layer over the TGV top surface and the area surrounding the TGV; patterning the second metal layer exposing the dielectric layer; and forming a third metal layer on the second metal layer.

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